JPS63266338A - Piezoelectric vibrator - Google Patents
Piezoelectric vibratorInfo
- Publication number
- JPS63266338A JPS63266338A JP10162587A JP10162587A JPS63266338A JP S63266338 A JPS63266338 A JP S63266338A JP 10162587 A JP10162587 A JP 10162587A JP 10162587 A JP10162587 A JP 10162587A JP S63266338 A JPS63266338 A JP S63266338A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric substrate
- piezoelectric
- vibrator
- electrode
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 102
- 230000002093 peripheral effect Effects 0.000 claims abstract description 8
- 238000005452 bending Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 abstract description 8
- 125000006850 spacer group Chemical group 0.000 description 8
- 239000012530 fluid Substances 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 4
- 230000010287 polarization Effects 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
本発明は、振動体の共振周波数を検出して該振動体に接
触している流体の密度または圧力を測定する振動式トラ
ンスジューサに好適に使用し得る圧電振動子に関する。The present invention relates to a piezoelectric vibrator that can be suitably used in a vibrating transducer that detects the resonance frequency of a vibrating body and measures the density or pressure of a fluid in contact with the vibrating body.
° 上述のような振動式トランスジューサについて、本
件出願人は、既に、金属性基体の少なくとも一面倒に該
面に対向する空洞と該空洞に測定流体を導く筒体とを設
け、金属性基体を該基体に接着した圧電基板で駆動して
曲げ振動させるトランスジューサを提案している（特願
昭６０−２３９２２８号参照）。° Regarding the above-mentioned vibrating transducer, the applicant has already provided a cavity on at least one surface of the metallic substrate and a cylindrical body that guides the measurement fluid into the cavity, and A transducer has been proposed that is driven by a piezoelectric substrate bonded to a base to cause bending vibration (see Japanese Patent Application No. 60-239228).
このトランスジューサは、空洞および筒体の大きさと金
属性基体の弾性とを適宜設定することによって低密度流
体に対しても精度のよい測定が行える利点があるが、金
属性基体の駆動をこの基体に接着した圧電基板で行って
いるので、金属性基体と圧電基板との各熱膨張係数に差
があると温度変動に伴って金属性基体がそり返るという
現象が発生する。したがって上記のようなトランスジュ
ーサでは、金属性基体および圧電基板の再熱膨張係数を
一４０℃〜＋１２０℃というような広い温度範囲にわた
って一致させることは困難であるから、広い温度範囲で
使用すと大きい測定誤差が発生するという問題がある。
そこで、本発明は、上述の点に鑑みてなされ、広い使用
温度範囲にわたって測定誤差の小さい圧電極動子を提供
することを目的とする。This transducer has the advantage of being able to measure accurately even low-density fluids by appropriately setting the sizes of the cavity and cylinder and the elasticity of the metal base. Since this is carried out using a bonded piezoelectric substrate, if there is a difference in the coefficient of thermal expansion between the metallic substrate and the piezoelectric substrate, a phenomenon occurs in which the metallic substrate warps due to temperature fluctuations. Therefore, in the above-mentioned transducer, it is difficult to match the rethermal expansion coefficients of the metal substrate and the piezoelectric substrate over a wide temperature range of -40°C to +120°C. There is a problem that measurement errors occur. Therefore, the present invention has been made in view of the above-mentioned points, and an object of the present invention is to provide a piezo electrode mover with small measurement errors over a wide operating temperature range.
このような目的を達成するために、本発明は、第１の圧
電基板と第２の圧電基板とを積層して接合し、第１の圧
電基板を固定保持し、第１の圧電基板を電気的に駆動す
ることによって、この積層した第１．第２の圧電基板に
屈曲振動を行わせることを特徴とする。
すなわち、第１図に本発明の原理構成を示すように、第
１の圧電基板１と第２の圧電基板２とが積層して接合さ
れ、第１の圧電基板１の片面周縁部が固定部２３に固定
される。第１の圧電基板１と第２の圧電基板２との間に
は電極７が設けられ、この電極７はアース接続される。
第１の圧電基板１の他面には電極４が設けられ、また第
２の圧電基板２の他面には電極１６が設けられる。
この場合、第１の圧電基板１は大径の円板（もしくは楕
円板）に形成されてその片面周縁部が固定部２３に固定
され、第２の圧電基ｖｉ２は小径の円板に形成され、そ
して、第１の圧電基板１は電極７．４間に交流電圧を印
加すると、半径方向に伸縮するように構成されている。
なお、第１の圧電基板１の周縁部の固定は全周に亘って
行う必要はない。In order to achieve such an object, the present invention laminates and joins a first piezoelectric substrate and a second piezoelectric substrate, fixes and holds the first piezoelectric substrate, and connects the first piezoelectric substrate with electricity. By driving the laminated first. It is characterized by causing the second piezoelectric substrate to undergo bending vibration. That is, as shown in FIG. 1 showing the principle structure of the present invention, a first piezoelectric substrate 1 and a second piezoelectric substrate 2 are laminated and bonded, and the peripheral edge of one side of the first piezoelectric substrate 1 is a fixed part. It is fixed at 23. An electrode 7 is provided between the first piezoelectric substrate 1 and the second piezoelectric substrate 2, and this electrode 7 is connected to ground. An electrode 4 is provided on the other surface of the first piezoelectric substrate 1, and an electrode 16 is provided on the other surface of the second piezoelectric substrate 2. In this case, the first piezoelectric substrate 1 is formed as a large-diameter disk (or elliptical plate), and the peripheral edge of one side thereof is fixed to the fixing part 23, and the second piezoelectric substrate vi2 is formed as a small-diameter disk. The first piezoelectric substrate 1 is configured to expand and contract in the radial direction when an alternating current voltage is applied between the electrodes 7.4. Note that it is not necessary to fix the peripheral edge of the first piezoelectric substrate 1 over the entire circumference.
しかして、増幅器２１によって交流電圧を第１の圧電基
板１の電極７．４間に印加すると、半径方向に伸縮力が
働き、片面の周縁部が固定されているので、板厚及び伸
縮力に比例した曲げモーメントが固定部に生じ、圧電基
板１はその面に垂直な方向に振動する。。
一方、第２の圧電基板２にも分極処理を施しておくと、
電極７．１６間にはこの振動に応じた交流電圧が発生す
る。この交流電圧は第１の圧電基板１および第２の圧電
基板２から成る圧電振動子とこの圧電振動子に接する媒
体の付加質量とで定まる機械的共振周波数にて第１の圧
電基板１への印加交流電圧に対し９０＠位相が進む性質
を有する。
それゆえこの位相を補償して第１の圧電基板１に正帰還
回路２２を介して正帰還することにより、第１の圧電基
板１および第２の圧電基板２から成る圧電振動子はその
共振周波数で自動振動することになる。When an AC voltage is applied between the electrodes 7.4 of the first piezoelectric substrate 1 by the amplifier 21, an elastic force acts in the radial direction, and since the peripheral edge of one side is fixed, the plate thickness and the elastic force are affected. A proportional bending moment is created in the fixed part and the piezoelectric substrate 1 vibrates in a direction perpendicular to its plane. . On the other hand, if the second piezoelectric substrate 2 is also subjected to polarization treatment,
An alternating current voltage corresponding to this vibration is generated between the electrodes 7 and 16. This AC voltage is applied to the first piezoelectric substrate 1 at a mechanical resonance frequency determined by the piezoelectric vibrator consisting of the first piezoelectric substrate 1 and the second piezoelectric substrate 2 and the additional mass of the medium in contact with the piezoelectric vibrator. It has a property that the phase advances by 90@ with respect to the applied AC voltage. Therefore, by compensating for this phase and providing positive feedback to the first piezoelectric substrate 1 via the positive feedback circuit 22, the piezoelectric vibrator consisting of the first piezoelectric substrate 1 and the second piezoelectric substrate 2 is adjusted to its resonant frequency. It will vibrate automatically.
次に本発明の実施例を図面に基づいて詳細に説明する。
第２図は本発明の一実施例の断面図、第３図は第２図の
Ａ−Ａ断面図、第４図は第２図の矢印Ｂ方向から示した
概略図である。
しかして、これらの図において、１は厚さ０．１ｍｌ１
１程度の圧電材料薄板から成る円板状の第１の圧電基板
であり、一方の面１ａにはほぼ同心状に電極４が設けら
れている。第１の圧電基板１の他面１ｂには、特に第３
図から明らかなように、この第１の圧電基板１に設けら
れたスルーホール５を介して電極４に電気的に接続され
た電極１５と、この電極１５とは電気的に絶縁されかつ
第１の圧電基板１の他面１ｂのほぼ全面を覆う電極７と
が設けられている。
この電極７上には、厚さ０．１ ｍｍ程度の圧電材料薄
板から成る円板状の第２の圧電基板２が積層して接合さ
れている。この第２の圧電基板２の一面２ａにはスルー
ホール８を介して前記電極６と接続した電極１６がほぼ
同心状に設けられる。円環状スペーサ３は圧電基板２と
同一の材料にて厚さも等しく形成され、その−面３ａに
はスルーホール９を介して電極６と接続された電極１７
と、スルーホール１０を介して電極１５と接続された電
極１８とが形成されている。また、この電極１７．１８
を除いた部分にはスルーホール１１を介して電極７と接
続された電極１９が設けられている。このようにして、
立体的に積層した第１の圧電基板１の面１ａに設けた電
極４、第１の圧電基板１の他面１ｂに設けた電極７、お
よび、第２の圧電基板２の面２ａに設けた電極１６が円
環状スペーサ３の一面にそれぞれスルーホール５，１０
，８，９．１１を介して導出される。
１２はこのように第１の圧電基板１、第２の圧電基板２
）スペーサ３で構成された圧電振動子である。このよう
な圧電振動子１２を製作するには例えばセラミックスの
多層配線基板の製作技術を応用することが可能である。
すなわち、グリーンシート法により製作した薄膜から成
る第１の圧電基板１、第２の圧電基板２．スペーサ３の
各面１ａ。
ｌｂ、’ｌａ、３ａにスクリーン印刷により電極パター
ンを形成し、所定形状に打抜いた後積層してセラミック
スの焼結と電極の焼付けを同時に行い、第１の圧電基板
１と第２の圧電基板２およびスペーサ３との機械的接合
と各電極間の電気的接合を同時に行う。このようにして
接合形成した振動子１２の電極４と７、および６と７の
間にそれぞれ直流電界を加えていわゆる分極処理を施す
ことにより、第１の圧電基板１および第２の圧電基板２
は圧電性を有することになる。ただし、スペーサ３はそ
の上下面にスルーホール１１を介して導通ずる電極７．
１９があるので分極はされない。
第５図は第２図ないし第４図に示した圧電振動子を用い
て流体の密度もしくは圧力を測定する振動式トランスジ
ューサを構成した一例を示す。この第５図において、１
３はこの振動子１２を保持するためのハウジングで、振
動子１２を形成する圧電材料とほぼ熱膨張係数が等しい
Ｎｉ −Ｆｅ合会合材料らなる。このハウジング１３は
その段差部１３ａでスペーサ３に設けた電極１９とハン
ダ付けまたは導電性接着剤等の接合手段を用いて電気的
に接続されるとともに、振動子１２を保持している。ハ
ウジング１３には電極１７および１８に対応した開口２
３および２４が設けられており、この電極１７．１８と
は絶縁されている。また、段差部１３ａの深さは振動子
１２の厚さｈよりも著干深くなっており、振動子１２が
突出しない構造となっている。２５および２６は前記電
極１７および１８に接続したリード線である。２７は底
部２７ａの外面に筒体２８の一端が固定された容器で、
底部２７ａには筒体２８の内部に連通ずる貫通孔２７ｃ
が設けられており、開口側の面２７ｂがハウジング１３
の端面と気密に接合され、振動子１２の電極４との間に
わずかな空隙が残される。なお、この容器２７ハウジン
グ１３と同材料で形成されている。
この容器２７と底部２７ａと圧電振動子１２との間に形
成された空洞２９と、筒体２８内との媒質によって音響
振動系が構成されるが、空洞２９の媒質のバネ定数を十
分大きくすることによって筒体２８内の媒質の質量のみ
が振動子１２の付加質量として作用するよう構成しであ
る。２１は電極４ 、１５．１８を介して交流電圧を第
１の圧電基板１に加える増幅器２２は第２の圧電基板２
に発生した電圧を電極１７，６．１６を介して検出して
増幅器２１に正帰環する帰環回路である。
第１の圧電基板１は前述のように電極７，４間に交流電
圧を印加すると半径方向に伸縮力が生じ、基板１の片面
周縁部が固定されているので、板厚及び伸縮力が比例し
た曲げモーメントが圧電基板１の固定部に加わり、その
面に垂直方向に振動する。一方、第２の圧電基板２も前
述のように分極処理を施しであるので、電極７．１６間
にこの振動に応じた交流電圧が発生する。この交流電圧
は第１の圧電基板１および第２の圧電基板２からなる圧
電振動子１２と筒体２８内の媒質の付加質量で定まる機
械的共振周波数で、圧電基板２に印加した交流電圧に対
し９０°位相が進む性質をもつので、この位相を補償し
て第２の圧電基板２に正帰環することにより、圧電振動
子１２はその共振周波数で自助振動をすることになる。
それゆえ、この周波数を検出回路２０にて計測すれば媒
質の付加１を量すなわち密度（または圧力）を計測でき
る。 ・この振動式トランスジューサにおいて
は、既に説明したように振動子を構成する第１の圧電基
板１を圧電基板２と同一材料にて構成しており、かつ、
同一条件で分極処理を施すので、第１の圧電基板１と第
２の圧電基板２との間の熱膨張率の差を広い温度範囲に
亘って無くすことができ、両者の熱膨張差に伴う、所謂
バイメタル状変形による振動子１２の共振周波数の変化
を防止することができ、精度よく密度を計測することが
できる。また、この振動式トランスジューサにおいては
、圧電基板２に交流電圧を印加するための電極および圧
電基板１の振動を検出するための電極とリード線部をパ
ターン形成し、それぞれをスルーホールで接続すること
によって一つの平面上でかつ振動子１２の固定部分とな
る周縁部分に引き出すようにしであるので、電気的に接
続することが容易でかつす−ド線の振動への影響が無（
なる。更に、第１の圧電基板１を駆動するので第２の圧
電基板の直径・板厚を小さくしても駆動力は低下せず、
外部加振で生じる変位量は軽量化となり小さくなる為、
測定誤差が小さくなり耐振性を向上できる。なお第２の
圧電基板２は第１の圧電基板１の変位を検出できるもの
ならどんな形状でも良い。また、以上の説明では、振動
子に接触している流体の密度または圧力を検出する振動
式トランスジューサに関するものであったが、この振動
子の応用は本実施例に限定されるものでなく、圧電振動
子を用いた形式の装置、たとえば積層型圧電アクチュエ
ータ、圧電ブザー、圧電スピーカ等にも適用できる。
【発明の効果］
以上に説明したように、本発明によれば、振動子を従来
のごとく金属性基体に駆動用圧電金属性基板を接合した
ものとは異なり、固定保持された駆動用の第１の圧電基
板で形成した基体と振動取出用の第２の圧電基板とを接
合して構成したので、駆動用の第１の圧電基板から成る
基体と振動取出用の第２の圧電基板との間の膨張差をほ
ぼ同一にすることができ、熱膨張率の差による熱変形に
伴う振動子の共振周波数の変化を防止できる。
また、本発明によれば、２層に積層した圧電基板の電極
とこの電極に電圧を印加するための電極およびこの電極
から電圧を取り出すためのリード電極とを両圧電基板に
形成したスルーホールを介して一方の圧電基板の一つの
平面上でかつ振動子の固定部となる周縁部に引き出すよ
うに構成したので、回路部との接続を従来のように直接
振動している部品からリード線によって引き出すのと異
なり、リード線の質量や共振等によって振動子の共振周
波数の変動がなくかつ製作コストも低減できる効果があ
る。
更に、第１の圧電基板を駆動するように構成したので第
２の圧電基板２の板厚・直径を小さくしても駆動力が低
下せず軽量化できる為、外部からの加振による変位が小
さくなり測定精度が向上する効果もある。Next, embodiments of the present invention will be described in detail based on the drawings. 2 is a sectional view of one embodiment of the present invention, FIG. 3 is a sectional view taken along the line AA in FIG. 2, and FIG. 4 is a schematic view taken from the direction of arrow B in FIG. Therefore, in these figures, 1 has a thickness of 0.1 ml1
The first piezoelectric substrate is a disk-shaped first piezoelectric substrate made of a thin plate of piezoelectric material of about 1.0 mm, and electrodes 4 are provided substantially concentrically on one surface 1a. In particular, on the other surface 1b of the first piezoelectric substrate 1, a third
As is clear from the figure, the electrode 15 is electrically connected to the electrode 4 through the through hole 5 provided in the first piezoelectric substrate 1, and the electrode 15 is electrically insulated from the first piezoelectric substrate 1. An electrode 7 covering almost the entire surface of the other surface 1b of the piezoelectric substrate 1 is provided. On this electrode 7, a disk-shaped second piezoelectric substrate 2 made of a thin piezoelectric material plate with a thickness of about 0.1 mm is laminated and bonded. On one surface 2a of the second piezoelectric substrate 2, an electrode 16 connected to the electrode 6 through a through hole 8 is provided substantially concentrically. The annular spacer 3 is made of the same material and has the same thickness as the piezoelectric substrate 2, and has an electrode 17 connected to the electrode 6 via a through hole 9 on its negative side 3a.
and an electrode 18 connected to the electrode 15 via the through hole 10. Also, this electrode 17.18
An electrode 19 connected to the electrode 7 via a through hole 11 is provided in the area other than . In this way,
An electrode 4 provided on the surface 1a of the first piezoelectric substrate 1 stacked three-dimensionally, an electrode 7 provided on the other surface 1b of the first piezoelectric substrate 1, and an electrode provided on the surface 2a of the second piezoelectric substrate 2. The electrodes 16 are formed in through holes 5 and 10 on one side of the annular spacer 3, respectively.
, 8, 9.11. 12 is thus a first piezoelectric substrate 1, a second piezoelectric substrate 2
) This is a piezoelectric vibrator composed of spacers 3. To manufacture such a piezoelectric vibrator 12, it is possible to apply, for example, a technique for manufacturing a ceramic multilayer wiring board. That is, a first piezoelectric substrate 1, a second piezoelectric substrate 2, which is made of a thin film manufactured by a green sheet method. Each side 1a of the spacer 3. An electrode pattern is formed on lb, 'la, and 3a by screen printing, and after punching into a predetermined shape, they are laminated, and sintering of the ceramics and baking of the electrodes are performed simultaneously to form the first piezoelectric substrate 1 and the second piezoelectric substrate. 2 and spacer 3, and electrical connection between each electrode is performed simultaneously. By applying a DC electric field between the electrodes 4 and 7 and between the electrodes 6 and 7 of the vibrator 12 bonded in this way and performing a so-called polarization process, the first piezoelectric substrate 1 and the second piezoelectric substrate 2 are
has piezoelectricity. However, the spacer 3 has electrodes 7. connected to the upper and lower surfaces of the spacer 3 through through holes 11.
19, so it is not polarized. FIG. 5 shows an example of a vibrating transducer for measuring the density or pressure of a fluid using the piezoelectric vibrators shown in FIGS. 2 to 4. In this Figure 5, 1
Reference numeral 3 denotes a housing for holding the vibrator 12, which is made of a Ni--Fe aggregation material having approximately the same coefficient of thermal expansion as the piezoelectric material forming the vibrator 12. This housing 13 is electrically connected to an electrode 19 provided on the spacer 3 at its stepped portion 13a by soldering or using a bonding means such as a conductive adhesive, and also holds the vibrator 12. Housing 13 has openings 2 corresponding to electrodes 17 and 18.
3 and 24 are provided and are insulated from this electrode 17.18. Further, the depth of the stepped portion 13a is significantly deeper than the thickness h of the vibrator 12, so that the vibrator 12 does not protrude. 25 and 26 are lead wires connected to the electrodes 17 and 18. 27 is a container in which one end of a cylindrical body 28 is fixed to the outer surface of the bottom portion 27a;
The bottom portion 27a has a through hole 27c that communicates with the inside of the cylinder 28.
is provided, and the opening side surface 27b is connected to the housing 13.
is airtightly joined to the end face of the vibrator 12, leaving a slight gap between the electrode 4 of the vibrator 12 and the electrode 4 of the vibrator 12. Note that this container 27 is made of the same material as the housing 13. An acoustic vibration system is constituted by the cavity 29 formed between the container 27, the bottom 27a, and the piezoelectric vibrator 12, and the medium inside the cylinder 28, but the spring constant of the medium in the cavity 29 is made sufficiently large. As a result, only the mass of the medium within the cylindrical body 28 acts as an additional mass of the vibrator 12. 21 is the electrode 4; an amplifier 22 is the second piezoelectric substrate 2 which applies an AC voltage to the first piezoelectric substrate 1 through 15.18;
This is a return circuit that detects the voltage generated in the circuit through the electrodes 17, 6, 16, and returns the detected voltage to the amplifier 21. As described above, when an AC voltage is applied between the electrodes 7 and 4, the first piezoelectric substrate 1 generates a stretching force in the radial direction, and since the peripheral edge of one side of the substrate 1 is fixed, the plate thickness and the stretching force are proportional. This bending moment is applied to the fixed portion of the piezoelectric substrate 1, causing it to vibrate in a direction perpendicular to its surface. On the other hand, since the second piezoelectric substrate 2 has also been subjected to polarization treatment as described above, an alternating current voltage is generated between the electrodes 7 and 16 in accordance with this vibration. This AC voltage has a mechanical resonance frequency determined by the piezoelectric vibrator 12 consisting of the first piezoelectric substrate 1 and the second piezoelectric substrate 2 and the additional mass of the medium in the cylinder 28, and is applied to the AC voltage applied to the piezoelectric substrate 2. On the other hand, since the phase has the property of advancing by 90°, by compensating for this phase and returning positively to the second piezoelectric substrate 2, the piezoelectric vibrator 12 self-supports vibration at its resonant frequency. Therefore, by measuring this frequency with the detection circuit 20, the amount of addition 1 of the medium, that is, the density (or pressure) can be measured. - In this vibrating transducer, as already explained, the first piezoelectric substrate 1 constituting the vibrator is made of the same material as the piezoelectric substrate 2, and
Since the polarization treatment is performed under the same conditions, the difference in thermal expansion coefficient between the first piezoelectric substrate 1 and the second piezoelectric substrate 2 can be eliminated over a wide temperature range, and the difference in thermal expansion coefficient between the two can be eliminated. , it is possible to prevent a change in the resonance frequency of the vibrator 12 due to so-called bimetallic deformation, and it is possible to measure the density with high accuracy. In addition, in this vibrating transducer, the electrodes for applying an alternating voltage to the piezoelectric substrate 2 and the electrodes and lead wires for detecting the vibration of the piezoelectric substrate 1 are patterned and connected through through holes. Since the wire is drawn out on one plane and to the peripheral portion that is the fixed portion of the vibrator 12, it is easy to electrically connect and there is no influence on the vibration of the lead wire.
Become. Furthermore, since the first piezoelectric substrate 1 is driven, the driving force does not decrease even if the diameter and thickness of the second piezoelectric substrate are reduced.
Since the amount of displacement caused by external vibration becomes smaller due to the weight reduction,
Measurement errors are reduced and vibration resistance can be improved. Note that the second piezoelectric substrate 2 may have any shape as long as it can detect the displacement of the first piezoelectric substrate 1. Furthermore, although the above explanation has been about a vibrating transducer that detects the density or pressure of the fluid in contact with the vibrator, the application of this vibrator is not limited to this example, and is applicable to piezoelectric It can also be applied to devices using vibrators, such as laminated piezoelectric actuators, piezoelectric buzzers, piezoelectric speakers, etc. [Effects of the Invention] As explained above, according to the present invention, unlike the conventional case in which a piezoelectric metal substrate for driving is bonded to a metal base, the vibrator is attached to a fixedly held driving piezoelectric substrate. Since the base body formed of the first piezoelectric substrate and the second piezoelectric substrate for vibration extraction are bonded together, the base body formed of the first piezoelectric substrate for driving and the second piezoelectric substrate for vibration extraction are connected. The difference in expansion between them can be made almost the same, and it is possible to prevent changes in the resonant frequency of the vibrator due to thermal deformation due to a difference in coefficient of thermal expansion. Further, according to the present invention, a through-hole is formed in both piezoelectric substrates to connect the electrode of the piezoelectric substrate laminated in two layers, the electrode for applying voltage to this electrode, and the lead electrode for extracting voltage from this electrode. Since it is constructed so that it is drawn out on one plane of one of the piezoelectric substrates through the wire and to the periphery where the vibrator is fixed, the connection to the circuit section can be made without using lead wires from the directly vibrating parts as in the past. Unlike pulling out, there is no fluctuation in the resonant frequency of the vibrator due to the mass of the lead wire, resonance, etc., and the manufacturing cost can be reduced. Furthermore, since it is configured to drive the first piezoelectric substrate 2, the driving force does not decrease even if the thickness and diameter of the second piezoelectric substrate 2 are reduced, and the weight can be reduced, so that displacement due to external vibration is reduced. It also has the effect of becoming smaller and improving measurement accuracy.
第１図は本発明の原理構成図、第２図は本発明の一実施
例の断面図、第３図は第２図のＡ−Ａ断面図、第４図は
第２図の矢印Ｂ方向から示した概略図、第５図は第２図
ないし第４図に示した実施例を用いた振動式トランスジ
ューサの概略断面図である。
１ ・−・第１の圧電基板、２ ・−・第２の圧電基板
、４、 ７．１６−・電極。
第１図
１２ ｔ、 ＋ａ
第５図Fig. 1 is a diagram showing the basic structure of the present invention, Fig. 2 is a cross-sectional view of an embodiment of the present invention, Fig. 3 is a cross-sectional view taken along line A-A in Fig. 2, and Fig. 4 is a direction of arrow B in Fig. 2. FIG. 5 is a schematic cross-sectional view of a vibrating transducer using the embodiment shown in FIGS. 2 to 4. 1.--First piezoelectric substrate, 2.--Second piezoelectric substrate, 4, 7.16-.Electrode. Fig. 1 12 t, +a Fig. 5
Claims (1)
し、前記第１の圧電基板を固定保持し、前記第１の圧電
基板を電気的に駆動することにより、この前記した第１
および第２の圧電基板に屈曲振動を行わせることを特徴
とする圧電振動子。 ２）特許請求の範囲第１項に記載の圧電振動子において
、第１の圧電基板の片面周縁部を固定保持することを特
徴とする圧電振動子。[Claims] 1) A first piezoelectric substrate and a second piezoelectric substrate are stacked and bonded, the first piezoelectric substrate is fixedly held, and the first piezoelectric substrate is electrically driven. By this, the above-mentioned first
and a piezoelectric vibrator characterized by causing a second piezoelectric substrate to perform bending vibration. 2) A piezoelectric vibrator according to claim 1, wherein a peripheral edge of one side of the first piezoelectric substrate is fixedly held.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10162587A JPS63266338A (en) | 1987-04-24 | 1987-04-24 | Piezoelectric vibrator |
| GB8728115A GB2200211B (en) | 1986-12-08 | 1987-12-01 | Vibration-type transducer |
| US07/129,521 US4961345A (en) | 1986-12-08 | 1987-12-07 | Vibration type transducer |
| DE19873741568 DE3741568A1 (en) | 1986-12-08 | 1987-12-08 | DEVICE AND METHOD FOR DETECTING THE RESONANCE FREQUENCY OF AN VIBRATION ORGAN WHICH IS IN CONTACT WITH A FLUID |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10162587A JPS63266338A (en) | 1987-04-24 | 1987-04-24 | Piezoelectric vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63266338A true JPS63266338A (en) | 1988-11-02 |
Family
ID=14305583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10162587A Pending JPS63266338A (en) | 1986-12-08 | 1987-04-24 | Piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63266338A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002047246A1 (en) * | 2000-12-07 | 2002-06-13 | Amersham Biosciences K.K. | Chip quartz oscillator and liquid-phase sensor |
| CN105375900A (en) * | 2014-08-19 | 2016-03-02 | 英诺晶片科技股份有限公司 | Piezoelectric device and electronic device including the same |
| JP2016145762A (en) * | 2015-02-09 | 2016-08-12 | オリンパス株式会社 | Gas sensor |
-
1987
- 1987-04-24 JP JP10162587A patent/JPS63266338A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002047246A1 (en) * | 2000-12-07 | 2002-06-13 | Amersham Biosciences K.K. | Chip quartz oscillator and liquid-phase sensor |
| US7045931B2 (en) | 2000-12-07 | 2006-05-16 | Amersham Biosciences Kk | Chip quartz oscillator and liquid-phase sensor |
| CN105375900A (en) * | 2014-08-19 | 2016-03-02 | 英诺晶片科技股份有限公司 | Piezoelectric device and electronic device including the same |
| JP2016046803A (en) * | 2014-08-19 | 2016-04-04 | イノチップ テクノロジー シーオー エルティディー | Piezoelectric element and electronic apparatus comprising the same |
| JP2016145762A (en) * | 2015-02-09 | 2016-08-12 | オリンパス株式会社 | Gas sensor |
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