JPS5316654A - Measurement method of strain and semiconductor strain gauge - Google Patents
Measurement method of strain and semiconductor strain gaugeInfo
- Publication number
- JPS5316654A JPS5316654A JP9108176A JP9108176A JPS5316654A JP S5316654 A JPS5316654 A JP S5316654A JP 9108176 A JP9108176 A JP 9108176A JP 9108176 A JP9108176 A JP 9108176A JP S5316654 A JPS5316654 A JP S5316654A
- Authority
- JP
- Japan
- Prior art keywords
- strain
- measurement method
- semiconductor
- strain gauge
- gauge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Pressure Sensors (AREA)
Abstract
PURPOSE: To improve the linearity between strain and the electric resistance change rate of the diffused layer of semiconductors by performing measuring in the condition where residual tensile stress is applied to a semiconductor strain guage.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9108176A JPS5316654A (en) | 1976-07-29 | 1976-07-29 | Measurement method of strain and semiconductor strain gauge |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9108176A JPS5316654A (en) | 1976-07-29 | 1976-07-29 | Measurement method of strain and semiconductor strain gauge |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5316654A true JPS5316654A (en) | 1978-02-15 |
Family
ID=14016554
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9108176A Pending JPS5316654A (en) | 1976-07-29 | 1976-07-29 | Measurement method of strain and semiconductor strain gauge |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5316654A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CZ302108B6 (en) * | 2006-11-23 | 2010-10-20 | CVUT v Praze, Fakulta strojní | Semiconductor strain gauge drilling rose |
-
1976
- 1976-07-29 JP JP9108176A patent/JPS5316654A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CZ302108B6 (en) * | 2006-11-23 | 2010-10-20 | CVUT v Praze, Fakulta strojní | Semiconductor strain gauge drilling rose |
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