JPS5598323A - Vacuummsealed structure for saw pressure sensor - Google Patents

Vacuummsealed structure for saw pressure sensor

Info

Publication number
JPS5598323A
JPS5598323A JP16746779A JP16746779A JPS5598323A JP S5598323 A JPS5598323 A JP S5598323A JP 16746779 A JP16746779 A JP 16746779A JP 16746779 A JP16746779 A JP 16746779A JP S5598323 A JPS5598323 A JP S5598323A
Authority
JP
Japan
Prior art keywords
vacuummsealed
pressure sensor
saw pressure
saw
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16746779A
Other languages
Japanese (ja)
Other versions
JPS6345049B2 (en
Inventor
Edowaado Karen Donarudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Technologies Corp
Original Assignee
United Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Technologies Corp filed Critical United Technologies Corp
Publication of JPS5598323A publication Critical patent/JPS5598323A/en
Publication of JPS6345049B2 publication Critical patent/JPS6345049B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP16746779A 1978-12-22 1979-12-21 Vacuummsealed structure for saw pressure sensor Granted JPS5598323A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US97254278A 1978-12-22 1978-12-22

Publications (2)

Publication Number Publication Date
JPS5598323A true JPS5598323A (en) 1980-07-26
JPS6345049B2 JPS6345049B2 (en) 1988-09-07

Family

ID=25519783

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16746779A Granted JPS5598323A (en) 1978-12-22 1979-12-21 Vacuummsealed structure for saw pressure sensor

Country Status (8)

Country Link
JP (1) JPS5598323A (en)
AU (1) AU524762B2 (en)
CA (1) CA1126975A (en)
DE (1) DE2951469A1 (en)
FR (1) FR2444936A1 (en)
GB (1) GB2037988B (en)
IT (1) IT1125925B (en)
SE (1) SE7910311L (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007513669A (en) * 2003-12-15 2007-05-31 インペリアル カレッジ イノベーションズ リミテッド Elastic wave element

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4983176B2 (en) * 2006-09-14 2012-07-25 セイコーエプソン株式会社 Manufacturing method of pressure sensor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52149992A (en) * 1976-06-09 1977-12-13 Hitachi Ltd Pressure transducer
JPS5365089A (en) * 1976-11-24 1978-06-10 Toshiba Corp Semiconductor pressure transducer

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3697917A (en) * 1971-08-02 1972-10-10 Gen Electric Semiconductor strain gage pressure transducer
GB1389610A (en) * 1972-10-11 1975-04-03 Marconi Co Ltd Surfacewave devices
US4100811A (en) * 1977-03-18 1978-07-18 United Technologies Corporation Differential surface acoustic wave transducer
US4216401A (en) * 1978-12-22 1980-08-05 United Technologies Corporation Surface acoustic wave (SAW) pressure sensor structure

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52149992A (en) * 1976-06-09 1977-12-13 Hitachi Ltd Pressure transducer
JPS5365089A (en) * 1976-11-24 1978-06-10 Toshiba Corp Semiconductor pressure transducer

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007513669A (en) * 2003-12-15 2007-05-31 インペリアル カレッジ イノベーションズ リミテッド Elastic wave element
US8764677B2 (en) 2003-12-15 2014-07-01 Imperial College Innovations Ltd. Implantable surface acoustic wave devices for long term clinical monitoring
USRE47681E1 (en) 2003-12-15 2019-11-05 Ip2Ipo Innovations Limited Implantable surface acoustic wave devices for long term clinical monitoring
USRE48970E1 (en) 2003-12-15 2022-03-15 Ip2Ipo Innovations Limited Implantable surface acoustic wave devices for long term clinical monitoring

Also Published As

Publication number Publication date
AU524762B2 (en) 1982-09-30
FR2444936B1 (en) 1982-10-08
SE7910311L (en) 1980-06-23
DE2951469A1 (en) 1980-07-03
IT1125925B (en) 1986-05-14
CA1126975A (en) 1982-07-06
IT7928110A0 (en) 1979-12-18
GB2037988A (en) 1980-07-16
FR2444936A1 (en) 1980-07-18
AU5379779A (en) 1980-06-26
GB2037988B (en) 1983-03-02
JPS6345049B2 (en) 1988-09-07

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JPS5598323A (en) Vacuummsealed structure for saw pressure sensor