JPS54144187A - Semiconductor pressure converter - Google Patents
Semiconductor pressure converterInfo
- Publication number
- JPS54144187A JPS54144187A JP5209378A JP5209378A JPS54144187A JP S54144187 A JPS54144187 A JP S54144187A JP 5209378 A JP5209378 A JP 5209378A JP 5209378 A JP5209378 A JP 5209378A JP S54144187 A JPS54144187 A JP S54144187A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- electrode
- substrate
- constitution
- die
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE: To establish the pressure detector for automobile engines without open wire and excellent in the electric insulation, by converting the change in atmosphere pressure into electric signal with piezo effect by taking vacuum, that is, absolute pressure as the reference.
CONSTITUTION: The Si diaphragm 1 consists of the thick fixed part and thin pressure detection part, the gauge resistor 2 is placed on one side with diffusion, and corrosion-proof metal electrode 3 is sputtered at one end. This chip is coupled with the die of BSG under vacuum. On the other hand, at a part of the ceramic substrate 6 having the operational amplifier 5, the hole 7 with bottom is provided, and the die 4 is fixed at the bottom with Si adhesives rich in elasticity. The depth is adjusted as that the electrode 3 on the chip is matched with the electrode 9 on the substrate 6 for the surface position. Connection is made with gold wire, the pressure introducing and protective cover 11 is bonded further, at the both sides of the substrate 6, the lead frame 12 for input and output, and for printed board fitting, is attached. With this constitution, the pressure detector suitable for automobile can be obtained with high insulation, no open wire and thin type.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5209378A JPS54144187A (en) | 1978-04-29 | 1978-04-29 | Semiconductor pressure converter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5209378A JPS54144187A (en) | 1978-04-29 | 1978-04-29 | Semiconductor pressure converter |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54144187A true JPS54144187A (en) | 1979-11-10 |
Family
ID=12905211
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5209378A Pending JPS54144187A (en) | 1978-04-29 | 1978-04-29 | Semiconductor pressure converter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54144187A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5779419A (en) * | 1980-09-11 | 1982-05-18 | Gen Motors Corp | Pressure sensor assembly |
JPS59154332A (en) * | 1983-02-22 | 1984-09-03 | Sanyo Electric Co Ltd | Semiconductor pressure sensor |
JPS61110023A (en) * | 1984-11-02 | 1986-05-28 | Citizen Watch Co Ltd | Structure of pressure-electricity converter |
JPS61115943U (en) * | 1984-12-28 | 1986-07-22 | ||
JPS61205049U (en) * | 1985-06-13 | 1986-12-24 |
-
1978
- 1978-04-29 JP JP5209378A patent/JPS54144187A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5779419A (en) * | 1980-09-11 | 1982-05-18 | Gen Motors Corp | Pressure sensor assembly |
JPH023130B2 (en) * | 1980-09-11 | 1990-01-22 | Gen Motors Corp | |
JPS59154332A (en) * | 1983-02-22 | 1984-09-03 | Sanyo Electric Co Ltd | Semiconductor pressure sensor |
JPS61110023A (en) * | 1984-11-02 | 1986-05-28 | Citizen Watch Co Ltd | Structure of pressure-electricity converter |
JPS61115943U (en) * | 1984-12-28 | 1986-07-22 | ||
JPS61205049U (en) * | 1985-06-13 | 1986-12-24 |
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