JPS5730922A - Sensor for pressure difference and pressure - Google Patents

Sensor for pressure difference and pressure

Info

Publication number
JPS5730922A
JPS5730922A JP10505280A JP10505280A JPS5730922A JP S5730922 A JPS5730922 A JP S5730922A JP 10505280 A JP10505280 A JP 10505280A JP 10505280 A JP10505280 A JP 10505280A JP S5730922 A JPS5730922 A JP S5730922A
Authority
JP
Japan
Prior art keywords
gage
resistors
strain
pressure
yielding part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10505280A
Other languages
Japanese (ja)
Inventor
Yasushi Shimizu
Michitaka Shimazoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10505280A priority Critical patent/JPS5730922A/en
Publication of JPS5730922A publication Critical patent/JPS5730922A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To increase the diaphraqm stress and to perform highly accurate measurement by forming semiconductor strain gage resistors approximately parallel with and approximately perpendicular to the central line at the strain region with the same symbol in the thin strain yielding part of a semiconductor diaphragm. CONSTITUTION:At the vicinity of the center of the thin strain yielding part of the semiconductor diaphragm 1, gage resistors 2b and 3b are arranged. Face azimuth is (100) and the gage resistors 2b and 3b are arranged in the direction of <100>. They are provided by forming p type resistors on an n type substrate. In this case, when pressure is applied from the back surface, tensile stress is worked inside the thin strain yielding part. Therefore, the value of the gage resistor 2b in the direction of the diameter is increased, and the value of the gage resistor 3b in the direction perpendicular to the diameter is decreased. The variation in resistance value is taken out as a voltage output from a bridge connection.
JP10505280A 1980-08-01 1980-08-01 Sensor for pressure difference and pressure Pending JPS5730922A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10505280A JPS5730922A (en) 1980-08-01 1980-08-01 Sensor for pressure difference and pressure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10505280A JPS5730922A (en) 1980-08-01 1980-08-01 Sensor for pressure difference and pressure

Publications (1)

Publication Number Publication Date
JPS5730922A true JPS5730922A (en) 1982-02-19

Family

ID=14397209

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10505280A Pending JPS5730922A (en) 1980-08-01 1980-08-01 Sensor for pressure difference and pressure

Country Status (1)

Country Link
JP (1) JPS5730922A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0111640A2 (en) * 1982-09-20 1984-06-27 Hitachi, Ltd. Pressure sensor with semi-conductor diaphragm
JPS63124638U (en) * 1987-02-04 1988-08-15
JP2015059932A (en) * 2013-09-20 2015-03-30 株式会社東芝 Distortion detection element, pressure sensor, microphone, blood pressure sensor, and touch panel

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53121491A (en) * 1977-03-31 1978-10-23 Hitachi Ltd Pressure sensor
US4135408A (en) * 1976-03-24 1979-01-23 Ict Instruments, Inc. Differential pressure measuring transducer assembly

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4135408A (en) * 1976-03-24 1979-01-23 Ict Instruments, Inc. Differential pressure measuring transducer assembly
JPS53121491A (en) * 1977-03-31 1978-10-23 Hitachi Ltd Pressure sensor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0111640A2 (en) * 1982-09-20 1984-06-27 Hitachi, Ltd. Pressure sensor with semi-conductor diaphragm
JPS63124638U (en) * 1987-02-04 1988-08-15
JP2015059932A (en) * 2013-09-20 2015-03-30 株式会社東芝 Distortion detection element, pressure sensor, microphone, blood pressure sensor, and touch panel
US9651432B2 (en) 2013-09-20 2017-05-16 Kabushiki Kaisha Toshiba Strain sensing element, pressure sensor, microphone, blood pressure sensor, and touch panel

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