FR2444936A1 - SURFACE SOUND WAVE PRESSURE SENSOR STRUCTURE - Google Patents

SURFACE SOUND WAVE PRESSURE SENSOR STRUCTURE

Info

Publication number
FR2444936A1
FR2444936A1 FR7931570A FR7931570A FR2444936A1 FR 2444936 A1 FR2444936 A1 FR 2444936A1 FR 7931570 A FR7931570 A FR 7931570A FR 7931570 A FR7931570 A FR 7931570A FR 2444936 A1 FR2444936 A1 FR 2444936A1
Authority
FR
France
Prior art keywords
wave pressure
pressure sensor
sensor structure
acoustic wave
surface acoustic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7931570A
Other languages
French (fr)
Other versions
FR2444936B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RTX Corp
Original Assignee
United Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Technologies Corp filed Critical United Technologies Corp
Publication of FR2444936A1 publication Critical patent/FR2444936A1/en
Application granted granted Critical
Publication of FR2444936B1 publication Critical patent/FR2444936B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

L'invention concerne une structure de détecteur de pression à ondes acoustiques superficielles. Le détecteur de pression à ondes acoustiques superficielles est soutenu mécaniquement dans une structure à scellement sous vide par un manchon métallique cylindrique qui isole le substrat du détecteur à ondes acoustiques superficielles d'une contrainte thermique induite résultant du cyclage thermique de la structure et qui constitue un conduit de fluide à travers le vide ambiant depuis le diaphragme du détecteur jusqu'à l'orifice formé à travers la paroi de la structure.A surface acoustic wave pressure sensor structure is disclosed. The surface acoustic wave pressure detector is mechanically supported in a vacuum-sealed structure by a cylindrical metal sleeve which isolates the substrate of the surface acoustic wave detector from induced thermal stress resulting from thermal cycling of the structure and which forms a conduit of fluid through the ambient vacuum from the diaphragm of the detector to the orifice formed through the wall of the structure.

FR7931570A 1978-12-22 1979-12-24 SURFACE SOUND WAVE PRESSURE SENSOR STRUCTURE Granted FR2444936A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US97254278A 1978-12-22 1978-12-22

Publications (2)

Publication Number Publication Date
FR2444936A1 true FR2444936A1 (en) 1980-07-18
FR2444936B1 FR2444936B1 (en) 1982-10-08

Family

ID=25519783

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7931570A Granted FR2444936A1 (en) 1978-12-22 1979-12-24 SURFACE SOUND WAVE PRESSURE SENSOR STRUCTURE

Country Status (8)

Country Link
JP (1) JPS5598323A (en)
AU (1) AU524762B2 (en)
CA (1) CA1126975A (en)
DE (1) DE2951469A1 (en)
FR (1) FR2444936A1 (en)
GB (1) GB2037988B (en)
IT (1) IT1125925B (en)
SE (1) SE7910311L (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0329019D0 (en) 2003-12-15 2004-01-14 Imp College Innovations Ltd Acoustic wave devices
JP4983176B2 (en) * 2006-09-14 2012-07-25 セイコーエプソン株式会社 Manufacturing method of pressure sensor

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3697917A (en) * 1971-08-02 1972-10-10 Gen Electric Semiconductor strain gage pressure transducer
GB1389610A (en) * 1972-10-11 1975-04-03 Marconi Co Ltd Surfacewave devices
US4100811A (en) * 1977-03-18 1978-07-18 United Technologies Corporation Differential surface acoustic wave transducer
FR2444927A1 (en) * 1978-12-22 1980-07-18 United Technologies Corp IMPROVED SURFACE SOUND WAVE PRESSURE SENSOR STRUCTURE

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52149992A (en) * 1976-06-09 1977-12-13 Hitachi Ltd Pressure transducer
JPS5365089A (en) * 1976-11-24 1978-06-10 Toshiba Corp Semiconductor pressure transducer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3697917A (en) * 1971-08-02 1972-10-10 Gen Electric Semiconductor strain gage pressure transducer
GB1389610A (en) * 1972-10-11 1975-04-03 Marconi Co Ltd Surfacewave devices
US4100811A (en) * 1977-03-18 1978-07-18 United Technologies Corporation Differential surface acoustic wave transducer
FR2444927A1 (en) * 1978-12-22 1980-07-18 United Technologies Corp IMPROVED SURFACE SOUND WAVE PRESSURE SENSOR STRUCTURE

Also Published As

Publication number Publication date
AU524762B2 (en) 1982-09-30
FR2444936B1 (en) 1982-10-08
SE7910311L (en) 1980-06-23
DE2951469A1 (en) 1980-07-03
IT1125925B (en) 1986-05-14
CA1126975A (en) 1982-07-06
IT7928110A0 (en) 1979-12-18
GB2037988A (en) 1980-07-16
JPS5598323A (en) 1980-07-26
AU5379779A (en) 1980-06-26
GB2037988B (en) 1983-03-02
JPS6345049B2 (en) 1988-09-07

Similar Documents

Publication Publication Date Title
RU94045996A (en) Transducer to determine pressure of working fluid medium
FR2411404B1 (en)
NO20052435L (en) Sealed observation element for viewing a stream of material
FR2391460A1 (en) PRESSURE TRANSDUCER MANOMETER
FR2354548A1 (en) METHOD AND DEVICE FOR THE CONTINUOUS MEASUREMENT OF GASEOUS PRESSURES
FR2444936A1 (en) SURFACE SOUND WAVE PRESSURE SENSOR STRUCTURE
NO174309C (en) Electroacoustic transducer for device in a gaseous fluid, in particular for measuring the flow rate of a pipe under explosive conditions
FR2356923A1 (en) FLUID PRESSURE TRANSDUCER AND USER PRESSURE MEASURING INSTRUMENT
FR2385084A1 (en) ULTRASONIC FLOWMETERS IMPROVEMENT
US4762004A (en) Gas flowmeter and soap bubble generator
DE59102156D1 (en) Pressure transmitter with a rotationally symmetrical ceramic pressure sensor.
BE900043A (en) UNIT STRUCTURE OF THE TRACKING GAS CAPSULE AND CAP OF THE NUCLEAR FUEL COATING TUBE.
FR2386817A1 (en) DIGITAL APPARATUS FOR MEASURING A PRESSURE DIFFERENCE
JPS554559A (en) Pressure sensor using crystal vibrator
GB2019007A (en) In-Line Pressure Sensor
JPS58174868A (en) Device for detecting direction of sound
JPS54153684A (en) Pressure transducer
US4048846A (en) Pressure responsive apparatus
JPS57100352A (en) Stationary type pitot tube
GB2005425A (en) Differential pressure transducer
JPS5723817A (en) Measuring device for gas flow
FR2373049A1 (en) HYDROGEN DETECTOR, ESPECIALLY FOR LIQUID SODIUM WATER VAPOR GENERATORS
SU390487A1 (en) DEEP ACOUSTIC SCREEN
CA1319268C (en) Multiple diaphragm probe seal
SU628415A1 (en) Acoustic leak detector

Legal Events

Date Code Title Description
ST Notification of lapse