JPS554559A - Pressure sensor using crystal vibrator - Google Patents

Pressure sensor using crystal vibrator

Info

Publication number
JPS554559A
JPS554559A JP7773978A JP7773978A JPS554559A JP S554559 A JPS554559 A JP S554559A JP 7773978 A JP7773978 A JP 7773978A JP 7773978 A JP7773978 A JP 7773978A JP S554559 A JPS554559 A JP S554559A
Authority
JP
Japan
Prior art keywords
crystal
vibrators
space
recesses
gas pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7773978A
Other languages
Japanese (ja)
Other versions
JPS5856428B2 (en
Inventor
Kaoru Furusawa
Mitsumaro Koike
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Meisei Electric Co Ltd
Original Assignee
Meisei Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Meisei Electric Co Ltd filed Critical Meisei Electric Co Ltd
Priority to JP53077739A priority Critical patent/JPS5856428B2/en
Publication of JPS554559A publication Critical patent/JPS554559A/en
Publication of JPS5856428B2 publication Critical patent/JPS5856428B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To measure pressure, particularly gas pressure with high accuracy by the beat signals of the oscillation frequencies of the 1st and 2nd crystal vibrators by bonding these two crystal vibrators on a supporting member having mutually independent recesses with said recesses being held hermetically closed. CONSTITUTION:A crystal vibrator holder 3, formed of the same stock as that of crystal vibrators 1, 2, are constituted to a shape having mutually independent circular recesses in its upper and lower portions. The crystal vibrators 1, 2 are bonded in such a manner as to hermetically close these recesses, thereby forming spaces 4 and 5. When the measuring gas pressure P1 is admitted into the space 4 through vent pipe 6 and a reference gas pressure, e.g., atmospheric pressure P2 is admitted into the space 8 through vent pipe 9, then the crystal vibrator 1 produces a frequency change owing to the differential pressure between the space 4 and space 8. On the other hand, no frequency change is produced in the crystal vibrator 2 because the spaces 5 and 8 are communicated by a vent hole 7, thus from the differential signals of the oscillation frequencies of both vibrators 1 and 2, the measuring gas pressure P1 may be measured.
JP53077739A 1978-06-27 1978-06-27 Pressure sensor using a crystal oscillator Expired JPS5856428B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53077739A JPS5856428B2 (en) 1978-06-27 1978-06-27 Pressure sensor using a crystal oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53077739A JPS5856428B2 (en) 1978-06-27 1978-06-27 Pressure sensor using a crystal oscillator

Publications (2)

Publication Number Publication Date
JPS554559A true JPS554559A (en) 1980-01-14
JPS5856428B2 JPS5856428B2 (en) 1983-12-14

Family

ID=13642269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53077739A Expired JPS5856428B2 (en) 1978-06-27 1978-06-27 Pressure sensor using a crystal oscillator

Country Status (1)

Country Link
JP (1) JPS5856428B2 (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5712342A (en) * 1980-06-24 1982-01-22 Citizen Watch Co Ltd Crystal barometer
JPS57108724A (en) * 1980-11-12 1982-07-06 Centre Electron Horloger Pressure converter
JPS5989206U (en) * 1982-12-09 1984-06-16 ソニ−マグネスケ−ル株式会社 position detection device
JPS59141026A (en) * 1983-01-31 1984-08-13 Shimadzu Corp Vacuum gauge
JPS59218961A (en) * 1984-05-07 1984-12-10 Matsushita Electric Ind Co Ltd Anemometer
JPS61125733U (en) * 1985-01-25 1986-08-07
JPS6348133U (en) * 1986-09-17 1988-04-01
JPH03189528A (en) * 1989-12-20 1991-08-19 Seiko Instr Inc Pressure detector using crystal resonator
JP2007093266A (en) * 2005-09-27 2007-04-12 Seiko Instruments Inc Micro reactor and micro reactor system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3355949A (en) * 1964-08-17 1967-12-05 Albert A Elwood Crystal temperature and pressure transucer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3355949A (en) * 1964-08-17 1967-12-05 Albert A Elwood Crystal temperature and pressure transucer

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5712342A (en) * 1980-06-24 1982-01-22 Citizen Watch Co Ltd Crystal barometer
JPS57108724A (en) * 1980-11-12 1982-07-06 Centre Electron Horloger Pressure converter
JPH0240486Y2 (en) * 1982-12-09 1990-10-29
JPS5989206U (en) * 1982-12-09 1984-06-16 ソニ−マグネスケ−ル株式会社 position detection device
JPS59141026A (en) * 1983-01-31 1984-08-13 Shimadzu Corp Vacuum gauge
JPH0544619B2 (en) * 1983-01-31 1993-07-06 Shimadzu Corp
JPS59218961A (en) * 1984-05-07 1984-12-10 Matsushita Electric Ind Co Ltd Anemometer
JPH0519795Y2 (en) * 1985-01-25 1993-05-25
JPS61125733U (en) * 1985-01-25 1986-08-07
JPS6348133U (en) * 1986-09-17 1988-04-01
JPH03189528A (en) * 1989-12-20 1991-08-19 Seiko Instr Inc Pressure detector using crystal resonator
JP2007093266A (en) * 2005-09-27 2007-04-12 Seiko Instruments Inc Micro reactor and micro reactor system
JP4657867B2 (en) * 2005-09-27 2011-03-23 セイコーインスツル株式会社 Microreactor and microreactor system

Also Published As

Publication number Publication date
JPS5856428B2 (en) 1983-12-14

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