JPS5322385A - Diffusion type semiconductor pr essure receiving element - Google Patents

Diffusion type semiconductor pr essure receiving element

Info

Publication number
JPS5322385A
JPS5322385A JP9599076A JP9599076A JPS5322385A JP S5322385 A JPS5322385 A JP S5322385A JP 9599076 A JP9599076 A JP 9599076A JP 9599076 A JP9599076 A JP 9599076A JP S5322385 A JPS5322385 A JP S5322385A
Authority
JP
Japan
Prior art keywords
essure
receiving
type semiconductor
diffusion type
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9599076A
Other languages
Japanese (ja)
Inventor
Katsuya Katogi
Yasumasa Matsuda
Yoshitaka Matsuoka
Tsutomu Okayama
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9599076A priority Critical patent/JPS5322385A/en
Publication of JPS5322385A publication Critical patent/JPS5322385A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To make the bridge output owing to the variations in gauge resistance zero irrespective of temperature by series-connecting the zero-point compensating semiconductor resistor formed by diffusion of an impurity to the fixing part of a Si single crystal plate diffused with semiconductor gauge resistors and making these at least one side of a bridge circuit.
COPYRIGHT: (C)1978,JPO&Japio
JP9599076A 1976-08-13 1976-08-13 Diffusion type semiconductor pr essure receiving element Pending JPS5322385A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9599076A JPS5322385A (en) 1976-08-13 1976-08-13 Diffusion type semiconductor pr essure receiving element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9599076A JPS5322385A (en) 1976-08-13 1976-08-13 Diffusion type semiconductor pr essure receiving element

Publications (1)

Publication Number Publication Date
JPS5322385A true JPS5322385A (en) 1978-03-01

Family

ID=14152559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9599076A Pending JPS5322385A (en) 1976-08-13 1976-08-13 Diffusion type semiconductor pr essure receiving element

Country Status (1)

Country Link
JP (1) JPS5322385A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59111868U (en) * 1983-01-20 1984-07-28
JPS59220975A (en) * 1983-05-31 1984-12-12 Hitachi Ltd Integrated pressure sensor
JPS60239644A (en) * 1984-05-15 1985-11-28 Shindengen Electric Mfg Co Ltd Semiconductor pressure sensor
JPS61259134A (en) * 1985-05-14 1986-11-17 Sumitomo Electric Ind Ltd Semiconductive pressure sensor
JPS6317697U (en) * 1986-07-18 1988-02-05
JPS6388730U (en) * 1986-11-28 1988-06-09
US5191798A (en) * 1988-09-30 1993-03-09 Kabushiki Kaisha Komatsu Seisakusho Pressure sensor
FR2852102A1 (en) * 2003-03-07 2004-09-10 Denso Corp Semiconductor pressure sensor having a membrane

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59111868U (en) * 1983-01-20 1984-07-28
JPS59220975A (en) * 1983-05-31 1984-12-12 Hitachi Ltd Integrated pressure sensor
JPS60239644A (en) * 1984-05-15 1985-11-28 Shindengen Electric Mfg Co Ltd Semiconductor pressure sensor
JPS61259134A (en) * 1985-05-14 1986-11-17 Sumitomo Electric Ind Ltd Semiconductive pressure sensor
JPS6317697U (en) * 1986-07-18 1988-02-05
JPS6388730U (en) * 1986-11-28 1988-06-09
JPH0542355Y2 (en) * 1986-11-28 1993-10-26
US5191798A (en) * 1988-09-30 1993-03-09 Kabushiki Kaisha Komatsu Seisakusho Pressure sensor
FR2852102A1 (en) * 2003-03-07 2004-09-10 Denso Corp Semiconductor pressure sensor having a membrane

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