JPS6251765U - - Google Patents
Info
- Publication number
- JPS6251765U JPS6251765U JP14216185U JP14216185U JPS6251765U JP S6251765 U JPS6251765 U JP S6251765U JP 14216185 U JP14216185 U JP 14216185U JP 14216185 U JP14216185 U JP 14216185U JP S6251765 U JPS6251765 U JP S6251765U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- piezoresistance
- light shielding
- piezoresistor
- covers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000008188 pellet Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Description
図は本考案の一実施例を示す側面断面図である
。
３……ペレツト、３ａ……ダイヤフラム、５…
…ピエゾ抵抗、１０……光遮蔽体。
The figure is a side sectional view showing an embodiment of the present invention. 3...Pellet, 3a...Diaphragm, 5...
...Piezoresistance, 10...Light shielding body.
Claims (1)
該ダイヤフラムの上記ピエゾ抵抗が形成されてい
る面を被覆する光遮蔽体とを備えたことを特徴と
する半導体圧力センサ。 a silicon diaphragm with piezoresistance;
A semiconductor pressure sensor comprising: a light shielding member that covers a surface of the diaphragm on which the piezoresistor is formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14216185U JPS6251765U (en) | 1985-09-18 | 1985-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14216185U JPS6251765U (en) | 1985-09-18 | 1985-09-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6251765U true JPS6251765U (en) | 1987-03-31 |
Family
ID=31050621
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14216185U Pending JPS6251765U (en) | 1985-09-18 | 1985-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6251765U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60195402A (en) * | 1984-03-16 | 1985-10-03 | Fuji Electric Corp Res & Dev Ltd | Strain gauge |
| JPS6221031A (en) * | 1985-07-19 | 1987-01-29 | Citizen Watch Co Ltd | Pressure sensor unit |
-
1985
- 1985-09-18 JP JP14216185U patent/JPS6251765U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60195402A (en) * | 1984-03-16 | 1985-10-03 | Fuji Electric Corp Res & Dev Ltd | Strain gauge |
| JPS6221031A (en) * | 1985-07-19 | 1987-01-29 | Citizen Watch Co Ltd | Pressure sensor unit |