JPS5316654A - Measurement method of strain and semiconductor strain gauge - Google Patents

Measurement method of strain and semiconductor strain gauge

Info

Publication number
JPS5316654A
JPS5316654A JP9108176A JP9108176A JPS5316654A JP S5316654 A JPS5316654 A JP S5316654A JP 9108176 A JP9108176 A JP 9108176A JP 9108176 A JP9108176 A JP 9108176A JP S5316654 A JPS5316654 A JP S5316654A
Authority
JP
Japan
Prior art keywords
strain
measurement method
semiconductor
strain gauge
gauge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9108176A
Other languages
Japanese (ja)
Inventor
Kazuji Yamada
Motohisa Nishihara
Yasumasa Matsuda
Satoshi Shimada
Yasuo Kaminaga
Masanori Tanabe
Tetsuo Kosugi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9108176A priority Critical patent/JPS5316654A/en
Publication of JPS5316654A publication Critical patent/JPS5316654A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE: To improve the linearity between strain and the electric resistance change rate of the diffused layer of semiconductors by performing measuring in the condition where residual tensile stress is applied to a semiconductor strain guage.
COPYRIGHT: (C)1978,JPO&Japio
JP9108176A 1976-07-29 1976-07-29 Measurement method of strain and semiconductor strain gauge Pending JPS5316654A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9108176A JPS5316654A (en) 1976-07-29 1976-07-29 Measurement method of strain and semiconductor strain gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9108176A JPS5316654A (en) 1976-07-29 1976-07-29 Measurement method of strain and semiconductor strain gauge

Publications (1)

Publication Number Publication Date
JPS5316654A true JPS5316654A (en) 1978-02-15

Family

ID=14016554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9108176A Pending JPS5316654A (en) 1976-07-29 1976-07-29 Measurement method of strain and semiconductor strain gauge

Country Status (1)

Country Link
JP (1) JPS5316654A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CZ302108B6 (en) * 2006-11-23 2010-10-20 CVUT v Praze, Fakulta strojní Semiconductor strain gauge drilling rose

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CZ302108B6 (en) * 2006-11-23 2010-10-20 CVUT v Praze, Fakulta strojní Semiconductor strain gauge drilling rose

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