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Hitachi Ltd
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Hitachi Ltd
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Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority to JP2967777ApriorityCriticalpatent/JPS53114687A/en
Publication of JPS53114687ApublicationCriticalpatent/JPS53114687A/en
Transmission And Conversion Of Sensor Element Output
(AREA)
Pressure Sensors
(AREA)
Abstract
PURPOSE: To increase the accuracy, by compensating the non-linearity of the sensing fine resistor of the semiconductor strain gauge in which the direction of flowing current and stress are orthogonal each other, in a semiconductor strain gauge.
COPYRIGHT: (C)1978,JPO&Japio
JP2967777A1977-03-171977-03-17Strain measuring device of semiconductor
PendingJPS53114687A
(en)