AU5117679A - Semiconductor pressure transducer assembly - Google Patents

Semiconductor pressure transducer assembly

Info

Publication number
AU5117679A
AU5117679A AU51176/79A AU5117679A AU5117679A AU 5117679 A AU5117679 A AU 5117679A AU 51176/79 A AU51176/79 A AU 51176/79A AU 5117679 A AU5117679 A AU 5117679A AU 5117679 A AU5117679 A AU 5117679A
Authority
AU
Australia
Prior art keywords
pressure transducer
transducer assembly
semiconductor pressure
semiconductor
assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU51176/79A
Inventor
Hitoshi Minorikawa
Minoru Takahashi
Kazuji Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of AU5117679A publication Critical patent/AU5117679A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73265—Layer and wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/1015—Shape
    • H01L2924/10155—Shape being other than a cuboid
    • H01L2924/10158—Shape being other than a cuboid at the passive surface
AU51176/79A 1978-10-06 1979-09-25 Semiconductor pressure transducer assembly Abandoned AU5117679A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP12254078 1978-10-06
JP12254078A JPS5550668A (en) 1978-10-06 1978-10-06 Semiconductor pressure converter

Publications (1)

Publication Number Publication Date
AU5117679A true AU5117679A (en) 1980-04-17

Family

ID=14838386

Family Applications (1)

Application Number Title Priority Date Filing Date
AU51176/79A Abandoned AU5117679A (en) 1978-10-06 1979-09-25 Semiconductor pressure transducer assembly

Country Status (6)

Country Link
JP (1) JPS5550668A (en)
AU (1) AU5117679A (en)
DE (1) DE2940497A1 (en)
FR (1) FR2438264A1 (en)
GB (1) GB2034970A (en)
IT (1) IT7926278A0 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57142533A (en) * 1981-02-27 1982-09-03 Mitsubishi Electric Corp Pressure sensor
JPS6056244U (en) * 1983-09-26 1985-04-19 住友電気工業株式会社 semiconductor pressure sensor
JPS60149369A (en) * 1984-01-14 1985-08-06 Hitoshi Nagaoka Mycelial extract of ganoderma lucidum and production thereof
GB2229816B (en) * 1989-03-31 1992-11-18 Stc Plc Pressure sensor
JPH0465643A (en) * 1990-07-05 1992-03-02 Mitsubishi Electric Corp Semiconductor pressure sensor and its manufacture
AU660358B2 (en) * 1992-03-30 1995-06-22 Awa Microelectronics Pty Limited Silicon transducer
DE4309917A1 (en) * 1992-03-30 1993-10-07 Awa Microelectronics Process for the production of silicon microstructures and silicon microstructure
US6647794B1 (en) * 2002-05-06 2003-11-18 Rosemount Inc. Absolute pressure sensor
TWI583931B (en) * 2016-02-02 2017-05-21 Asia Pacific Microsystems Inc Miniature piezoresistive pressure sensor

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL162254B (en) * 1968-11-29 1979-11-15 Philips Nv SEMI-CONDUCTOR DEVICE FOR CONVERSION OF MECHANICAL VOLTAGES INTO ELECTRICAL SIGNALS AND METHOD OF MANUFACTURING THIS.
US3819431A (en) * 1971-10-05 1974-06-25 Kulite Semiconductor Products Method of making transducers employing integral protective coatings and supports
JPS5217780A (en) * 1975-07-04 1977-02-09 Hitachi Ltd Pressure convertor with semi-conductor elements
JPS52127257A (en) * 1976-04-19 1977-10-25 Hitachi Ltd Displacement converter

Also Published As

Publication number Publication date
GB2034970A (en) 1980-06-11
DE2940497A1 (en) 1980-04-10
JPS5550668A (en) 1980-04-12
FR2438264A1 (en) 1980-04-30
IT7926278A0 (en) 1979-10-05

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