JPH0516523B2 - - Google Patents
Info
- Publication number
- JPH0516523B2 JPH0516523B2 JP5800785A JP5800785A JPH0516523B2 JP H0516523 B2 JPH0516523 B2 JP H0516523B2 JP 5800785 A JP5800785 A JP 5800785A JP 5800785 A JP5800785 A JP 5800785A JP H0516523 B2 JPH0516523 B2 JP H0516523B2
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- piezoelectric element
- section
- detection
- angular velocity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001514 detection method Methods 0.000 claims description 35
- 230000008878 coupling Effects 0.000 claims description 5
- 238000010168 coupling process Methods 0.000 claims description 5
- 238000005859 coupling reaction Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 7
- 239000003990 capacitor Substances 0.000 description 6
- 238000009429 electrical wiring Methods 0.000 description 4
- 230000010287 polarization Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 229910002440 Co–Ni Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
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Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は圧電振動型の角速度センサに関する。[Detailed description of the invention] (Industrial application field) The present invention relates to a piezoelectric vibration type angular velocity sensor.
（従来の技術）
従来、この種の装置として、駆動用圧電素子を
有する駆動部と、検知用圧電素子を有する検知部
とを直交するように結合配置するとともに、交流
駆動電圧を前記駆動用圧電素子に印加して前記駆
動部および検知部を振動駆動させた時にその振動
方向と直交する方向の前記検知部の振動作用にて
前記検知用圧素子より発生する交流電圧を受けて
角速度を検出する検出回路を設けたものがある。(Prior Art) Conventionally, in this type of device, a driving part having a driving piezoelectric element and a detecting part having a detecting piezoelectric element are coupled so as to be orthogonal to each other, and an AC driving voltage is applied to the driving piezoelectric element. The angular velocity is detected by receiving an alternating current voltage generated by the sensing pressure element due to the vibration action of the sensing part in a direction orthogonal to the vibration direction when the driving part and the sensing part are vibrated by applying it to the element. Some are equipped with a detection circuit.
（発明が解決しようとする問題点）
しかしながら、上記構成では、駆動用圧電体に
印加した交流駆動電圧が、駆動部と検知部の間の
容量結合により検知部にもれるため、それが検知
用圧電素子からオフセツト電圧として発生し、こ
のオフセツト電圧によつて角速度検出が正確に行
なえないという問題がある。(Problem to be Solved by the Invention) However, in the above configuration, the AC driving voltage applied to the driving piezoelectric body leaks to the sensing part due to capacitive coupling between the driving part and the sensing part, There is a problem in that an offset voltage is generated from the piezoelectric element, and angular velocity cannot be detected accurately due to this offset voltage.
本発明は上記問題に鑑みたもので、駆動部と検
知部との間の容量結合によつて発生するオフセツ
ト電圧を低減して正確なる角速度検出を行なうこ
とができる角速度センサを提供することを目的と
する。 The present invention has been made in view of the above problems, and an object of the present invention is to provide an angular velocity sensor that can accurately detect angular velocity by reducing the offset voltage generated by capacitive coupling between the driving section and the sensing section. shall be.
（問題点を解決するための手段）
本発明は上記目的を達成するため、第１の圧電
素子を有する駆動部と、第２の圧電素子を有する
検知部とを直交するように結合配置するととも
に、交流駆動電圧を前記第１の圧電素子に印加し
て前記駆動部および前記検知部を振動駆動させた
時にその振動方向と直交する方向の前記検知部の
振動作用にて前記第２の圧電素子より発生する交
流電圧をうけて角速度を検出する検出手段を設け
た角速度センサにおいて、
前記駆動部と前記検知部との間の容量結合に基
づいて前記駆動部から前記検知部にもれる交流電
圧を検出する第３の圧電素子を前記検知部に設
け、さらに前記検出手段は、前記第２の圧電素子
より出力される交流電圧と前記第３の圧電素子よ
り出力される交流電圧との差の電圧を検出する差
電圧検出手段を含み、この差電圧検出手段からの
出力信号により角速度信号を得ることを特徴とし
ている。(Means for Solving the Problems) In order to achieve the above object, the present invention connects and arranges a driving section having a first piezoelectric element and a detecting section having a second piezoelectric element so as to be perpendicular to each other. , when an AC drive voltage is applied to the first piezoelectric element to vibrate the drive section and the detection section, the second piezoelectric element is moved by the vibration action of the detection section in a direction orthogonal to the vibration direction. In the angular velocity sensor, the angular velocity sensor is provided with a detection means for detecting angular velocity by receiving an alternating current voltage generated by the drive unit, and detects an alternating current voltage leaking from the drive unit to the detection unit based on capacitive coupling between the drive unit and the detection unit. A third piezoelectric element to be detected is provided in the detection section, and the detection means further detects a voltage difference between the AC voltage output from the second piezoelectric element and the AC voltage output from the third piezoelectric element. It is characterized in that it includes a differential voltage detecting means for detecting the voltage difference, and obtains an angular velocity signal from an output signal from the differential voltage detecting means.
（作用）
上記構成において、第１の圧電素子は交流電源
からの交流駆動電圧の供給を受けて駆動部および
検知部を振動させる。この振動時に角速度が生じ
ると、検知部がその影響を受けて前記駆動部によ
る振動方向と直交する方向に振動する。この振動
により第２の圧電素子から交流電圧が発生する。
この交流電圧には、駆動部と検知部との間の容量
結合によるもれ電圧が含まれている。また、検知
部には第３の圧電素子が設けられており、上記も
れ電圧を検出する。そして、検出手段において、
前記第２の圧電素子より出力される交流電圧と前
記第３の圧電素子より出力される交流電圧との差
の電圧を検出することにより上記もれ電圧を相殺
し、オフセツト電圧の低減した角速度信号を得
る。(Function) In the above configuration, the first piezoelectric element receives an AC drive voltage from an AC power source and vibrates the drive section and the detection section. When an angular velocity occurs during this vibration, the detection section is influenced by the angular velocity and vibrates in a direction perpendicular to the direction of vibration caused by the drive section. This vibration generates an alternating current voltage from the second piezoelectric element.
This AC voltage includes leakage voltage due to capacitive coupling between the drive section and the detection section. Further, the detection section is provided with a third piezoelectric element to detect the leakage voltage. And in the detection means,
By detecting the voltage difference between the AC voltage output from the second piezoelectric element and the AC voltage output from the third piezoelectric element, the leakage voltage is offset, and an angular velocity signal with a reduced offset voltage is generated. get.
（発明の効果）
従つて、本発明によれば、オフセツト電圧の影
響を少なくして正確なる角速度検出を行なうこと
ができるという優れた効果がある。(Effects of the Invention) Therefore, according to the present invention, there is an excellent effect that accurate angular velocity detection can be performed while reducing the influence of offset voltage.
（実施例）
本実施例で用いた角速度センサの構成を第１図
に示す。この第１図において、１は検知部、２は
駆動部であり、Ａ，A′は上下が互いに直角にな
る用に一体化して構成された金属板（厚さ0.5mm
のFe−Co−Ni合金を用いたもの）で、その検知
部１および駆動部２の片面に、圧電素子１−１，
１−１′，２−１，２−１′（それぞれ厚さ0.2mm
のPZTセラミツクスで、分極されることにより
圧電性を付与されたもの）が接着されている。圧
電素子１−１，１−１′は検知角圧電素子で、圧
電素子２−１，２−１′は駆動用圧電素子である。
そして、検知部１に対しては、さらに分極してい
ない圧電素子１−２，１−２′を形成する。(Example) FIG. 1 shows the configuration of the angular velocity sensor used in this example. In this Fig. 1, 1 is a detection section, 2 is a drive section, and A and A' are metal plates (0.5 mm thick
(using Fe-Co-Ni alloy), and piezoelectric elements 1-1,
1-1', 2-1, 2-1' (each 0.2mm thick)
PZT ceramics (which are polarized to give them piezoelectricity) are bonded together. The piezoelectric elements 1-1, 1-1' are detection angle piezoelectric elements, and the piezoelectric elements 2-1, 2-1' are drive piezoelectric elements.
Further, piezoelectric elements 1-2 and 1-2' which are not polarized are further formed for the detection part 1.
第２図は第１図に示すものの電気結線図であ
る。この図に示すように、駆動用圧電素子２−
１，２−１′と検知用圧電素子１−１，１−１′お
よび未分極の圧電素子１−２，１−２′との間に
はそれぞれ容量４，５が存在している。 FIG. 2 is an electrical wiring diagram of what is shown in FIG. 1. As shown in this figure, the drive piezoelectric element 2-
Capacitors 4 and 5 exist between the detection piezoelectric elements 1-1 and 1-1' and the unpolarized piezoelectric elements 1-2 and 1-2', respectively.
従つて、交流電源３から駆動用圧電体２−１，
２−１′を駆動する交流駆動電圧の一部が容量４，
５を介して検知用圧電素子１−１，１−１′およ
び未分極の圧電素子１−２，１−２′に加えられ
る。このもれ交流電圧が検知用圧電素子１−１，
１−１′のオフセツト電圧になる。 Therefore, the drive piezoelectric body 2-1,
A part of the AC drive voltage that drives 2-1' has a capacity of 4,
5 to the sensing piezoelectric elements 1-1, 1-1' and unpolarized piezoelectric elements 1-2, 1-2'. This leakage AC voltage is detected by the piezoelectric element 1-1,
This results in an offset voltage of 1-1'.
実験によれば、容量４を介して検知用圧電素子
１−１′，１−５′にもれる電圧は第３図の実線の
ようになり、容量５を介して未分極の圧電素子１
−２，１−２′にもれる電圧は第３図の点線のよ
うになり、両者はその振幅値に若干の相違がある
ものの、同位相のかなり似かよつた電圧波形とな
つている。 According to experiments, the voltage leaking to the sensing piezoelectric elements 1-1' and 1-5' through the capacitor 4 is as shown by the solid line in FIG.
The voltages leaking to -2 and 1-2' are as shown by the dotted lines in FIG. 3, and although there is a slight difference in the amplitude values, the voltage waveforms are quite similar and have the same phase.
従つて、検出回路１００で両者の電圧の差をと
れば、交流電源３から容量４を介して検知用圧電
素子１−１′，１−１にもれる電圧の影響を低減
することができる。 Therefore, by detecting the difference between the two voltages in the detection circuit 100, the influence of the voltage leaking from the AC power supply 3 to the detection piezoelectric elements 1-1', 1-1 via the capacitor 4 can be reduced.
第４図は検出回路１００の詳細構成を示す電気
結線図である。検知用圧電素子１−１，１−１′
からの出力電圧はボルテージフオロワ７を介して
アンプ６に加えられる。また、未分極の圧電素子
１−２，１−２′からの出力電圧もボルテージフ
オロア８を介して加えられる。アンプ６はオペア
ンプ６ａと４つの抵抗６ｂ，６ｃ，６ｄ，６ｅに
より構成されている。ここで、検知用圧電素子１
−１，１−１′からの出力電圧をVa、未分極の圧
電素子１−２，１−２′からの出力電圧をVb、抵
抗６ｂ，６ｃ，６ｄ，６ｅの抵抗値をそれぞれ
R1，R2，R3，R4（但しR1＝R3、R2＝R4）とする
と、オペアンプ６ａの出力は、（Va−Vb）×R2／
R1となる。すなわち、このアンプ６は差動増幅
器（差電圧検出手段）として作動し、検知用圧電
素子１−１，１−１′の出力電圧から未分極の圧
電素子１−２，１−２′の出力電圧、すなわち交
流電源３から容量５を介して未分極の圧電素子１
−２，１−２′にもれる電圧（容量４を介して検
知用圧電素子１−１，１−１′にもれる電圧に対
応）を除去する。 FIG. 4 is an electrical wiring diagram showing the detailed configuration of the detection circuit 100. Detection piezoelectric element 1-1, 1-1'
The output voltage is applied to the amplifier 6 via the voltage follower 7. Further, the output voltage from the unpolarized piezoelectric elements 1-2, 1-2' is also applied via the voltage follower 8. The amplifier 6 includes an operational amplifier 6a and four resistors 6b, 6c, 6d, and 6e. Here, the detection piezoelectric element 1
-1, 1-1' output voltage is Va, output voltage from unpolarized piezoelectric element 1-2, 1-2' is Vb, resistance value of resistor 6b, 6c, 6d, 6e, respectively.
Assuming R 1 , R 2 , R 3 , R 4 (where R 1 = R 3 , R 2 = R 4 ), the output of the operational amplifier 6a is (Va-Vb)×R 2 /
It becomes R1 . That is, this amplifier 6 operates as a differential amplifier (differential voltage detection means), and detects the output voltage of the unpolarized piezoelectric elements 1-2, 1-2' from the output voltage of the detection piezoelectric elements 1-1, 1-1'. An unpolarized piezoelectric element 1 is connected to a voltage, that is, an AC power source 3 through a capacitor 5.
-2, 1-2' voltage (corresponding to the voltage leaking to the detection piezoelectric elements 1-1, 1-1' via the capacitor 4) is removed.
このアンプ６の出力電圧はバンドパスフイルタ
９を介して同期検波回路１０に加えられ、交流電
源３からの交流駆動電圧に基づいて同期検波され
る。同期検波された電圧は平滑増幅回路１１によ
り直流の電圧に変換される。 The output voltage of this amplifier 6 is applied to a synchronous detection circuit 10 via a bandpass filter 9, and is synchronously detected based on the AC drive voltage from the AC power supply 3. The synchronously detected voltage is converted into a DC voltage by the smoothing amplifier circuit 11.
なお、上記実施例では、未電極の圧電素子１−
２，１−２′を用いて容量５を介したもれ電圧を
検出するものを示したが、その圧電素子１−２，
１−２′に分極を付与するようにしてもよい。こ
の場合、アンプ６が作動増幅的に作動するため、
圧電素子１−１，１−１′と１−２，１−２′の出
力電圧が逆相になるように、それぞれの分極方向
を例えば第１図の点線で示すように定める（一対
の圧電素子のそれぞれの分極方向が逆になるよう
に定める）必要がある。この場合、もれ電圧に関
しては圧電素子の分極に作用されないため、上記
実施例と同様に除去することができる。 In addition, in the above embodiment, the piezoelectric element 1-
The piezoelectric elements 1-2, 1-2' are used to detect leakage voltage through the capacitor 5.
1-2' may be polarized. In this case, since the amplifier 6 operates in a dynamic amplification manner,
The polarization directions of the piezoelectric elements 1-1, 1-1' and 1-2, 1-2' are determined, for example, as shown by the dotted lines in Fig. (the polarization directions of each element must be opposite to each other). In this case, since the leakage voltage is not affected by the polarization of the piezoelectric element, it can be removed in the same manner as in the above embodiment.
第１図は本発明の一実施例を示す角速度センサ
の構成図、第２図は第１図に示す角速度センサの
電気結線図、第３図はもれ電圧を示す波形図、第
４図は第２図中の検出回路の詳細構成を示す電気
結線図である。
１−１，１−１′，１−２，１−２′，２−１，
２−１′……圧電素子、３……交流電源、６……
アンプ。
Fig. 1 is a configuration diagram of an angular velocity sensor showing an embodiment of the present invention, Fig. 2 is an electrical wiring diagram of the angular velocity sensor shown in Fig. 1, Fig. 3 is a waveform diagram showing leakage voltage, and Fig. 4 is a diagram of the angular velocity sensor shown in Fig. 1. FIG. 3 is an electrical wiring diagram showing the detailed configuration of the detection circuit in FIG. 2; 1-1, 1-1', 1-2, 1-2', 2-1,
2-1'...Piezoelectric element, 3...AC power supply, 6...
Amplifier.
Claims (1)
電素子を有する検知部とを直交するように結合配
置するとともに、交流駆動電圧を前記第１の圧電
素子に印加して前記駆動部および前記検知部を振
動駆動させた時にその摺動方向と直交する方向の
前記検知部の振動作用にて前記第２の圧電素子よ
り発生する交流電圧をうけて角速度を検出する検
出手段を設けた角速度センサにおいて、 前記駆動部と前記検知部との間の容量結合に基
づいて前記駆動部から前記検知部にもれる交流電
圧を検出する第３の圧電素子を前記検知部に設
け、 さらに前記検出手段は、前記第２の圧電素子よ
り出力される交流電圧と前記第３の圧電素子より
出力される交流電圧との差の電圧を検出する差電
圧検出手段を含み、この差電圧検出手段からの出
力信号により角速度信号を得る ことを特徴とする角速度センサ。[Scope of Claims] 1. A driving section having a first piezoelectric element and a detecting section having a second piezoelectric element are coupled to be orthogonal to each other, and an AC driving voltage is applied to the first piezoelectric element. angular velocity is detected by receiving an alternating current voltage generated by the second piezoelectric element due to the vibration action of the detecting section in a direction orthogonal to the sliding direction when the driving section and the detecting section are driven to vibrate. In the angular velocity sensor provided with a detection means, a third piezoelectric element for detecting AC voltage leaking from the drive section to the detection section based on capacitive coupling between the drive section and the detection section is provided in the detection section. Further, the detection means includes a voltage difference detection means for detecting a voltage difference between an AC voltage output from the second piezoelectric element and an AC voltage output from the third piezoelectric element, An angular velocity sensor characterized in that an angular velocity signal is obtained from an output signal from a voltage detection means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60058007A JPS61215916A (en) | 1985-03-21 | 1985-03-21 | Angular velocity sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60058007A JPS61215916A (en) | 1985-03-21 | 1985-03-21 | Angular velocity sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61215916A JPS61215916A (en) | 1986-09-25 |
| JPH0516523B2 true JPH0516523B2 (en) | 1993-03-04 |
Family
ID=13071914
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60058007A Granted JPS61215916A (en) | 1985-03-21 | 1985-03-21 | Angular velocity sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61215916A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02212711A (en) * | 1989-02-13 | 1990-08-23 | Nec Home Electron Ltd | Vibration gyroscope and zero-point adjustor therefor |
| JP4924858B2 (en) * | 2001-07-06 | 2012-04-25 | セイコーエプソン株式会社 | Angular velocity measuring device |
| JP4924912B2 (en) * | 2011-08-24 | 2012-04-25 | セイコーエプソン株式会社 | Angular velocity measuring method and diagnostic circuit for angular velocity measuring device |
-
1985
- 1985-03-21 JP JP60058007A patent/JPS61215916A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61215916A (en) | 1986-09-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |