JPS6427275A - Semiconductor pressure measuring apparatus - Google Patents

Semiconductor pressure measuring apparatus

Info

Publication number
JPS6427275A
JPS6427275A JP17069088A JP17069088A JPS6427275A JP S6427275 A JPS6427275 A JP S6427275A JP 17069088 A JP17069088 A JP 17069088A JP 17069088 A JP17069088 A JP 17069088A JP S6427275 A JPS6427275 A JP S6427275A
Authority
JP
Japan
Prior art keywords
bridge circuit
pressure
hydrostatic
hydrostatic pressure
diffused resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17069088A
Other languages
Japanese (ja)
Other versions
JPH0455542B2 (en
Inventor
Susumu Kimijima
Ryuzo Noda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP17069088A priority Critical patent/JPS6427275A/en
Publication of JPS6427275A publication Critical patent/JPS6427275A/en
Publication of JPH0455542B2 publication Critical patent/JPH0455542B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To make it possible to measure a differential pressure with high precision, by providing a first bridge circuit obtaining a differential pressure output comprising a hydrostatic error using a diffused resistance layer as a pressure sensitive element and a second bridge circuit obtaining a hydrostatic pressure output using a diffused resistance layer for compensation. CONSTITUTION:It becomes possible to measure a fluid pressure with high precision without any influence of a hydrostatic pressure by providing diffused resistance layers 13a-13d sensitive to the hydrostatic pressure on the same semiconductor monocrystalline plate 1 other than diffused resistance layers 3a-3d for detecting a differential pressure and constituting a bridge circuit so as to offset a hydrostatic pressure error using these diffused resistance layers 3. A first bridge circuit outputting the differential pressure comprising the hydrostatic pressure error and a second bridge circuit outputting only the hydrostatic pressure are separately constituted and an output amplifier of the second bridge circuit is provided as a variable gain type. As a result, compensation with high precision becomes possible.
JP17069088A 1988-07-08 1988-07-08 Semiconductor pressure measuring apparatus Granted JPS6427275A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17069088A JPS6427275A (en) 1988-07-08 1988-07-08 Semiconductor pressure measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17069088A JPS6427275A (en) 1988-07-08 1988-07-08 Semiconductor pressure measuring apparatus

Publications (2)

Publication Number Publication Date
JPS6427275A true JPS6427275A (en) 1989-01-30
JPH0455542B2 JPH0455542B2 (en) 1992-09-03

Family

ID=15909590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17069088A Granted JPS6427275A (en) 1988-07-08 1988-07-08 Semiconductor pressure measuring apparatus

Country Status (1)

Country Link
JP (1) JPS6427275A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03218412A (en) * 1990-01-24 1991-09-26 Rohm Co Ltd Angle sensor
JPH04212032A (en) * 1990-03-19 1992-08-03 Hitachi Ltd Compound sensor and compound transmitter and plant system using it
WO2006034751A1 (en) * 2004-09-24 2006-04-06 Grundfos A/S Pressure sensor
JP2010506139A (en) * 2006-05-25 2010-02-25 アールアイシー・インベストメンツ・エルエルシー Airway adapter with optical pressure transducer and method for manufacturing sensor element
JP2015512046A (en) * 2012-03-09 2015-04-23 エプコス アクチエンゲゼルシャフトＥｐｃｏｓ Ａｇ Micro mechanical measuring element
CN104949697A (en) * 2014-03-25 2015-09-30 精工爱普生株式会社 Physical quantity sensor, altimeter, electronic apparatus, and moving object

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5016486A (en) * 1973-06-11 1975-02-21
JPS5182680A (en) * 1974-11-27 1976-07-20 Itt

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5016486A (en) * 1973-06-11 1975-02-21
JPS5182680A (en) * 1974-11-27 1976-07-20 Itt

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03218412A (en) * 1990-01-24 1991-09-26 Rohm Co Ltd Angle sensor
JPH04212032A (en) * 1990-03-19 1992-08-03 Hitachi Ltd Compound sensor and compound transmitter and plant system using it
WO2006034751A1 (en) * 2004-09-24 2006-04-06 Grundfos A/S Pressure sensor
JP2010506139A (en) * 2006-05-25 2010-02-25 アールアイシー・インベストメンツ・エルエルシー Airway adapter with optical pressure transducer and method for manufacturing sensor element
US10086163B2 (en) 2006-05-25 2018-10-02 Koninklijke Philips N.V. Airway adaptor with optical pressure transducer and method of maufacturing a sensor component
JP2015512046A (en) * 2012-03-09 2015-04-23 エプコス アクチエンゲゼルシャフトＥｐｃｏｓ Ａｇ Micro mechanical measuring element
CN104949697A (en) * 2014-03-25 2015-09-30 精工爱普生株式会社 Physical quantity sensor, altimeter, electronic apparatus, and moving object

Also Published As

Publication number Publication date
JPH0455542B2 (en) 1992-09-03

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