JPS5562331A - Absolute pressure reference type pressure sensor - Google Patents
Absolute pressure reference type pressure sensorInfo
- Publication number
- JPS5562331A JPS5562331A JP13580878A JP13580878A JPS5562331A JP S5562331 A JPS5562331 A JP S5562331A JP 13580878 A JP13580878 A JP 13580878A JP 13580878 A JP13580878 A JP 13580878A JP S5562331 A JPS5562331 A JP S5562331A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- detected
- diaphragm
- electrodes
- room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To secure the measurement of the voltage to be detected with the absolute pressure by detecting the differential voltage between two units of the diaphragm using the semiconductor distortion gauge, one of which is made vacuum with the other detected to the atmosphere of the detected pressure.
CONSTITUTION: Pellet 1 is joined onto the flat surface of Pyrex glass 2 via the anode junction method, and then diaphragm rooms 13a and 13b with semiconductor distortion gauges 11a and 11b formed on each upper surface are formed. And room 13a is kept under the vacuum state; while room 13b is connected to measured pressure Pi via hole 16 and pipe 4. On the other hand, gauges 11a and 11b are connected to electrodes 8a and 8b via resistance draw-around parts 12a and 12b, and electrodes 8a and 8b are connected to thick-film conductors 9a and 9b via lead wires 10a and 10b. And conductors 9a and 9b are connected to terminals 3a and 3b. The upper parts of these joint areas are covered with cap 15 containing hole 18 to introduce atmospheric pressure Ph to form a pressure sensor.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13580878A JPS5562331A (en) | 1978-11-06 | 1978-11-06 | Absolute pressure reference type pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13580878A JPS5562331A (en) | 1978-11-06 | 1978-11-06 | Absolute pressure reference type pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5562331A true JPS5562331A (en) | 1980-05-10 |
Family
ID=15160297
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13580878A Pending JPS5562331A (en) | 1978-11-06 | 1978-11-06 | Absolute pressure reference type pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5562331A (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4511878A (en) * | 1982-09-20 | 1985-04-16 | Hitachi, Ltd. | Pressure sensor with improved semiconductor diaphragm |
| JPS6156465A (en) * | 1984-08-28 | 1986-03-22 | Toshiba Corp | Semiconductor pressure converter |
| JPH0247535U (en) * | 1988-09-27 | 1990-03-30 | ||
| JPH02201510A (en) * | 1989-01-30 | 1990-08-09 | Kiyohara Masako | High precision regulator |
| JPH0465643A (en) * | 1990-07-05 | 1992-03-02 | Mitsubishi Electric Corp | Semiconductor pressure sensor and its manufacture |
| JPH0476956A (en) * | 1990-07-19 | 1992-03-11 | Mitsubishi Electric Corp | Manufacture of semiconductor acceleration sensor |
| JPH0476959A (en) * | 1990-07-19 | 1992-03-11 | Mitsubishi Electric Corp | Manufacture of semiconductor pressure sensor |
| JPH04113239A (en) * | 1990-09-03 | 1992-04-14 | Hitachi Ltd | Composite function type sensor |
| JPH0469721U (en) * | 1990-10-24 | 1992-06-19 | ||
| JPH09494U (en) * | 1986-03-10 | 1997-09-19 | マレリ・オートロニカ・ソシエタ・ペル・アチオニ | Thick film sensor |
| JP2007003383A (en) * | 2005-06-24 | 2007-01-11 | Denso Corp | Pressure sensor |
-
1978
- 1978-11-06 JP JP13580878A patent/JPS5562331A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4511878A (en) * | 1982-09-20 | 1985-04-16 | Hitachi, Ltd. | Pressure sensor with improved semiconductor diaphragm |
| JPS6156465A (en) * | 1984-08-28 | 1986-03-22 | Toshiba Corp | Semiconductor pressure converter |
| JPH09494U (en) * | 1986-03-10 | 1997-09-19 | マレリ・オートロニカ・ソシエタ・ペル・アチオニ | Thick film sensor |
| JPH0247535U (en) * | 1988-09-27 | 1990-03-30 | ||
| JPH02201510A (en) * | 1989-01-30 | 1990-08-09 | Kiyohara Masako | High precision regulator |
| JPH0465643A (en) * | 1990-07-05 | 1992-03-02 | Mitsubishi Electric Corp | Semiconductor pressure sensor and its manufacture |
| JPH0476956A (en) * | 1990-07-19 | 1992-03-11 | Mitsubishi Electric Corp | Manufacture of semiconductor acceleration sensor |
| JPH0476959A (en) * | 1990-07-19 | 1992-03-11 | Mitsubishi Electric Corp | Manufacture of semiconductor pressure sensor |
| JPH04113239A (en) * | 1990-09-03 | 1992-04-14 | Hitachi Ltd | Composite function type sensor |
| JPH0469721U (en) * | 1990-10-24 | 1992-06-19 | ||
| JP2007003383A (en) * | 2005-06-24 | 2007-01-11 | Denso Corp | Pressure sensor |
| JP4556782B2 (en) * | 2005-06-24 | 2010-10-06 | 株式会社デンソー | Pressure sensor |
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