FR2444936B1 - - Google Patents

Info

Publication number
FR2444936B1
FR2444936B1 FR7931570A FR7931570A FR2444936B1 FR 2444936 B1 FR2444936 B1 FR 2444936B1 FR 7931570 A FR7931570 A FR 7931570A FR 7931570 A FR7931570 A FR 7931570A FR 2444936 B1 FR2444936 B1 FR 2444936B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7931570A
Other languages
French (fr)
Other versions
FR2444936A1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RTX Corp
Original Assignee
United Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Technologies Corp filed Critical United Technologies Corp
Publication of FR2444936A1 publication Critical patent/FR2444936A1/en
Application granted granted Critical
Publication of FR2444936B1 publication Critical patent/FR2444936B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
FR7931570A 1978-12-22 1979-12-24 SURFACE SOUND WAVE PRESSURE SENSOR STRUCTURE Granted FR2444936A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US97254278A 1978-12-22 1978-12-22

Publications (2)

Publication Number Publication Date
FR2444936A1 FR2444936A1 (en) 1980-07-18
FR2444936B1 true FR2444936B1 (en) 1982-10-08

Family

ID=25519783

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7931570A Granted FR2444936A1 (en) 1978-12-22 1979-12-24 SURFACE SOUND WAVE PRESSURE SENSOR STRUCTURE

Country Status (8)

Country Link
JP (1) JPS5598323A (en)
AU (1) AU524762B2 (en)
CA (1) CA1126975A (en)
DE (1) DE2951469A1 (en)
FR (1) FR2444936A1 (en)
GB (1) GB2037988B (en)
IT (1) IT1125925B (en)
SE (1) SE7910311L (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0329019D0 (en) 2003-12-15 2004-01-14 Imp College Innovations Ltd Acoustic wave devices
JP4983176B2 (en) * 2006-09-14 2012-07-25 セイコーエプソン株式会社 Manufacturing method of pressure sensor

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3697917A (en) * 1971-08-02 1972-10-10 Gen Electric Semiconductor strain gage pressure transducer
GB1389610A (en) * 1972-10-11 1975-04-03 Marconi Co Ltd Surfacewave devices
JPS52149992A (en) * 1976-06-09 1977-12-13 Hitachi Ltd Pressure transducer
JPS5365089A (en) * 1976-11-24 1978-06-10 Toshiba Corp Semiconductor pressure transducer
US4100811A (en) * 1977-03-18 1978-07-18 United Technologies Corporation Differential surface acoustic wave transducer
US4216401A (en) * 1978-12-22 1980-08-05 United Technologies Corporation Surface acoustic wave (SAW) pressure sensor structure

Also Published As

Publication number Publication date
AU524762B2 (en) 1982-09-30
SE7910311L (en) 1980-06-23
DE2951469A1 (en) 1980-07-03
IT1125925B (en) 1986-05-14
CA1126975A (en) 1982-07-06
IT7928110A0 (en) 1979-12-18
GB2037988A (en) 1980-07-16
FR2444936A1 (en) 1980-07-18
JPS5598323A (en) 1980-07-26
AU5379779A (en) 1980-06-26
GB2037988B (en) 1983-03-02
JPS6345049B2 (en) 1988-09-07

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Legal Events

Date Code Title Description
ST Notification of lapse