JPH0519795Y2 - - Google Patents
Info
- Publication number
- JPH0519795Y2 JPH0519795Y2 JP1985008741U JP874185U JPH0519795Y2 JP H0519795 Y2 JPH0519795 Y2 JP H0519795Y2 JP 1985008741 U JP1985008741 U JP 1985008741U JP 874185 U JP874185 U JP 874185U JP H0519795 Y2 JPH0519795 Y2 JP H0519795Y2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- piezoelectric vibrator
- diaphragm
- case
- thickness direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000010287 polarization Effects 0.000 description 11
- 238000005452 bending Methods 0.000 description 8
- 239000000853 adhesive Substances 0.000 description 7
- 230000001070 adhesive effect Effects 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000010355 oscillation Effects 0.000 description 3
- 230000003014 reinforcing effect Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000036772 blood pressure Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
【考案の詳細な説明】
〈産業上の利用分野〉
本考案は、例えば油圧計、水位計もしくは血圧
計等の液体圧力検出計またはガス圧計に使用され
る圧電型の圧力センサに関し、圧電振動子自体を
受圧板として使用することにより、圧電振動子を
受圧板に接着する構造を排し、接着剤による残留
応力の影響を除去して共振周波数の温度履歴特性
をなくすると共に、振幅を大きくし、受圧板を必
要としないようにしたものである。[Detailed description of the invention] <Industrial application field> The present invention relates to a piezoelectric pressure sensor used in a liquid pressure detector or a gas pressure gauge, such as a hydraulic pressure gauge, water level gauge, or blood pressure monitor. By using the piezoelectric vibrator itself as a pressure-receiving plate, the structure of gluing the piezoelectric vibrator to the pressure-receiving plate is eliminated, the influence of residual stress due to adhesive is removed, the temperature history characteristic of the resonance frequency is eliminated, and the amplitude is increased. , which eliminates the need for a pressure receiving plate.
〈従来の技術〉
従来の圧力センサとしては、圧力を受けるダイ
アフラム上に、接着、蒸着、印刷または拡散等の
手段によつてストレンゲージを被着させ、圧力に
よるダイアフラムの機械的変位または歪をストレ
ンゲージの抵抗変化として検出するタイプのもの
が良く知られていたが、最近、ダイアフラム上に
圧電振動子を一体的に接着し、ダイアフラムに加
わる圧力を共振周波数の変化として検出する圧電
型の圧力センサが提案されている。<Prior art> In conventional pressure sensors, a strain gauge is attached onto a diaphragm that receives pressure by means such as adhesion, vapor deposition, printing, or diffusion, and the mechanical displacement or strain of the diaphragm due to pressure is measured by strain gauges. The type that detects changes in the resistance of a gauge was well known, but recently piezoelectric pressure sensors have been developed that have a piezoelectric vibrator integrally bonded onto the diaphragm and detect the pressure applied to the diaphragm as a change in resonance frequency. is proposed.
第６図はこの種の圧力センサの従来例を示し、
円板状等の平板状に形成されたダイアフラム２の
一面２０１上に圧電振動子１を一体に接合した受
圧板を、ケース３内に組込み、ケース３に設けら
れた圧力導入孔４を通して導入される圧力を、ダ
イアフラム２の他面２０２で受圧する構造となつ
ている。圧電振動子１は、円板状に形成された圧
電磁器素体１０１を厚み方向に分極Ｐし、その両
面１０２，１０３に、電極１０４〜１０６を被着
形成し、電極１０４を形成した一面１０２側を、
導電性接着剤を用いて、ダイアフラム２の一面２
０１側に一体に接合させてある。 Figure 6 shows a conventional example of this type of pressure sensor,
A pressure receiving plate, in which the piezoelectric vibrator 1 is integrally bonded to one surface 201 of the diaphragm 2 formed in a flat plate shape such as a disk shape, is incorporated into the case 3, and the pressure receiving plate is introduced through the pressure introduction hole 4 provided in the case 3. The other surface 202 of the diaphragm 2 receives the pressure generated by the diaphragm 2. The piezoelectric vibrator 1 includes a piezoelectric ceramic body 101 formed in the shape of a disk, polarized P in the thickness direction, electrodes 104 to 106 formed on both surfaces 102 and 103, and one surface 102 on which the electrode 104 is formed. side,
One side 2 of the diaphragm 2 using conductive adhesive.
It is integrally joined to the 01 side.
前記ダイアフラム２はケース３によつて周辺支
持される。ダイアフラム２の周辺支持構造として
は、ダイアフラム２をケース３と同一の部材を用
いて一体成形する構造、或いは図示するように、
ケース３を上ケース部材３１及び下ケース部材３
２の２つの部材によつて構成し、これらの上ケー
ス部材３１及び下ケース部材３２の端面間で、ダ
イアフラム２の周辺を両面側から挟持する構造、
更には、ダイアフラム２と熱膨張係数の近似した
ガラス質接着剤等を用いて、ケース３の端面に接
着固定する構造等が採られる。なお、第６図の符
号５〜７は圧電振動子１の電極１０４，１０５及
び１０６のそれぞれに導通接続させた端子であ
る。 The diaphragm 2 is peripherally supported by a case 3. As a peripheral support structure of the diaphragm 2, a structure in which the diaphragm 2 and the case 3 are integrally molded using the same member, or as shown in the figure,
Case 3 is attached to upper case member 31 and lower case member 3.
2, a structure in which the periphery of the diaphragm 2 is sandwiched between the end faces of the upper case member 31 and the lower case member 32 from both sides;
Furthermore, a structure is adopted in which the diaphragm 2 is adhesively fixed to the end surface of the case 3 using a glass adhesive or the like having a coefficient of thermal expansion similar to that of the diaphragm 2. 6 are terminals electrically connected to the electrodes 104, 105, and 106 of the piezoelectric vibrator 1, respectively.
上記圧力センサを用いて圧力検出を行なうに
は、例えば第７図に示すような自励発振式検出回
路を構成する。第７図において、８は第６図に示
した圧力センサ、９は増幅器、C1〜C3はコンデ
ンサ、R1〜R4は抵抗、VRは可変抵抗、Vccは直
流電源電圧、１０は出力端子である。 In order to detect pressure using the pressure sensor described above, a self-oscillation type detection circuit as shown in FIG. 7, for example, is constructed. In Fig. 7, 8 is the pressure sensor shown in Fig. 6, 9 is an amplifier, C 1 to C 3 are capacitors, R 1 to R 4 are resistors, VR is a variable resistor, Vcc is a DC power supply voltage, and 10 is an output. It is a terminal.
この自励発振回路においては、圧力センサ８を
構成する圧電振動子１の電極１０４と電極１０５
との間に交流電圧を印加し、圧電振動子１及びダ
イアフラム２に面方向への屈曲振動を発生させ、
それによつて生じる電圧を電極１０６から増幅器
９の入力に帰還させることにより、自励発振動作
を継続させる。 In this self-excited oscillation circuit, an electrode 104 and an electrode 105 of the piezoelectric vibrator 1 constituting the pressure sensor 8 are
applying an alternating current voltage between the piezoelectric vibrator 1 and the diaphragm 2 to generate bending vibration in the plane direction;
By feeding the resulting voltage back from the electrode 106 to the input of the amplifier 9, the self-oscillation operation is continued.
ここで、圧電振動子１は分極Ｐの方向に一致す
る厚さ方向の両端面１０２，１０３に電極１０４
及び１０５を形成してあり、第１１図に示すよう
に、発振回路等の交流駆動源１１から電極１０４
−１０５間に交流電圧を印加して駆動した場合、
圧電振動子１には径方向D1の変位を生じる。圧
電振動子１の一面側は、ダイアフラム２の一面２
０１に一体に接合してあるから、圧電振動子１に
径方向の変位を与えた場合、ダイアフラム２が負
荷となり、点線イ及びロで示す面方向への屈曲振
動振動モードを発生する。 Here, the piezoelectric vibrator 1 has electrodes 104 on both end faces 102 and 103 in the thickness direction that coincide with the direction of polarization P.
and 105, and as shown in FIG.
When driven by applying an AC voltage between -105,
A displacement occurs in the piezoelectric vibrator 1 in the radial direction D1. One side of the piezoelectric vibrator 1 is one side 2 of the diaphragm 2.
01, when the piezoelectric vibrator 1 is displaced in the radial direction, the diaphragm 2 acts as a load and generates a bending vibration vibration mode in the plane direction shown by dotted lines A and B.
ダイアフラム２及び圧電振動子１が第８図の点
線イ及びロで示すような屈曲振動モードで振動し
ている場合において、ダイアフラム２の受圧面２
０２（第６図）に加わる圧力が変化すると、それ
につれてダイアフラム２の張力が変わり、共振周
波数が変化する。このため、帰還電極１０６を通
して増幅器９に入力される帰還信号の周波数が変
化し、発振周波数が変化する。従つて、発振周波
数からそのときの圧力を検出することができる。 When the diaphragm 2 and the piezoelectric vibrator 1 are vibrating in the bending vibration mode as shown by dotted lines A and B in FIG.
When the pressure applied to 02 (FIG. 6) changes, the tension of the diaphragm 2 changes accordingly, and the resonant frequency changes. Therefore, the frequency of the feedback signal input to the amplifier 9 through the feedback electrode 106 changes, and the oscillation frequency changes. Therefore, the pressure at that time can be detected from the oscillation frequency.
〈考案が解決しようとする課題〉
しかしながら、従来の圧力センサは、温度変化
に対する共振周波数変動が大きいこと、共振周波
数が温度変化に対して履歴特性を持つこと、この
ため温度変動によつて圧力検出誤差を生じること
等の問題があつた。特に共振周波数の温度履歴に
関しては、常温から高温または低温域へ移動させ
た場合、第９図に示すような履歴特性を示し、温
度を元に戻しても、共振周波数が元の値に復帰せ
ず、圧力センサとして使用に耐えないものであつ
た。これらの問題点は、ダイアフラム２と圧電振
動子１とを接着剤等を用いて接合した場合の残留
応力に起因して発生するものと考えられる。例え
ば、ダイアフラム２として金属薄板を使用した場
合、磁器で成る圧電振動子１との間の熱膨張差が
大きくなり、熱膨張差による応力歪が圧電振動子
１に直接作用し、大きな共振周波数の変動となつ
て現われる。<Problems to be solved by the invention> However, conventional pressure sensors have large resonant frequency fluctuations with respect to temperature changes, and the resonant frequency has hysteresis characteristics with respect to temperature changes. There were problems such as errors occurring. In particular, regarding the temperature history of the resonant frequency, when it is moved from room temperature to a high or low temperature range, it exhibits the history characteristics shown in Figure 9, and even when the temperature is returned to its original value, the resonant frequency does not return to its original value. First, it was unusable as a pressure sensor. These problems are thought to be caused by residual stress when the diaphragm 2 and the piezoelectric vibrator 1 are bonded using an adhesive or the like. For example, when a thin metal plate is used as the diaphragm 2, the difference in thermal expansion between the diaphragm 2 and the piezoelectric vibrator 1 made of ceramic becomes large, and stress strain due to the difference in thermal expansion acts directly on the piezoelectric vibrator 1, resulting in a large resonance frequency. It appears as a change.
更に、温度を高温域または低温域に起動させる
ことによつて、接合部に応力緩和または残留蓄積
が生じ、出発点の温度に戻しても元の共振周波数
に復帰しないか、または復帰するとしても非常に
長時間を要する。同様の現象は、ダイアフラム２
とこれの周辺を支持するケース３との間にも見ら
れる。 Furthermore, by starting the temperature into a hot or cold range, stress relaxation or residual build-up occurs in the joint, which may not return to its original resonant frequency upon returning to the starting temperature, or if it does return at all. It takes a very long time. A similar phenomenon occurs with diaphragm 2
It can also be seen between Case 3 and Case 3, which supports the periphery of this.
上記の問題点を解決する手段として、圧電振動
子１、ダイアフラム２及びケース３等の全部材を
同一の材質、つまり磁器によつて構成し、無機接
着剤によつて接合する方法等が試みられたが、接
合方法がむずかしいため、成功例はない。 As a means to solve the above problems, a method has been attempted in which the piezoelectric vibrator 1, diaphragm 2, case 3, etc. are all made of the same material, that is, porcelain, and they are bonded using an inorganic adhesive. However, there has been no success story due to the difficult joining method.
そこで、本考案の課題は、上述した問題点を解
決し、接着剤による残留応力の影響を除去して共
振周波数の温度履歴特性をなくすると共に、振幅
を大きくし、受圧板を必要としない圧力センサを
提供することである。 Therefore, the object of this invention is to solve the above-mentioned problems, eliminate the influence of residual stress due to adhesive, eliminate the temperature history characteristics of the resonance frequency, and increase the amplitude so that pressure is not required without a pressure plate. The purpose is to provide sensors.
〈課題を解決するための手段〉
上記課題を解決するため、本考案は、ケース
と、圧電振動子とを含む圧力センサであつて、
前記ケースは、圧力導入孔を有しており、
前記圧電振動子は、厚み方向の両面に電極を有
し、周辺が、前記圧力導入孔を通して導入された
圧力を前記両面の一面側で受圧するように、前記
ケースによつて支持され、厚み方向の面が複数の
領域に分割され、隣合う領域が厚み方向に互いに
逆方向に分極されている。<Means for Solving the Problems> In order to solve the above problems, the present invention provides a pressure sensor including a case and a piezoelectric vibrator, wherein the case has a pressure introduction hole, and the piezoelectric The vibrator has electrodes on both sides in the thickness direction, and the periphery is supported by the case so that the pressure introduced through the pressure introduction hole is received on one side of both sides, and the periphery is supported by the case on one side of the both sides. is divided into a plurality of regions, and adjacent regions are polarized in opposite directions in the thickness direction.
〈作用〉
上述のように、ケースは、圧力導入孔を有して
おり、圧電振動子は、厚み方向の両面に電極を有
し、周辺が、圧力導入孔を通して導入された圧力
を両面の一面側で受圧するように、ケースによつ
て支持されているから、圧電振動子をダイアフラ
ムに接合する等の構造が不要になる。従つて、ダ
イアフラムと圧電振動子との接合に起因する問題
点が解決される。<Function> As mentioned above, the case has a pressure introduction hole, the piezoelectric vibrator has electrodes on both sides in the thickness direction, and the periphery transfers the pressure introduced through the pressure introduction hole to one side of both sides. Since the piezoelectric vibrator is supported by the case so as to receive pressure on the side, there is no need for a structure such as joining the piezoelectric vibrator to the diaphragm. Therefore, problems caused by the connection between the diaphragm and the piezoelectric vibrator are solved.
圧電振動子は、厚み方向の両面に電極を有し、
厚み方向の面が複数の領域に分割され、隣合う領
域が厚さ方向に互いに逆方向に分極されているか
ら、面方向へ伸長、圧縮する部分が得られ、厚み
方向に振幅の大きい屈曲振動が得られる。このた
め、ダイアフラムにより機械的強度を補強しなく
ても、安定した振幅を得ることができ、ダイアフ
ラムの不要な圧力センサが得られる。 A piezoelectric vibrator has electrodes on both sides in the thickness direction,
Since the surface in the thickness direction is divided into multiple regions, and adjacent regions are polarized in opposite directions in the thickness direction, parts that expand and compress in the surface direction are obtained, resulting in bending vibration with large amplitude in the thickness direction. is obtained. Therefore, a stable amplitude can be obtained without reinforcing the mechanical strength with a diaphragm, and a pressure sensor that does not require a diaphragm can be obtained.
〈実施例〉
第１図は本考案に係る圧力センサの部分断面図
である。図において、第６図と同一の参照符号は
同一性ある構成部分を示している。図示するよう
に、本考案においては、従来必須であつた独立し
たダイアフラムが存在せず、圧電振動子１の周辺
を、ケース３を構成する下ケース部材３２の端面
で直接支持し、一面１０２側を受圧面する構造と
なつている。圧電振動子１の周辺は、無機接着剤
を用いて下ケース部材３２の端面に固着する。<Example> FIG. 1 is a partial sectional view of a pressure sensor according to the present invention. In the figure, the same reference numerals as in FIG. 6 indicate the same components. As shown in the figure, in the present invention, there is no independent diaphragm that was essential in the past, and the periphery of the piezoelectric vibrator 1 is directly supported by the end face of the lower case member 32 that constitutes the case 3, and one side 102 side The structure is such that the surface receives pressure. The periphery of the piezoelectric vibrator 1 is fixed to the end surface of the lower case member 32 using an inorganic adhesive.
上述のように、ケース３は、圧力導入孔４を有
しており、圧電振動子１は、厚み方向の両面に電
極１０４，１０５，１０６を有し、周辺が、圧力
導入孔４を通して導入された圧力を両面の一面側
１０２で受圧するように、ケース１によつて支持
されているから、圧電振動子１をダイアフラムに
接合する等の構造が不要になる。従つて、ダイア
フラムと圧電振動子との接合に起因する問題点が
解決される。 As described above, the case 3 has the pressure introduction hole 4, the piezoelectric vibrator 1 has electrodes 104, 105, 106 on both sides in the thickness direction, and the periphery is introduced through the pressure introduction hole 4. Since the piezoelectric vibrator 1 is supported by the case 1 so as to receive pressure on one side 102 of both surfaces, a structure such as joining the piezoelectric vibrator 1 to a diaphragm is not required. Therefore, problems caused by the connection between the diaphragm and the piezoelectric vibrator are solved.
本考案においては、ダイアフラムを使用しない
ため、圧電振動子１に対して、単独で従来と同様
の屈曲振動モードを発生し得る分極及び電極を付
与する必要がある。その例を第２図〜第５図に示
してある。まず、第２図乃至第４図の実施例で
は、圧電振動子１の面を領域Ａ〜Ｄに四分割し、
隣合う領域ＡとＤ及びＢとＣを圧電磁器素体１０
１の厚さ方向において、互いに逆方向に分極P1，
P2した上で、圧電磁器素体１０１の厚み方向の
一面１０３に電極１０５及び帰還電極１０６を、
また、他面側１０２に電極１０４を設けた構造と
なつている。 In the present invention, since a diaphragm is not used, it is necessary to provide the piezoelectric vibrator 1 with polarization and electrodes that can independently generate a bending vibration mode similar to the conventional piezoelectric vibrator. Examples are shown in FIGS. 2-5. First, in the embodiments shown in FIGS. 2 to 4, the surface of the piezoelectric vibrator 1 is divided into four regions A to D,
Adjacent areas A and D and B and C are connected to the piezoelectric ceramic body 10
Polarization P 1 in opposite directions in the thickness direction of 1,
After P 2 , an electrode 105 and a return electrode 106 are placed on one surface 103 of the piezoelectric ceramic body 101 in the thickness direction.
Further, the structure is such that an electrode 104 is provided on the other side 102.
上記構造の圧電振動子において、電極１０４−
１０５間に交流電源を接続して駆動した場合、第
５図に示すように、領域Ａ及びＣが伸長したとき
に、領域Ｄ及びＢではこれとは反対に圧縮され、
また、領域Ａ及びＣが圧縮されたときに、領域Ｂ
及びＤは伸長する動作を繰返す。このため、圧電
振動子１の周辺を固定した場合、領域Ａ及びＣが
伸長して面方向に膨らむときに、領域Ｄ及びＢが
圧縮されてへこむ分割振動モードにより厚み方向
に振幅の大きい屈曲振動が得られる。従つて、こ
の実施例の圧電振動子１を用いた場合には、ダイ
アフラムにより機械的強度を補強しなくても、安
定した振幅を得ることができ、ダイアフラムを必
要とせずに、圧電振動子自体による屈曲振動モー
ドを利用して圧力を検知する圧力センサを構成す
ることができる。なお、第２図〜第５図の実施例
では、分極領域をＡ〜Ｄの四分割に設定したもの
を示したが、これ以上の個数の分極領域に分割し
てもよい。また、電極１０４及び１０５は、分極
領域Ａ〜Ｄを共通に覆う一つの電極として構成し
てあるが、分極領域Ａ〜Ｄ毎に互いに独立して設
け、これらの独立する電極をリード線等の外部導
体によつて導通接続する構成としてもよい。 In the piezoelectric vibrator having the above structure, the electrode 104-
When driving with an AC power supply connected between 105 and 105, as shown in FIG. 5, when regions A and C are expanded, regions D and B are compressed in the opposite way.
Also, when areas A and C are compressed, area B
and D repeat the stretching operation. Therefore, when the periphery of the piezoelectric vibrator 1 is fixed, bending vibration with large amplitude in the thickness direction is caused by a split vibration mode in which regions A and C expand and bulge in the plane direction, while regions D and B are compressed and dented. is obtained. Therefore, when the piezoelectric vibrator 1 of this embodiment is used, stable amplitude can be obtained without reinforcing the mechanical strength with a diaphragm, and the piezoelectric vibrator itself can be It is possible to construct a pressure sensor that detects pressure using the bending vibration mode. In the embodiments shown in FIGS. 2 to 5, the polarization regions are divided into four parts A to D, but the polarization regions may be divided into a larger number of polarization regions. Further, although the electrodes 104 and 105 are configured as one electrode that commonly covers the polarization regions A to D, they are provided independently for each polarization region A to D, and these independent electrodes are connected to each other by a lead wire or the like. A configuration may also be adopted in which conductive connection is made by an external conductor.
〈本考案の効果〉
上述述べたように、本考案によれば、次のよう
な効果が得られる。<Effects of the present invention> As described above, according to the present invention, the following effects can be obtained.
(a) ケースは、圧力導入孔を有しており、圧電振
動子は、厚み方向の両面に電極を有し、周辺
が、圧力導入孔を通して導入された圧力を両面
の一面側で受圧するように、ケースによつて支
持されているから、ダイアフラムと圧電振動子
との接合に起因した共振周波数の温度履歴特性
を防止し得る圧力センサを提供できる。(a) The case has a pressure introduction hole, and the piezoelectric vibrator has electrodes on both sides in the thickness direction, so that the periphery receives the pressure introduced through the pressure introduction hole on one side of both sides. In addition, since it is supported by the case, it is possible to provide a pressure sensor that can prevent temperature history characteristics of the resonance frequency caused by the bonding between the diaphragm and the piezoelectric vibrator.
(b) 圧電振動子は、厚み方向の両面に電極を有
し、厚み方向の面が複数の領域に分割され、隣
合う領域が厚さ方向に互いに逆方向に分極され
ているから、厚み方向に振幅の大きい屈曲振動
が得られ、ダイアフラムにより機械的強度を補
強しなくても、安定した振幅を得ることがで
き、受圧板を必要としない圧力センサを提供で
きる。(b) A piezoelectric vibrator has electrodes on both sides in the thickness direction, and the surface in the thickness direction is divided into multiple regions, and adjacent regions are polarized in opposite directions in the thickness direction. A bending vibration with a large amplitude can be obtained, a stable amplitude can be obtained without reinforcing the mechanical strength with a diaphragm, and a pressure sensor that does not require a pressure receiving plate can be provided.
第１図は本考案に係る圧力センサの正面部分断
面図、第２図は本考案に係る圧力センサを構成す
る圧電振動子の平面図、第３図は第２図のA1−
A1線上における断面図、第４図は同じく底面図、
第５図は同じく分極領域と振動モードとの関係を
示す図、第６図は従来の圧力センサの部分断面
図、第７図は圧力検出回路の電気回路図、第８図
は従来の圧力センサの動作を説明する図、第９図
は同じくその欠点を説明するための温度−共振周
波数特性図である。
１……圧電振動子、３……ケース、１０１……
圧電磁器素体、１０４〜１０６……電極、Ａ〜Ｄ
……分極領域、Ｐ，P1，P2……分極方向。
FIG. 1 is a front partial cross-sectional view of a pressure sensor according to the present invention, FIG. 2 is a plan view of a piezoelectric vibrator constituting the pressure sensor according to the present invention, and FIG. 3 is a partial cross-sectional view of a pressure sensor according to the present invention.
A sectional view on line A 1 , Figure 4 is also a bottom view,
Figure 5 is a diagram showing the relationship between polarization region and vibration mode, Figure 6 is a partial cross-sectional view of a conventional pressure sensor, Figure 7 is an electric circuit diagram of a pressure detection circuit, and Figure 8 is a diagram of a conventional pressure sensor. FIG. 9 is a temperature-resonance frequency characteristic diagram for explaining the drawbacks thereof. 1...Piezoelectric vibrator, 3...Case, 101...
Piezoelectric ceramic body, 104-106...electrode, A-D
... Polarization region, P, P 1 , P 2 ... Polarization direction.
Claims (1)
つて、 前記ケースは、圧力導入孔を有しており、 前記圧電振動子は、厚み方向の両面に電極を有
し、周辺が、前記圧力導入孔を通して導入された
圧力を前記両面の一面側で受圧するように、前記
ケースによつて支持され、厚み方向の面が複数の
領域に分割され、隣合う領域が厚み方向に互いに
逆方向に分極されている 圧力センサ。[Claims for Utility Model Registration] A pressure sensor including a case and a piezoelectric vibrator, wherein the case has a pressure introduction hole, and the piezoelectric vibrator has electrodes on both sides in the thickness direction. The periphery is supported by the case so as to receive the pressure introduced through the pressure introduction hole on one surface side of the both surfaces, and the surface in the thickness direction is divided into a plurality of regions, and adjacent regions are A pressure sensor that is polarized in opposite directions in the thickness direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985008741U JPH0519795Y2 (en) | 1985-01-25 | 1985-01-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985008741U JPH0519795Y2 (en) | 1985-01-25 | 1985-01-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61125733U JPS61125733U (en) | 1986-08-07 |
| JPH0519795Y2 true JPH0519795Y2 (en) | 1993-05-25 |
Family
ID=30488307
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985008741U Expired - Lifetime JPH0519795Y2 (en) | 1985-01-25 | 1985-01-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0519795Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007035004A1 (en) * | 2005-09-26 | 2007-03-29 | Epson Toyocom Corporation | Tuning bi-fork piezoelectric oscillation element and pressure sensor |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS554559A (en) * | 1978-06-27 | 1980-01-14 | Meisei Electric Co Ltd | Pressure sensor using crystal vibrator |
| JPS55149824A (en) * | 1979-05-11 | 1980-11-21 | Yokogawa Hokushin Electric Corp | Vibration type pressure measuring apparatus |
| JPS59210797A (en) * | 1984-04-16 | 1984-11-29 | Matsushita Electric Ind Co Ltd | Piezoelectric vibrator |
-
1985
- 1985-01-25 JP JP1985008741U patent/JPH0519795Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS554559A (en) * | 1978-06-27 | 1980-01-14 | Meisei Electric Co Ltd | Pressure sensor using crystal vibrator |
| JPS55149824A (en) * | 1979-05-11 | 1980-11-21 | Yokogawa Hokushin Electric Corp | Vibration type pressure measuring apparatus |
| JPS59210797A (en) * | 1984-04-16 | 1984-11-29 | Matsushita Electric Ind Co Ltd | Piezoelectric vibrator |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007035004A1 (en) * | 2005-09-26 | 2007-03-29 | Epson Toyocom Corporation | Tuning bi-fork piezoelectric oscillation element and pressure sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61125733U (en) | 1986-08-07 |
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