JPS54144187A - Semiconductor pressure converter - Google Patents

Semiconductor pressure converter

Info

Publication number
JPS54144187A
JPS54144187A JP5209378A JP5209378A JPS54144187A JP S54144187 A JPS54144187 A JP S54144187A JP 5209378 A JP5209378 A JP 5209378A JP 5209378 A JP5209378 A JP 5209378A JP S54144187 A JPS54144187 A JP S54144187A
Authority
JP
Japan
Prior art keywords
pressure
electrode
substrate
constitution
die
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5209378A
Other languages
Japanese (ja)
Inventor
Minoru Takahashi
Tomotsugu Inui
Sadayasu Ueno
Hitoshi Minorikawa
Kaoru Uchiyama
Motohisa Nishihara
Hiroji Kawakami
Michitsugu Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5209378A priority Critical patent/JPS54144187A/en
Publication of JPS54144187A publication Critical patent/JPS54144187A/en
Pending legal-status Critical Current

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  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE: To establish the pressure detector for automobile engines without open wire and excellent in the electric insulation, by converting the change in atmosphere pressure into electric signal with piezo effect by taking vacuum, that is, absolute pressure as the reference.
CONSTITUTION: The Si diaphragm 1 consists of the thick fixed part and thin pressure detection part, the gauge resistor 2 is placed on one side with diffusion, and corrosion-proof metal electrode 3 is sputtered at one end. This chip is coupled with the die of BSG under vacuum. On the other hand, at a part of the ceramic substrate 6 having the operational amplifier 5, the hole 7 with bottom is provided, and the die 4 is fixed at the bottom with Si adhesives rich in elasticity. The depth is adjusted as that the electrode 3 on the chip is matched with the electrode 9 on the substrate 6 for the surface position. Connection is made with gold wire, the pressure introducing and protective cover 11 is bonded further, at the both sides of the substrate 6, the lead frame 12 for input and output, and for printed board fitting, is attached. With this constitution, the pressure detector suitable for automobile can be obtained with high insulation, no open wire and thin type.
COPYRIGHT: (C)1979,JPO&Japio
JP5209378A 1978-04-29 1978-04-29 Semiconductor pressure converter Pending JPS54144187A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5209378A JPS54144187A (en) 1978-04-29 1978-04-29 Semiconductor pressure converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5209378A JPS54144187A (en) 1978-04-29 1978-04-29 Semiconductor pressure converter

Publications (1)

Publication Number Publication Date
JPS54144187A true JPS54144187A (en) 1979-11-10

Family

ID=12905211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5209378A Pending JPS54144187A (en) 1978-04-29 1978-04-29 Semiconductor pressure converter

Country Status (1)

Country Link
JP (1) JPS54144187A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5779419A (en) * 1980-09-11 1982-05-18 Gen Motors Corp Pressure sensor assembly
JPS59154332A (en) * 1983-02-22 1984-09-03 Sanyo Electric Co Ltd Semiconductor pressure sensor
JPS61110023A (en) * 1984-11-02 1986-05-28 Citizen Watch Co Ltd Structure of pressure-electricity converter
JPS61115943U (en) * 1984-12-28 1986-07-22
JPS61205049U (en) * 1985-06-13 1986-12-24

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5779419A (en) * 1980-09-11 1982-05-18 Gen Motors Corp Pressure sensor assembly
JPH023130B2 (en) * 1980-09-11 1990-01-22 Gen Motors Corp
JPS59154332A (en) * 1983-02-22 1984-09-03 Sanyo Electric Co Ltd Semiconductor pressure sensor
JPS61110023A (en) * 1984-11-02 1986-05-28 Citizen Watch Co Ltd Structure of pressure-electricity converter
JPS61115943U (en) * 1984-12-28 1986-07-22
JPS61205049U (en) * 1985-06-13 1986-12-24

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