AU524762B2 - Surface acoustic wave pressure sensor structure - Google Patents

Surface acoustic wave pressure sensor structure

Info

Publication number
AU524762B2
AU524762B2 AU53797/79A AU5379779A AU524762B2 AU 524762 B2 AU524762 B2 AU 524762B2 AU 53797/79 A AU53797/79 A AU 53797/79A AU 5379779 A AU5379779 A AU 5379779A AU 524762 B2 AU524762 B2 AU 524762B2
Authority
AU
Australia
Prior art keywords
pressure sensor
acoustic wave
surface acoustic
sensor structure
wave pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU53797/79A
Other versions
AU5379779A (en
Inventor
Donald Edward Cullen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Technologies Corp
Original Assignee
United Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Technologies Corp filed Critical United Technologies Corp
Publication of AU5379779A publication Critical patent/AU5379779A/en
Application granted granted Critical
Publication of AU524762B2 publication Critical patent/AU524762B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
AU53797/79A 1978-12-22 1979-12-13 Surface acoustic wave pressure sensor structure Ceased AU524762B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US97254278A 1978-12-22 1978-12-22
US972542 1978-12-22

Publications (2)

Publication Number Publication Date
AU5379779A AU5379779A (en) 1980-06-26
AU524762B2 true AU524762B2 (en) 1982-09-30

Family

ID=25519783

Family Applications (1)

Application Number Title Priority Date Filing Date
AU53797/79A Ceased AU524762B2 (en) 1978-12-22 1979-12-13 Surface acoustic wave pressure sensor structure

Country Status (8)

Country Link
JP (1) JPS5598323A (en)
AU (1) AU524762B2 (en)
CA (1) CA1126975A (en)
DE (1) DE2951469A1 (en)
FR (1) FR2444936A1 (en)
GB (1) GB2037988B (en)
IT (1) IT1125925B (en)
SE (1) SE7910311L (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0329019D0 (en) 2003-12-15 2004-01-14 Imp College Innovations Ltd Acoustic wave devices
JP4983176B2 (en) * 2006-09-14 2012-07-25 セイコーエプソン株式会社 Manufacturing method of pressure sensor

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3697917A (en) * 1971-08-02 1972-10-10 Gen Electric Semiconductor strain gage pressure transducer
GB1389610A (en) * 1972-10-11 1975-04-03 Marconi Co Ltd Surfacewave devices
JPS52149992A (en) * 1976-06-09 1977-12-13 Hitachi Ltd Pressure transducer
JPS5365089A (en) * 1976-11-24 1978-06-10 Toshiba Corp Semiconductor pressure transducer
US4100811A (en) * 1977-03-18 1978-07-18 United Technologies Corporation Differential surface acoustic wave transducer
US4216401A (en) * 1978-12-22 1980-08-05 United Technologies Corporation Surface acoustic wave (SAW) pressure sensor structure

Also Published As

Publication number Publication date
IT1125925B (en) 1986-05-14
GB2037988B (en) 1983-03-02
AU5379779A (en) 1980-06-26
FR2444936B1 (en) 1982-10-08
JPS6345049B2 (en) 1988-09-07
GB2037988A (en) 1980-07-16
IT7928110A0 (en) 1979-12-18
JPS5598323A (en) 1980-07-26
DE2951469A1 (en) 1980-07-03
CA1126975A (en) 1982-07-06
FR2444936A1 (en) 1980-07-18
SE7910311L (en) 1980-06-23

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