JPS6459132A - Weight detector - Google Patents

Weight detector

Info

Publication number
JPS6459132A
JPS6459132A JP21691787A JP21691787A JPS6459132A JP S6459132 A JPS6459132 A JP S6459132A JP 21691787 A JP21691787 A JP 21691787A JP 21691787 A JP21691787 A JP 21691787A JP S6459132 A JPS6459132 A JP S6459132A
Authority
JP
Japan
Prior art keywords
sensor
diaphragm
substrate
opposed
carrying section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21691787A
Other languages
Japanese (ja)
Other versions
JPH0663875B2 (en
Inventor
Masanobu Inoue
Makoto Mihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP21691787A priority Critical patent/JPH0663875B2/en
Publication of JPS6459132A publication Critical patent/JPS6459132A/en
Publication of JPH0663875B2 publication Critical patent/JPH0663875B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To achieve a higher reproducibility, by employing electrostatic capacitance type pressure sensors as opposed to each other with a fine gap of a diaphragm comprising two alumina sinters having a capacitance electrode on the surface thereof. CONSTITUTION:This apparatus is made up of electrostatic capacitance type pressure sensors which each comprise a substrate 8 comprising alumina sinters as opposed to each other at a specified interval, a diaphragm 7, a capacitance electrode 11 formed on an opposed surface, a glass seal 9 to connect the substrate 8 and the diaphragm 7 on the circumference of the capacitance electrode, a load transmitting means to transmit a point load to the sensor and a sensor carrying section 20 to carry the sensor. The surface of a sensor carrying section 20 is masked leaving a part right below a pressure sensitive portion of the substrate 8, and then, a fine gap is formed under the pressure sensitive part to perform an etching processing of the carrying section 20. Thus, a load is applied accurately on a part to be measured through a load transmitting means only from the side 7 of the diaphragm without working on the sensor from the side of the substrate, thereby making reproducibility very excellent free from variations in characteristics.
JP21691787A 1987-08-31 1987-08-31 Weight detector Expired - Lifetime JPH0663875B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21691787A JPH0663875B2 (en) 1987-08-31 1987-08-31 Weight detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21691787A JPH0663875B2 (en) 1987-08-31 1987-08-31 Weight detector

Publications (2)

Publication Number Publication Date
JPS6459132A true JPS6459132A (en) 1989-03-06
JPH0663875B2 JPH0663875B2 (en) 1994-08-22

Family

ID=16695946

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21691787A Expired - Lifetime JPH0663875B2 (en) 1987-08-31 1987-08-31 Weight detector

Country Status (1)

Country Link
JP (1) JPH0663875B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0480471A2 (en) * 1990-10-12 1992-04-15 OKADA, Kazuhiro Force detector and acceleration detector and method of manufacturing the same
GB2362931B (en) * 2000-05-31 2004-06-30 Tokai Rika Denki Siesakusho Ka Shift lever device
US6829942B2 (en) 2002-06-27 2004-12-14 Denso Corporation Pressure sensor
DE10211910B4 (en) * 2001-03-19 2013-03-28 Kabushiki Kaisha Tokai Rika Denki Seisakusho Shift lock device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0480471A2 (en) * 1990-10-12 1992-04-15 OKADA, Kazuhiro Force detector and acceleration detector and method of manufacturing the same
US6053057A (en) * 1990-10-12 2000-04-25 Okada; Kazuhiro Force detector
US7533582B2 (en) 1990-10-12 2009-05-19 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
GB2362931B (en) * 2000-05-31 2004-06-30 Tokai Rika Denki Siesakusho Ka Shift lever device
DE10211910B4 (en) * 2001-03-19 2013-03-28 Kabushiki Kaisha Tokai Rika Denki Seisakusho Shift lock device
US6829942B2 (en) 2002-06-27 2004-12-14 Denso Corporation Pressure sensor

Also Published As

Publication number Publication date
JPH0663875B2 (en) 1994-08-22

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