JPS61205049U - - Google Patents

Info

Publication number
JPS61205049U
JPS61205049U JP8933085U JP8933085U JPS61205049U JP S61205049 U JPS61205049 U JP S61205049U JP 8933085 U JP8933085 U JP 8933085U JP 8933085 U JP8933085 U JP 8933085U JP S61205049 U JPS61205049 U JP S61205049U
Authority
JP
Japan
Prior art keywords
silicon
base
sensor
diaphragm portion
semiconductor pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8933085U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8933085U priority Critical patent/JPS61205049U/ja
Publication of JPS61205049U publication Critical patent/JPS61205049U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例を示す側面断面図、
第２図は従来例を示す側面断面図である。 １……センサペレツト、２……基台、４……ゲ
ル状物質、２０……シリコン板。 FIG. 1 is a side sectional view showing an embodiment of the present invention;
FIG. 2 is a side sectional view showing a conventional example. 1...Sensor pellet, 2...Base, 4...Gel-like substance, 20...Silicon plate.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ダイヤフラム部を有するシリコンセンサペレツ
トと、上記ダイヤフラム部を覆蓋して真空室を形
成するように上記シリコンセンサペレツトにガラ
ス接着されたシリコン板と、基台と、上記シリコ
ン板及び基台の間に介在されたゲル状物質とを備
えたことを特徴とする半導体圧力センサ。 A silicon sensor pellet having a diaphragm portion, a silicon plate glass-bonded to the silicon sensor pellet so as to cover the diaphragm portion and form a vacuum chamber, a base, and between the silicon plate and the base. A semiconductor pressure sensor comprising: a gel-like substance interposed in the semiconductor pressure sensor;
JP8933085U 1985-06-13 1985-06-13 Pending JPS61205049U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8933085U JPS61205049U (en) 1985-06-13 1985-06-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8933085U JPS61205049U (en) 1985-06-13 1985-06-13

Publications (1)

Publication Number Publication Date
JPS61205049U true JPS61205049U (en) 1986-12-24

Family

ID=30643301

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8933085U Pending JPS61205049U (en) 1985-06-13 1985-06-13

Country Status (1)

Country Link
JP (1) JPS61205049U (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54138384A (en) * 1978-04-19 1979-10-26 Mitsubishi Electric Corp Semiconductor pressure converter
JPS54144187A (en) * 1978-04-29 1979-11-10 Hitachi Ltd Semiconductor pressure converter
JPS5821131A (en) * 1981-07-29 1983-02-07 Toshiba Corp Semiconductor pressure sensor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54138384A (en) * 1978-04-19 1979-10-26 Mitsubishi Electric Corp Semiconductor pressure converter
JPS54144187A (en) * 1978-04-29 1979-11-10 Hitachi Ltd Semiconductor pressure converter
JPS5821131A (en) * 1981-07-29 1983-02-07 Toshiba Corp Semiconductor pressure sensor

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