JPS6459132A - Weight detector - Google Patents
Weight detectorInfo
- Publication number
- JPS6459132A JPS6459132A JP21691787A JP21691787A JPS6459132A JP S6459132 A JPS6459132 A JP S6459132A JP 21691787 A JP21691787 A JP 21691787A JP 21691787 A JP21691787 A JP 21691787A JP S6459132 A JPS6459132 A JP S6459132A
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- diaphragm
- substrate
- opposed
- carrying section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To achieve a higher reproducibility, by employing electrostatic capacitance type pressure sensors as opposed to each other with a fine gap of a diaphragm comprising two alumina sinters having a capacitance electrode on the surface thereof. CONSTITUTION:This apparatus is made up of electrostatic capacitance type pressure sensors which each comprise a substrate 8 comprising alumina sinters as opposed to each other at a specified interval, a diaphragm 7, a capacitance electrode 11 formed on an opposed surface, a glass seal 9 to connect the substrate 8 and the diaphragm 7 on the circumference of the capacitance electrode, a load transmitting means to transmit a point load to the sensor and a sensor carrying section 20 to carry the sensor. The surface of a sensor carrying section 20 is masked leaving a part right below a pressure sensitive portion of the substrate 8, and then, a fine gap is formed under the pressure sensitive part to perform an etching processing of the carrying section 20. Thus, a load is applied accurately on a part to be measured through a load transmitting means only from the side 7 of the diaphragm without working on the sensor from the side of the substrate, thereby making reproducibility very excellent free from variations in characteristics.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21691787A JPH0663875B2 (en) | 1987-08-31 | 1987-08-31 | Weight detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21691787A JPH0663875B2 (en) | 1987-08-31 | 1987-08-31 | Weight detector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6459132A true JPS6459132A (en) | 1989-03-06 |
JPH0663875B2 JPH0663875B2 (en) | 1994-08-22 |
Family
ID=16695946
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21691787A Expired - Lifetime JPH0663875B2 (en) | 1987-08-31 | 1987-08-31 | Weight detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0663875B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0480471A2 (en) * | 1990-10-12 | 1992-04-15 | OKADA, Kazuhiro | Force detector and acceleration detector and method of manufacturing the same |
GB2362931B (en) * | 2000-05-31 | 2004-06-30 | Tokai Rika Denki Siesakusho Ka | Shift lever device |
US6829942B2 (en) | 2002-06-27 | 2004-12-14 | Denso Corporation | Pressure sensor |
DE10211910B4 (en) * | 2001-03-19 | 2013-03-28 | Kabushiki Kaisha Tokai Rika Denki Seisakusho | Shift lock device |
-
1987
- 1987-08-31 JP JP21691787A patent/JPH0663875B2/en not_active Expired - Lifetime
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0480471A2 (en) * | 1990-10-12 | 1992-04-15 | OKADA, Kazuhiro | Force detector and acceleration detector and method of manufacturing the same |
US6053057A (en) * | 1990-10-12 | 2000-04-25 | Okada; Kazuhiro | Force detector |
US7533582B2 (en) | 1990-10-12 | 2009-05-19 | Kazuhiro Okada | Force detector and acceleration detector and method of manufacturing the same |
GB2362931B (en) * | 2000-05-31 | 2004-06-30 | Tokai Rika Denki Siesakusho Ka | Shift lever device |
DE10211910B4 (en) * | 2001-03-19 | 2013-03-28 | Kabushiki Kaisha Tokai Rika Denki Seisakusho | Shift lock device |
US6829942B2 (en) | 2002-06-27 | 2004-12-14 | Denso Corporation | Pressure sensor |
Also Published As
Publication number | Publication date |
---|---|
JPH0663875B2 (en) | 1994-08-22 |
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