JPS5245377A - Silicon mechanical-electrical converter - Google Patents

Silicon mechanical-electrical converter

Info

Publication number
JPS5245377A
JPS5245377A JP12066075A JP12066075A JPS5245377A JP S5245377 A JPS5245377 A JP S5245377A JP 12066075 A JP12066075 A JP 12066075A JP 12066075 A JP12066075 A JP 12066075A JP S5245377 A JPS5245377 A JP S5245377A
Authority
JP
Japan
Prior art keywords
electrical converter
temperature coefficient
silicon
silicon mechanical
resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12066075A
Other languages
Japanese (ja)
Inventor
Michitaka Shimazoe
Kosuke Nakamura
Yasuo Matsushita
Kazuji Yamada
Yukio Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12066075A priority Critical patent/JPS5245377A/en
Publication of JPS5245377A publication Critical patent/JPS5245377A/en
Pending legal-status Critical Current

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Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE: To approximate the sum of the resistance temperature coefficient and gauge rate temperature coefficient of silicon strain gauges to the resistance temperature coefficient of rebalancing resistance group of a silicon mechanical-electrical converter provided with a zero shifting function, thereby preventing the change in zero point owing to temperature.
COPYRIGHT: (C)1977,JPO&Japio
JP12066075A 1975-10-08 1975-10-08 Silicon mechanical-electrical converter Pending JPS5245377A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12066075A JPS5245377A (en) 1975-10-08 1975-10-08 Silicon mechanical-electrical converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12066075A JPS5245377A (en) 1975-10-08 1975-10-08 Silicon mechanical-electrical converter

Publications (1)

Publication Number Publication Date
JPS5245377A true JPS5245377A (en) 1977-04-09

Family

ID=14791729

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12066075A Pending JPS5245377A (en) 1975-10-08 1975-10-08 Silicon mechanical-electrical converter

Country Status (1)

Country Link
JP (1) JPS5245377A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5451489A (en) * 1977-09-30 1979-04-23 Toshiba Corp Semiconductor pressure converter
JPS5481088A (en) * 1977-12-12 1979-06-28 Toshiba Corp Semiconductor pressure converting device
JPS57177574A (en) * 1981-04-24 1982-11-01 Omron Tateisi Electronics Co Manufacture of semiconductor pressure-sensitive element
JPS59112593U (en) * 1983-01-20 1984-07-30 オリオン機械株式会社 Vacuum generator with vacuum pressure detection function of suction part
JPS60259922A (en) * 1984-06-05 1985-12-23 Sumitomo Electric Ind Ltd Strain sensor
JPS61107774A (en) * 1984-10-30 1986-05-26 バア−−ブラウン　コ−ポレ−シヨン Pressure sensor and making thereof
JPS62108842U (en) * 1985-12-26 1987-07-11
JPH0587648A (en) * 1991-09-30 1993-04-06 Nissan Motor Co Ltd Semiconductor stress detector
JPH0587649A (en) * 1991-09-30 1993-04-06 Nissan Motor Co Ltd Semiconductor stress detector

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5451489A (en) * 1977-09-30 1979-04-23 Toshiba Corp Semiconductor pressure converter
JPS6222272B2 (en) * 1977-09-30 1987-05-16 Tokyo Shibaura Electric Co
JPS5481088A (en) * 1977-12-12 1979-06-28 Toshiba Corp Semiconductor pressure converting device
JPS57177574A (en) * 1981-04-24 1982-11-01 Omron Tateisi Electronics Co Manufacture of semiconductor pressure-sensitive element
JPS59112593U (en) * 1983-01-20 1984-07-30 オリオン機械株式会社 Vacuum generator with vacuum pressure detection function of suction part
JPS60259922A (en) * 1984-06-05 1985-12-23 Sumitomo Electric Ind Ltd Strain sensor
JPH0546488B2 (en) * 1984-06-05 1993-07-14 Sumitomo Electric Industries
JPS61107774A (en) * 1984-10-30 1986-05-26 バア−−ブラウン　コ−ポレ−シヨン Pressure sensor and making thereof
JPH0350424B2 (en) * 1984-10-30 1991-08-01 Burr Brown Corp
JPS62108842U (en) * 1985-12-26 1987-07-11
JPH0587648A (en) * 1991-09-30 1993-04-06 Nissan Motor Co Ltd Semiconductor stress detector
JPH0587649A (en) * 1991-09-30 1993-04-06 Nissan Motor Co Ltd Semiconductor stress detector

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