JPH041459U - - Google Patents
Info
- Publication number
- JPH041459U JPH041459U JP4143490U JP4143490U JPH041459U JP H041459 U JPH041459 U JP H041459U JP 4143490 U JP4143490 U JP 4143490U JP 4143490 U JP4143490 U JP 4143490U JP H041459 U JPH041459 U JP H041459U
- Authority
- JP
- Japan
- Prior art keywords
- acceleration sensor
- semiconductor acceleration
- elastic body
- members
- package
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001133 acceleration Effects 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 2
Landscapes
- Pressure Sensors (AREA)
Description
第1図はこの考案による半導体加速度センサの
パツケージの一実施例を示す断面図、第2図は従
来の半導体加速度センサのパツケージを示す断面
図である。
図において、1は半導体加速度センサ、4は基
板、5は第1部材、7は第2部材、9は弾性体で
ある。なお、各図中同一符号は同一または相当部
分を示す。
FIG. 1 is a sectional view showing an embodiment of a semiconductor acceleration sensor package according to this invention, and FIG. 2 is a sectional view showing a conventional semiconductor acceleration sensor package. In the figure, 1 is a semiconductor acceleration sensor, 4 is a substrate, 5 is a first member, 7 is a second member, and 9 is an elastic body. Note that the same reference numerals in each figure indicate the same or corresponding parts.
Claims (1)
第1部材と上記第1部材に保持された半導体加速
度センサを包囲する第2部材とからなる半導体加
速度センサのパツケージにおいて、上記第1部材
の外周と上記第2部材との間に弾性体を配置し、
該弾性体を介し上記両部材を接続したことを特徴
とする半導体加速度センサのパツケージ。 A semiconductor acceleration sensor package including a first member holding a substrate on which a semiconductor acceleration sensor is mounted and a second member surrounding the semiconductor acceleration sensor held by the first member, wherein the outer periphery of the first member and the second member An elastic body is placed between the two members,
A package for a semiconductor acceleration sensor, characterized in that both of the above members are connected through the elastic body.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4143490U JPH041459U (en) | 1990-04-18 | 1990-04-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4143490U JPH041459U (en) | 1990-04-18 | 1990-04-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH041459U true JPH041459U (en) | 1992-01-08 |
Family
ID=31552098
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4143490U Pending JPH041459U (en) | 1990-04-18 | 1990-04-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH041459U (en) |
-
1990
- 1990-04-18 JP JP4143490U patent/JPH041459U/ja active Pending