JPS57207838A - Optical fiber type pressure sensor - Google Patents

Optical fiber type pressure sensor

Info

Publication number
JPS57207838A
JPS57207838A JP9223981A JP9223981A JPS57207838A JP S57207838 A JPS57207838 A JP S57207838A JP 9223981 A JP9223981 A JP 9223981A JP 9223981 A JP9223981 A JP 9223981A JP S57207838 A JPS57207838 A JP S57207838A
Authority
JP
Japan
Prior art keywords
diaphragm
fixed ring
recessed hole
optical fiber
glass fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9223981A
Other languages
Japanese (ja)
Other versions
JPH023128B2 (en
Inventor
Satoshi Shimada
Kiyomitsu Suzuki
Takao Sasayama
Motohisa Nishihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9223981A priority Critical patent/JPS57207838A/en
Publication of JPS57207838A publication Critical patent/JPS57207838A/en
Publication of JPH023128B2 publication Critical patent/JPH023128B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To elevate sensitivity, by electrostatically junctioning a thick part of a diaphragm having a recessed hole on the tip surface of a pipe, and constituting so that an initial space between the diaphragm and a glass fiber is decided by a depth of said recessed hole. CONSTITUTION:A projecting part 55 of a glass fiber 54 is lapped, the glass fiber 54 and a fixed ring 52 are flattened on the same level, and after that, both of them are specularly finished. Subsequently, a thick circumferential part (fixed part) 58 of a silicon diaphragm 57 on which a recessed hole 56 which is formed on one side is electrostatically junctioned with the end of the fixed ring 52. In this case, as for the junction part, the fixed ring 52 and the diaphragm 57 are junctioned at a temperature causing no deformation of the fixed ring 52 made of glass, therefore, depth of the recessed hole of the diaphragm, as it is, becomes an initial space between the optical fiber 54 and the diaphragm 57, and accordingly, variations in characteristics of a product are reduced, and its sensitivity is elevated.
JP9223981A 1981-06-17 1981-06-17 Optical fiber type pressure sensor Granted JPS57207838A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9223981A JPS57207838A (en) 1981-06-17 1981-06-17 Optical fiber type pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9223981A JPS57207838A (en) 1981-06-17 1981-06-17 Optical fiber type pressure sensor

Publications (2)

Publication Number Publication Date
JPS57207838A true JPS57207838A (en) 1982-12-20
JPH023128B2 JPH023128B2 (en) 1990-01-22

Family

ID=14048880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9223981A Granted JPS57207838A (en) 1981-06-17 1981-06-17 Optical fiber type pressure sensor

Country Status (1)

Country Link
JP (1) JPS57207838A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59109913U (en) * 1983-01-13 1984-07-24 横河電機株式会社 displacement converter
JP2010511146A (en) * 2006-11-27 2010-04-08 キストラー ホールディング アクチエンゲゼルシャフト Optical pressure sensor having at least two optical fibers

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5522819A (en) * 1978-08-04 1980-02-18 Hitachi Ltd Semiconductor strain gauge absolute pressure sensor
JPS5552925A (en) * 1978-10-16 1980-04-17 Hitachi Ltd Standard type pressure sensor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5522819A (en) * 1978-08-04 1980-02-18 Hitachi Ltd Semiconductor strain gauge absolute pressure sensor
JPS5552925A (en) * 1978-10-16 1980-04-17 Hitachi Ltd Standard type pressure sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59109913U (en) * 1983-01-13 1984-07-24 横河電機株式会社 displacement converter
JP2010511146A (en) * 2006-11-27 2010-04-08 キストラー ホールディング アクチエンゲゼルシャフト Optical pressure sensor having at least two optical fibers

Also Published As

Publication number Publication date
JPH023128B2 (en) 1990-01-22

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