SE7910311L - PRESSURE SENSOR CONSTRUCTION FOR SURFACE CARS (SAW) - Google Patents

PRESSURE SENSOR CONSTRUCTION FOR SURFACE CARS (SAW)

Info

Publication number
SE7910311L
SE7910311L SE7910311A SE7910311A SE7910311L SE 7910311 L SE7910311 L SE 7910311L SE 7910311 A SE7910311 A SE 7910311A SE 7910311 A SE7910311 A SE 7910311A SE 7910311 L SE7910311 L SE 7910311L
Authority
SE
Sweden
Prior art keywords
saw
pressure sensor
sensor construction
surface cars
sensor
Prior art date
Application number
SE7910311A
Other languages
Unknown language ( )
Swedish (sv)
Inventor
D E Cullen
Original Assignee
United Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Technologies Corp filed Critical United Technologies Corp
Publication of SE7910311L publication Critical patent/SE7910311L/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

A surface acoustic wave (SAW) pressure sensor 10 is mechanically supported within a vacuum sealing structure 32, 36 by a cylindrical metal sleeve 44 which isolates the SAW sensor substrate 11 from induced thermal strain resulting from temperature cycling of the structure, and which provides for a fluid conduit 48 through the vacuum environment from the sensor diaphragm to an orifice 50 formed through the wall of the structure. <IMAGE>
SE7910311A 1978-12-22 1979-12-14 PRESSURE SENSOR CONSTRUCTION FOR SURFACE CARS (SAW) SE7910311L (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US97254278A 1978-12-22 1978-12-22

Publications (1)

Publication Number Publication Date
SE7910311L true SE7910311L (en) 1980-06-23

Family

ID=25519783

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7910311A SE7910311L (en) 1978-12-22 1979-12-14 PRESSURE SENSOR CONSTRUCTION FOR SURFACE CARS (SAW)

Country Status (8)

Country Link
JP (1) JPS5598323A (en)
AU (1) AU524762B2 (en)
CA (1) CA1126975A (en)
DE (1) DE2951469A1 (en)
FR (1) FR2444936A1 (en)
GB (1) GB2037988B (en)
IT (1) IT1125925B (en)
SE (1) SE7910311L (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0329019D0 (en) 2003-12-15 2004-01-14 Imp College Innovations Ltd Acoustic wave devices
JP4983176B2 (en) * 2006-09-14 2012-07-25 セイコーエプソン株式会社 Manufacturing method of pressure sensor

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3697917A (en) * 1971-08-02 1972-10-10 Gen Electric Semiconductor strain gage pressure transducer
GB1389610A (en) * 1972-10-11 1975-04-03 Marconi Co Ltd Surfacewave devices
JPS52149992A (en) * 1976-06-09 1977-12-13 Hitachi Ltd Pressure transducer
JPS5365089A (en) * 1976-11-24 1978-06-10 Toshiba Corp Semiconductor pressure transducer
US4100811A (en) * 1977-03-18 1978-07-18 United Technologies Corporation Differential surface acoustic wave transducer
US4216401A (en) * 1978-12-22 1980-08-05 United Technologies Corporation Surface acoustic wave (SAW) pressure sensor structure

Also Published As

Publication number Publication date
FR2444936A1 (en) 1980-07-18
CA1126975A (en) 1982-07-06
JPS5598323A (en) 1980-07-26
DE2951469A1 (en) 1980-07-03
JPS6345049B2 (en) 1988-09-07
IT7928110A0 (en) 1979-12-18
AU5379779A (en) 1980-06-26
GB2037988A (en) 1980-07-16
AU524762B2 (en) 1982-09-30
GB2037988B (en) 1983-03-02
IT1125925B (en) 1986-05-14
FR2444936B1 (en) 1982-10-08

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