JPS554559A - Pressure sensor using crystal vibrator - Google Patents
Pressure sensor using crystal vibratorInfo
- Publication number
- JPS554559A JPS554559A JP7773978A JP7773978A JPS554559A JP S554559 A JPS554559 A JP S554559A JP 7773978 A JP7773978 A JP 7773978A JP 7773978 A JP7773978 A JP 7773978A JP S554559 A JPS554559 A JP S554559A
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- vibrators
- space
- recesses
- gas pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE:To measure pressure, particularly gas pressure with high accuracy by the beat signals of the oscillation frequencies of the 1st and 2nd crystal vibrators by bonding these two crystal vibrators on a supporting member having mutually independent recesses with said recesses being held hermetically closed. CONSTITUTION:A crystal vibrator holder 3, formed of the same stock as that of crystal vibrators 1, 2, are constituted to a shape having mutually independent circular recesses in its upper and lower portions. The crystal vibrators 1, 2 are bonded in such a manner as to hermetically close these recesses, thereby forming spaces 4 and 5. When the measuring gas pressure P1 is admitted into the space 4 through vent pipe 6 and a reference gas pressure, e.g., atmospheric pressure P2 is admitted into the space 8 through vent pipe 9, then the crystal vibrator 1 produces a frequency change owing to the differential pressure between the space 4 and space 8. On the other hand, no frequency change is produced in the crystal vibrator 2 because the spaces 5 and 8 are communicated by a vent hole 7, thus from the differential signals of the oscillation frequencies of both vibrators 1 and 2, the measuring gas pressure P1 may be measured.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53077739A JPS5856428B2 (en) | 1978-06-27 | 1978-06-27 | Pressure sensor using a crystal oscillator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53077739A JPS5856428B2 (en) | 1978-06-27 | 1978-06-27 | Pressure sensor using a crystal oscillator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS554559A true JPS554559A (en) | 1980-01-14 |
JPS5856428B2 JPS5856428B2 (en) | 1983-12-14 |
Family
ID=13642269
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP53077739A Expired JPS5856428B2 (en) | 1978-06-27 | 1978-06-27 | Pressure sensor using a crystal oscillator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5856428B2 (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5712342A (en) * | 1980-06-24 | 1982-01-22 | Citizen Watch Co Ltd | Crystal barometer |
JPS57108724A (en) * | 1980-11-12 | 1982-07-06 | Centre Electron Horloger | Pressure converter |
JPS5989206U (en) * | 1982-12-09 | 1984-06-16 | ソニ−マグネスケ−ル株式会社 | position detection device |
JPS59141026A (en) * | 1983-01-31 | 1984-08-13 | Shimadzu Corp | Vacuum gauge |
JPS59218961A (en) * | 1984-05-07 | 1984-12-10 | Matsushita Electric Ind Co Ltd | Anemometer |
JPS61125733U (en) * | 1985-01-25 | 1986-08-07 | ||
JPS6348133U (en) * | 1986-09-17 | 1988-04-01 | ||
JPH03189528A (en) * | 1989-12-20 | 1991-08-19 | Seiko Instr Inc | Pressure detector using crystal resonator |
JP2007093266A (en) * | 2005-09-27 | 2007-04-12 | Seiko Instruments Inc | Micro reactor and micro reactor system |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3355949A (en) * | 1964-08-17 | 1967-12-05 | Albert A Elwood | Crystal temperature and pressure transucer |
-
1978
- 1978-06-27 JP JP53077739A patent/JPS5856428B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3355949A (en) * | 1964-08-17 | 1967-12-05 | Albert A Elwood | Crystal temperature and pressure transucer |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5712342A (en) * | 1980-06-24 | 1982-01-22 | Citizen Watch Co Ltd | Crystal barometer |
JPS57108724A (en) * | 1980-11-12 | 1982-07-06 | Centre Electron Horloger | Pressure converter |
JPH0240486Y2 (en) * | 1982-12-09 | 1990-10-29 | ||
JPS5989206U (en) * | 1982-12-09 | 1984-06-16 | ソニ−マグネスケ−ル株式会社 | position detection device |
JPS59141026A (en) * | 1983-01-31 | 1984-08-13 | Shimadzu Corp | Vacuum gauge |
JPH0544619B2 (en) * | 1983-01-31 | 1993-07-06 | Shimadzu Corp | |
JPS59218961A (en) * | 1984-05-07 | 1984-12-10 | Matsushita Electric Ind Co Ltd | Anemometer |
JPH0519795Y2 (en) * | 1985-01-25 | 1993-05-25 | ||
JPS61125733U (en) * | 1985-01-25 | 1986-08-07 | ||
JPS6348133U (en) * | 1986-09-17 | 1988-04-01 | ||
JPH03189528A (en) * | 1989-12-20 | 1991-08-19 | Seiko Instr Inc | Pressure detector using crystal resonator |
JP2007093266A (en) * | 2005-09-27 | 2007-04-12 | Seiko Instruments Inc | Micro reactor and micro reactor system |
JP4657867B2 (en) * | 2005-09-27 | 2011-03-23 | セイコーインスツル株式会社 | Microreactor and microreactor system |
Also Published As
Publication number | Publication date |
---|---|
JPS5856428B2 (en) | 1983-12-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB1486377A (en) | Surface acoustic wave transducer | |
ATE37233T1 (en) | DEVICE FOR MEASUREMENT OF THE DENSITY OF GASES. | |
JPS554559A (en) | Pressure sensor using crystal vibrator | |
JPS5612513A (en) | Film oscillation sensor | |
JPS527790A (en) | Stress measuring equipment | |
JPS5726723A (en) | Crystal thermometer | |
JPS5379486A (en) | Tuning-fork-shaped crystal vibrator | |
JPS5388719A (en) | Head phone | |
JPS52149084A (en) | Crystal vibrator | |
JPS646837A (en) | Vibration type differential pressure sensor | |
JPS5560832A (en) | Pressure sensor | |
SU759860A1 (en) | Acoustic frequency sensor | |
JPS5658632A (en) | Pressure detecting device | |
JPS5269289A (en) | Piezo-vibrator unit | |
SU830163A2 (en) | Pressure sensor with frequency output signal | |
JPS5284785A (en) | Altimeter | |
JPS5312A (en) | Am receiver | |
SU1413453A1 (en) | Device for measuring pressure differential | |
ES296829U (en) | Low thermal response time surface acoustic wave pressure sensors. | |
JPS5239390A (en) | Temperature compensation type piezoelectric vibrator | |
SU474716A1 (en) | Piezoelectric differential pressure transmitter | |
SU1493895A1 (en) | Pressure transducer | |
JPS56164933A (en) | Liquid vibrating pressure generator | |
JPS5614929A (en) | Resonant type measuring device using piezoelectric element | |
JPS564019A (en) | Acoustic velocity measuring device |