JPS5552925A - Standard type pressure sensor - Google Patents

Standard type pressure sensor

Info

Publication number
JPS5552925A
JPS5552925A JP12622878A JP12622878A JPS5552925A JP S5552925 A JPS5552925 A JP S5552925A JP 12622878 A JP12622878 A JP 12622878A JP 12622878 A JP12622878 A JP 12622878A JP S5552925 A JPS5552925 A JP S5552925A
Authority
JP
Japan
Prior art keywords
pressure sensor
stands
resistors
diffusion
standard type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12622878A
Other languages
Japanese (ja)
Inventor
Satoshi Shimada
Hiroji Kawakami
Motohisa Nishihara
Kiyomitsu Suzuki
Shigeyuki Kobori
Hideo Sato
Minoru Takahashi
Ryosaku Kanzawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12622878A priority Critical patent/JPS5552925A/en
Publication of JPS5552925A publication Critical patent/JPS5552925A/en
Pending legal-status Critical Current

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  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE: To make the zero point compensation unnecessary by specifying the value of a diffusion resistor for lead-out.
CONSTITUTION: Lead-out diffusion resistors 10, 12, 23, 34 and 40 made of boron are arranged on the upper side of a diaphragm 1 which is made of silicone and which is formed with a recess 15 for improving the sensitivity. Those resistors are equipped at their both ends with an electrode 13 and Al electrodes 100, 120, 230, 340 and 400 thereby to constitute strain gauges R1WR4. Moreover, a cap 2 of borosilicate having a standard pressure chamber 21 is electrostatically jointed to constitute a standard type pressure sensor. In this pressure sensor, the relationship of R>r'>r is made to hold, in which: R stands for the resistance of the strain gauges R1WR4; r' stands for the equivalent resistance of the diffusion resistors 12 and 23; and r stands for the equivalent resistance of the diffusion resistors 10 and 40. Thus, the output imbalance of the bridge is eliminated together with the influence upon the zero point thereby to make the zeropoint compensation unnecessary.
COPYRIGHT: (C)1980,JPO&Japio
JP12622878A 1978-10-16 1978-10-16 Standard type pressure sensor Pending JPS5552925A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12622878A JPS5552925A (en) 1978-10-16 1978-10-16 Standard type pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12622878A JPS5552925A (en) 1978-10-16 1978-10-16 Standard type pressure sensor

Publications (1)

Publication Number Publication Date
JPS5552925A true JPS5552925A (en) 1980-04-17

Family

ID=14929929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12622878A Pending JPS5552925A (en) 1978-10-16 1978-10-16 Standard type pressure sensor

Country Status (1)

Country Link
JP (1) JPS5552925A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56158931A (en) * 1980-05-13 1981-12-08 Fuji Electric Co Ltd Pressure transducer
JPS57207838A (en) * 1981-06-17 1982-12-20 Hitachi Ltd Optical fiber type pressure sensor
KR100541144B1 (en) * 2003-11-18 2006-01-10 주식회사 케이이씨 Pressure sensor
JP2010151468A (en) * 2008-12-24 2010-07-08 Denso Corp Pressure sensor
JP2010151730A (en) * 2008-12-26 2010-07-08 Denso Corp Pressure sensor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6313356A (en) * 1986-07-04 1988-01-20 Nec Corp Connecting holder for semiconductor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6313356A (en) * 1986-07-04 1988-01-20 Nec Corp Connecting holder for semiconductor

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56158931A (en) * 1980-05-13 1981-12-08 Fuji Electric Co Ltd Pressure transducer
JPS57207838A (en) * 1981-06-17 1982-12-20 Hitachi Ltd Optical fiber type pressure sensor
JPH023128B2 (en) * 1981-06-17 1990-01-22 Hitachi Ltd
KR100541144B1 (en) * 2003-11-18 2006-01-10 주식회사 케이이씨 Pressure sensor
JP2010151468A (en) * 2008-12-24 2010-07-08 Denso Corp Pressure sensor
JP2010151730A (en) * 2008-12-26 2010-07-08 Denso Corp Pressure sensor

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