JPH02201510A - High precision regulator - Google Patents
High precision regulatorInfo
- Publication number
- JPH02201510A JPH02201510A JP2048889A JP2048889A JPH02201510A JP H02201510 A JPH02201510 A JP H02201510A JP 2048889 A JP2048889 A JP 2048889A JP 2048889 A JP2048889 A JP 2048889A JP H02201510 A JPH02201510 A JP H02201510A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- spring
- diaphragm
- chamber
- sensitive chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims abstract description 29
- 229910001285 shape-memory alloy Inorganic materials 0.000 claims abstract description 9
- 230000001105 regulatory effect Effects 0.000 claims description 15
- 230000007613 environmental effect Effects 0.000 abstract description 9
- 238000006073 displacement reaction Methods 0.000 abstract description 5
- 229910045601 alloy Inorganic materials 0.000 abstract description 4
- 239000000956 alloy Substances 0.000 abstract description 4
- 239000007788 liquid Substances 0.000 abstract 3
- 238000004891 communication Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000006870 function Effects 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- KHYBPSFKEHXSLX-UHFFFAOYSA-N iminotitanium Chemical compound [Ti]=N KHYBPSFKEHXSLX-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 229910004337 Ti-Ni Inorganic materials 0.000 description 1
- 229910011209 Ti—Ni Inorganic materials 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910000734 martensite Inorganic materials 0.000 description 1
- 230000003446 memory effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910001000 nickel titanium Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
Landscapes
- Control Of Fluid Pressure (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は流量・圧力調整器の改良に係り、宇宙空間や地
底、海底等に於ける生命維持装置の０２Ｎ２の供給用等
に利用する高精度１１整器に関するものである。Detailed Description of the Invention (Industrial Field of Application) The present invention relates to the improvement of a flow rate/pressure regulator, which is used for supplying 02N2 to life support equipment in outer space, underground, under the sea, etc. It is related to precision 11 integer.
（従来の技術）
一般に流量・圧力Ｗ！４整指は、ダイヤフラムにかかる
流体圧と調圧用スプリングの弾性力との相関関係により
、所望の流体圧を得るように構成されている。(Conventional technology) Generally flow rate and pressure W! The four adjustable fingers are configured to obtain a desired fluid pressure based on the correlation between the fluid pressure applied to the diaphragm and the elastic force of the pressure regulating spring.
従って、流量・圧力調整器の調整精度を向上させるため
には、先ず調圧用スプリングが第２図の曲線Ａに示す如
く、必要な出力を有し且つ変位に対する荷重の変化の小
さな特性を具備する必要がある。Therefore, in order to improve the adjustment accuracy of the flow rate/pressure regulator, the pressure regulating spring must first have the necessary output and have the characteristics of small changes in load with respect to displacement, as shown by curve A in Figure 2. There is a need.
そのため、つる巻きバネＢと皿バネＣとを組合せ５両者
の複合により曲！ｌｌＡの如きスプリング特性とし、変
位−荷重変化の殆んど無い平坦なＡ′部を流量・圧力の
調整用に利用する様にした高精度調整器が開発されてい
る。Therefore, by combining the helical spring B and the disc spring C, we can make a song! A high-precision regulator has been developed that has spring characteristics such as llA and uses a flat section A' with almost no displacement-load change for adjusting flow rate and pressure.
しかし、前記つる巻きバネＢと皿ハネＣとの、：且合せ
に係る腹合形スプリングは、変位−荷重変化の少ない特
性範囲（平坦部Ａ’）が極めて狭いうえ、つる巻きバネ
や皿バネ゛の調整が著しく困雉で、実用上多くの問題が
残されている。However, the bell-to-edge type spring, which involves the combination of the helical spring B and the disc spring C, has an extremely narrow characteristic range (flat portion A') in which the displacement-load change is small, and is not suitable for helical springs or disc springs. It is extremely difficult to adjust this, and many practical problems remain.
また、従前の高精度調整器に於いては、ダイヤフラム上
部の調圧用スプリングを収容する感圧室が高度な密閉贋
造になっていないため、ダイヤフラムやスプリングが環
境圧力や環境温度の影＃を直接に受けることになり、調
整（直が調整器の使朋環境によって変動するという問題
がある。In addition, in conventional high-precision regulators, the pressure sensitive chamber that houses the pressure regulating spring at the top of the diaphragm is not highly sealed, so the diaphragm and spring directly respond to the effects of environmental pressure and temperature. There is a problem in that the adjustment (direction) varies depending on the environment in which the adjuster is used.
（発明が解決しようとする課題）
不発明は、従前の流量・圧カニＡＭ器に於ける上述の如
き問題、即ち（Ｄ複合型のスプリングを用いるため、利
用し得る変位−荷重曲線の範囲が極く侠いうえ、スプリ
ングの弾性力の調整が著しく困難なこと、（■感圧室が
気密構造になっていないため、環境条件によって調整値
が変化し易いこと等の問題を解決せんとするものであり
、調性用スプリングの弾性力のセツティングが簡単且つ
正確に行なえると共に、調整器を使用する環境条件によ
って調整値が悪形響を受けない采にした高ｈｔ度調整器
を提供するものである。(Problems to be Solved by the Invention) The inventive problem lies in the above-mentioned problems in the conventional flow rate/pressure crab AM device, namely (because the D-complex type spring is used, the range of the usable displacement-load curve is limited. In addition to being very clumsy, it is extremely difficult to adjust the elastic force of the spring (■ Because the pressure sensitive chamber is not an airtight structure, the adjustment value easily changes depending on the environmental conditions.) To provide a high-temperature adjuster that allows for easy and accurate setting of the elastic force of a tonality spring, and that prevents the adjustment value from being adversely affected by the environmental conditions in which the adjuster is used. It is something to do.
（課題を］郵決するための手段）
弁箱１にダイヤフラム室Ａと感圧室Ｂとを設け、前記ダ
イヤフラム室Ａ内に設けたダイヤフラム５に、流体圧Ｐ
と調圧用スプリング９の弾；生方とを加えるようにした
ダイヤフラム式Ａ”ＩＩ ＮＢに於いて、前記調圧用ス
プリング９を１．田弾姓特性を利用する形状記憶合金（
・汝のスプリングとすると共に、前記感圧室Ｂを真空の
感圧室としたことを発明の基本構成とするものである。(Means for submitting the problem) A diaphragm chamber A and a pressure sensitive chamber B are provided in the valve box 1, and a diaphragm 5 provided in the diaphragm chamber A is provided with a fluid pressure P.
In the diaphragm type A''II NB, which has a bullet of the pressure regulating spring 9;
- The basic structure of the invention is that the pressure sensitive chamber B is a vacuum pressure sensitive chamber in addition to being your spring.
（作用）
ダイヤフラム５にかかる流体圧Ｐと調圧用スプリング９
の弾１生力との差でダイヤフラム５が上・下動し、これ
によって流体通路が開・閉され、二次側流体圧が設定値
に保持される。(Function) Fluid pressure P applied to diaphragm 5 and pressure regulating spring 9
The diaphragm 5 moves up and down due to the difference between the natural force of the bullet 1 and the fluid passage, thereby opening and closing the fluid passage and maintaining the secondary fluid pressure at the set value.
前記調圧用スプリング９は形状記憶合金の超弾性特注に
より変位−荷重特性が略平坦になっている。その結果、
スプリング９の変位量が変ってもスプリングの弾性力は
変化せず、二次側の流体圧Ｐが常に所定の設定調整値に
高精度で保持されることになる。The pressure regulating spring 9 has substantially flat displacement-load characteristics due to the superelastic shape-memory alloy. the result,
Even if the amount of displacement of the spring 9 changes, the elastic force of the spring does not change, and the fluid pressure P on the secondary side is always maintained at a predetermined set adjustment value with high precision.
また、感圧室Ｂ内が高真空度に保持さ九ているため、外
部環境の圧力等が変化しても感圧室Ｂ内の圧力条件等は
一切変（ヒせず、ダイヤフラムが常に所定の環境条件下
で作動されることになる。In addition, since the pressure sensitive chamber B is maintained at a high degree of vacuum, even if the pressure in the external environment changes, the pressure conditions in the pressure sensitive chamber B will not change at all, and the diaphragm will always maintain the specified level. It will be operated under environmental conditions.
（実施例） 以下、図面に基づいて本発明の詳細な説明する。(Example) Hereinafter, the present invention will be described in detail based on the drawings.
第１図は本発明に係る調！１急の縦：Ｆｒ面Ａであり、
図に於いて１は弁箱、２は弁体、：３はシート、４（よ
弁体ガイド、５はダイヤフラム、６はダイヤフラム押え
、７はダイヤフラム受け、８は弁体下部のシール用０リ
ング、９は調圧用スプリング、１０はスプリングケース
、１１は蓋体、１２はゲッター １３はロータリー式シ
ャットオフ弁である。Figure 1 shows the key according to the present invention! 1 steep vertical: Fr plane A,
In the figure, 1 is the valve box, 2 is the valve body, 3 is the seat, 4 is the valve body guide, 5 is the diaphragm, 6 is the diaphragm holder, 7 is the diaphragm receiver, and 8 is the O-ring for sealing at the bottom of the valve body. , 9 is a pressure regulating spring, 10 is a spring case, 11 is a lid, 12 is a getter, and 13 is a rotary shutoff valve.
前記弁箱１はステンレス鋼、アルミニウム合金又はアル
ミニウム合金表面処理材により形成さ九でおり、流体人
口１ａ、シャットオフ弁取付口上ｂ、シャットオフ弁用
弁座１ｃ、流体通路１ｄ。The valve box 1 is made of stainless steel, aluminum alloy, or aluminum alloy surface-treated material, and has a fluid port 1a, a shutoff valve mounting opening b, a valve seat 1c for the shutoff valve, and a fluid passage 1d.
１ｅ、弁室１ｆ、流体出口１ｇ等が設けられている。1e, a valve chamber 1f, a fluid outlet 1g, etc. are provided.
また、弁箱上の上方部には前記弁室１ｆに連通するダイ
ヤフラム室Ａと感圧室Ｂとが設けられている。更に、前
記ダイヤフラム室Ａは、弁体カイト４を配設するための
縮径部Ａ□と、ダイヤフラム５を配設するための拡陛部
Ａ２とから夫々形成されている。Furthermore, a diaphragm chamber A and a pressure sensitive chamber B, which communicate with the valve chamber 1f, are provided in the upper part of the valve box. Further, the diaphragm chamber A is formed of a reduced diameter portion A□ for arranging the valve body kite 4 and an enlarged diameter portion A2 for arranging the diaphragm 5, respectively.
前記弁体２は、シート３に当接するディスク部２ａと、
ディスク部２ａより上方へ突出せしめた上部シャフト部
２ｂと、ディスク部２ａより下方へ突出せしめた下部シ
ャツ１一部２Ｃとから形成されており、弁箱１の下方よ
り上部シャフト部２ｂを弁体ガイド４）＼挿通せしめて
弁室１ｆ内へ挿着され、スプリング１４により上方へ常
時付勢されている。又、前記上部シャツ１一部２ｂの先
端は後述する如くダイヤフラム受け７の受入孔７ａ内へ
嵌合されており、該ダイヤフラム受け７を介して弁体２
が上下動される。The valve body 2 includes a disk portion 2a that comes into contact with the seat 3;
It is formed of an upper shaft portion 2b that projects upwardly from the disk portion 2a, and a portion 2C of the lower shirt 1 that projects downwardly from the disk portion 2a. The guide 4) is inserted through the valve chamber 1f and is constantly urged upward by the spring 14. Further, the tip of the upper shirt part 2b is fitted into a receiving hole 7a of a diaphragm receiver 7 as described later, and the valve body 2 is inserted through the diaphragm receiver 7.
is moved up and down.
尚、２ｄは弁体２に設けた連通孔であり、円筒状の下部
シャフト２ｄの空間２ｅと流体出口側通路１ｅとが、こ
れにより連通されており、空間２ｅ内を流体通路１ｅと
同圧とすることにより、弁体２の上・下動が円滑に行な
えるようにしている３又、１５は下部蓋体であり、０リ
ング８により弁体２の下部シャフト部２ｄと一次側通路
１ｄとの間がシールされている。Note that 2d is a communication hole provided in the valve body 2, through which the space 2e of the cylindrical lower shaft 2d and the fluid outlet side passage 1e are communicated, and the inside of the space 2e is kept at the same pressure as the fluid passage 1e. 15 is a lower lid body, and an O ring 8 connects the lower shaft portion 2d of the valve body 2 and the primary passage 1d. There is a seal between the two.
前記シート３は合成樹脂（摂のリング体であり。The sheet 3 is a ring made of synthetic resin.
弁室１ｆの奥部に嵌着されている。It is fitted into the inner part of the valve chamber 1f.
前記弁体ガイド４は中央部にガイド孔４ａを穿設したリ
ング体であり、ダイヤフラム室Ａの縮径部Ａ１内へ螺着
されている。The valve body guide 4 is a ring body having a guide hole 4a in the center thereof, and is screwed into the reduced diameter portion A1 of the diaphragm chamber A.
前記ダイヤフラム５は金属（若しくは合成樹脂）から形
成されており、前記ダイヤフラム押え６とダイヤフラム
受け７により挟持され、ダイヤフラム室への拡径部Ａ２
内に配設されている。The diaphragm 5 is made of metal (or synthetic resin), is held between the diaphragm presser 6 and the diaphragm receiver 7, and has an enlarged diameter portion A2 extending into the diaphragm chamber.
It is located inside.
調圧用スプリング９は、Ｔｉ−Ｎｉ系合金である所謂形
状記憶合金により形成されており、その変態凝弾性効果
を利用したものである。即ち、形状記憶合金は、 相→
マルテンサイ１へ相の変態的と変形温度及び作用応力の
相関関係で形状記憶効果と超弾性機能の何れかを現出す
るが、本発明に於ける形状記憶合金は超弾性機能を現出
すべく処理されている。The pressure regulating spring 9 is made of a so-called shape memory alloy, which is a Ti-Ni alloy, and utilizes its transformation condensation-elasticity effect. That is, the shape memory alloy has the following phase→
Although the shape memory effect and superelastic function of martensitic alloy 1 appear depending on the relationship between phase transformation, deformation temperature, and applied stress, the shape memory alloy in the present invention is treated to exhibit the superelastic function. has been done.
その結果、当該調圧用スプリング９は、変位に対する荷
重の変化が一定となり、スプリング９の歪み量が変化し
ても応力は殆んど変化しない。尚、当該調圧用スプリン
グ９は、所定の温度下で所望の流体圧Ｐを得ることが出
来る。弾性力を発揮するように予かしめ製作されており
、−旦その弾性力（即ち流体の調整圧力）が設定される
と、その慎はその後不変である。As a result, in the pressure regulating spring 9, the change in load with respect to displacement is constant, and even if the amount of strain of the spring 9 changes, the stress hardly changes. Note that the pressure regulating spring 9 can obtain a desired fluid pressure P under a predetermined temperature. It is preswaged to exhibit an elastic force, and once that elastic force (i.e., the regulated pressure of the fluid) is set, its elasticity remains unchanged thereafter.
尚、本実施例では調圧用スプリング９としてＮｉ−Ｔｉ
合金系の形状記憶合金を使用しているが、Ｃｕ −Ｚ
ｎ −Ａ Ｉ系の形状記憶合金を利用してもよいことは
勿論である。In this embodiment, the pressure regulating spring 9 is made of Ni-Ti.
Alloy-based shape memory alloy is used, but Cu-Z
Of course, an n-AI type shape memory alloy may also be used.
前記調圧用スプリング９は、スプリングケース１０を介
して弁Ｗｉ１へビーム溶接Ｅした蓋体１１によりその上
端部が保持されており、これによりその引張り変位ｉに
対応する弾性力がダイヤフラム５へ印加される６
尚、ダイヤフラム５上方のスプリングケース１０と、Ｊ
ｉｌｌとで形成された感圧室Ｂは、後述する如＜、１０
−４ｔｏｒｒ程度の真空に保持されており、蓋体１１の
裏面に固着したゲッター１２をビーム照射によって加熱
活性比することにより、真空度の保持が図ら、れている
。The pressure regulating spring 9 is held at its upper end by a lid 11 which is beam-welded E to the valve Wi1 via a spring case 10, and thereby an elastic force corresponding to the tensile displacement i is applied to the diaphragm 5. 6 In addition, the spring case 10 above the diaphragm 5 and the J
The pressure sensitive chamber B formed by ill is
The vacuum is maintained at about -4 torr, and the degree of vacuum is maintained by heating and activating the getter 12 fixed to the back surface of the lid 11 by beam irradiation.
面記ロータリー式シャットオフ弁１３は弁箱１のシャッ
トオフ弁取付口１ｂへ袋すニア １” １３ ａ介して
螺着されており、ハンドル１３ｂを回動することにより
弁体１３ｃを介して弁／１ｌｃ１３ｄを弁座１ｃへ当渭
座せし、流体人口１ａと流体通、ｌｌｄ間を開・閉する
。The rotary type shut-off valve 13 is screwed onto the shut-off valve mounting port 1b of the valve body 1 through a sleeve 1" 13a, and by rotating the handle 13b, the valve is opened through the valve body 13c. /1lc13d is seated on the valve seat 1c to open/close the fluid communication between the fluid port 1a and lld.
次に１本件調ｖ１１器の組立について説明する。Next, the assembly of the V11 device will be explained.
先ず弁箱１へ、弁体２、シート３．弁体ガイド４、ダイ
ヤフラム５．調圧用スプリング９及びスプリングケース
１０等を組付ける。First, to the valve box 1, the valve body 2, the seat 3. Valve body guide 4, diaphragm 5. Assemble the pressure regulating spring 9, spring case 10, etc.
次に、内部を１０−’ｔｏｒｒ程度の真空度に保持した
真空槽（図示省略）の内部で、ゲッター１２を固着した
蓋体１２をスプリングケース１０の上方へ螺着し、所定
の締込量に調整する。Next, inside a vacuum chamber (not shown) whose interior is kept at a vacuum level of about 10-'torr, the lid 12 with the getter 12 fixed thereon is screwed onto the spring case 10, and tightened to a predetermined amount. Adjust to.
その後、ビーム溶接方法により、真空槽の内部に於いて
前記感圧室Ｂの螺着部Ｅ、Ｅ・・・を溶接し、これによ
り間圧室Ｂ内を真空下で密封する。Thereafter, the threaded portions E, E, . . . of the pressure sensitive chamber B are welded inside the vacuum chamber by a beam welding method, thereby sealing the inside of the interpressure chamber B under vacuum.
また、同時に蓋体１１の裏面側に固着したゲッター１２
の周辺部へビームを照射して約３００℃程度に加熱し、
これを活性化する。Also, at the same time, the getter 12 fixed to the back side of the lid body 11
A beam is irradiated to the peripheral area of the material and heated to approximately 300°C.
Activate this.
次に２本沖調樒ａ（の作動について説明する。Next, we will explain the operation of the two Okichocho (a).
ダイヤフラム５には、予かしめ設定されたスプリング°
９の弾性力がπ方へ向けて常時負荷されており、こ、れ
により弁体２は下降し、流体通路１ｄ。The diaphragm 5 is equipped with a pre-swaged spring.
An elastic force 9 is constantly applied in the π direction, which causes the valve body 2 to descend and open the fluid passage 1d.
１ｅｆｌｆｆｌが連通している。1effffl is in communication.
シャットオフ弁１３を開放すると、流体りが流入し、流
体通路１ｄ、ｌｅを通して流通する。二次側流体圧Ｐが
上昇し、所定の設定値に達すると、ダイヤフラム５がス
プリング９の弾性力に打ち勝って上方へ押し上げられ、
弁体２が゛シート３へ当座して流体りの流通が遮断され
る。When the shutoff valve 13 is opened, fluid flows in and flows through the fluid passages 1d and le. When the secondary fluid pressure P increases and reaches a predetermined set value, the diaphragm 5 overcomes the elastic force of the spring 9 and is pushed upward.
The valve body 2 is brought into contact with the seat 3, and the flow of fluid is cut off.
二次側の流体圧Ｐは連通孔２ｄを通して弁体２の下部シ
ャフト部２Ｃの空間２ｅ内へ導入されており、下部シャ
フト部２Ｃと二次側流体圧Ｐとの圧力差が相殺され、弁
体２は円滑に作動する。The fluid pressure P on the secondary side is introduced into the space 2e of the lower shaft portion 2C of the valve body 2 through the communication hole 2d, and the pressure difference between the lower shaft portion 2C and the fluid pressure P on the secondary side is canceled out. Body 2 operates smoothly.
尚、弁体２は上部シャフト部２ｂと下部シャフト部２ｃ
の両方でガイドされており、下部シャフト部２ｃと一次
側流体通路間のシールはＯリング８により行なわ九でい
る。The valve body 2 has an upper shaft portion 2b and a lower shaft portion 2c.
The seal between the lower shaft portion 2c and the primary fluid passage is provided by an O-ring 8.
（発明の効果）
本発明に於いては、圧力調整用のスプリングを形状記憶
合金の擬弾性特性を利用したスプリングとしているため
、スプリングの変形量が変わってもスプリングの弾性力
が殆んど変化せず、その結果常に所定の弾性応力をダイ
ヤフラムに掛けることが出来、極めて高精度な圧力！Ｉ
ｊｌｎが可能となる。(Effects of the Invention) In the present invention, since the spring for pressure adjustment is a spring that utilizes the pseudoelastic properties of a shape memory alloy, the elastic force of the spring hardly changes even if the amount of deformation of the spring changes. As a result, a predetermined elastic stress can always be applied to the diaphragm, resulting in extremely high precision pressure! I
jln becomes possible.
また、本発明に於いては感圧室Ｂ内を高度な真空空間に
する構成としているため、ダイヤフラムに掛かる外気圧
が略零となって環境圧力の影響が完全に排除され、外気
圧の変動による誤差等が皆無となる。In addition, in the present invention, since the pressure sensitive chamber B is configured to be a highly vacuum space, the external pressure applied to the diaphragm becomes approximately zero, completely eliminating the influence of environmental pressure, and preventing fluctuations in external pressure. There will be no errors caused by this.
更に、感圧室Ｂ内を真空空間としているため、スプリン
グへの伝熱も固体熱伝導のみとなる。その結果、環境温
度が大きく変化しても、スプリングやダイヤフラムの温
度が急激に変化することは無く、温度変化による調整圧
の狂いが殆んど無視し得る程度となる。Furthermore, since the inside of the pressure sensitive chamber B is a vacuum space, heat is transferred to the spring only by solid heat conduction. As a result, even if the environmental temperature changes significantly, the temperature of the spring or diaphragm will not change suddenly, and the deviation in the adjusted pressure due to temperature changes will be almost negligible.
そのうえ、ビーム溶接そのものの環境が１Ｏ−４ｔｏｒ
ｒ程度であるため、特別な作業を要することなく感圧室
Ｂ内を所望の真空度下に密封できると共に、ゲッターの
加熱活性化もビームを利用して同時に行なうことが出来
、調整器の製造コストの大幅な引下げを図り得る。Moreover, the environment of beam welding itself is 1O-4torr.
Since the temperature is about It is possible to significantly reduce costs.
本発明は上述の通り優れた実用的効用を奏するものであ
る。As described above, the present invention has excellent practical effects.
第１図は、本発明に係る調整器の縦断面図である。
第２図は、複合型スプリングの変位−荷重特性曲線の一
例を示すものである。
１ 弁箱
２ 弁体
シート
弁体ガイド
ダイヤフラム
調圧用スプリング
スプリングケース
蓋体
ゲッター
シャツ１−オフ弁
ダイヤフラム室
感圧室
流体圧
流体FIG. 1 is a longitudinal sectional view of a regulator according to the invention. FIG. 2 shows an example of a displacement-load characteristic curve of a composite spring. 1 Valve box 2 Valve body seat Valve body guide diaphragm Spring spring case for pressure regulation Lid body Getter shirt 1-Off valve diaphragm chamber Pressure sensing chamber Fluid pressure fluid
Claims (3)
）とを設け、前記ダイヤフラム室（Ａ）内に設けたダイ
ヤフラム（５）に、流体圧（Ｐ）と設けた調圧用スプリ
ング（９）の弾性力とを加えるようにしたダイヤフラム
式調整器に於いて、前記調圧用スプリング（９）を、超
弾性特性を利用する形状記憶合金製のスプリングとする
と共に、前記感圧室（Ｂ）を真空の感圧室としたことを
特徴とする高精度調整器。(1) Diaphragm chamber (A) and pressure sensitive chamber (B) in the valve box (1)
), and the diaphragm type regulator is configured to apply fluid pressure (P) and the elastic force of the provided pressure regulating spring (9) to the diaphragm (5) provided in the diaphragm chamber (A). The pressure adjustment spring (9) is a spring made of a shape memory alloy that utilizes superelastic properties, and the pressure sensitive chamber (B) is a vacuum pressure sensitive chamber. vessel.
接して成る真空の感圧室とした請求項（１）に記載の高
精度調整器。(2) The high-precision regulator according to claim (1), wherein the pressure-sensitive chamber (B) is a vacuum pressure-sensitive chamber whose seal portion is beam-welded in a vacuum chamber.
したゲッター（１２）を配設した請求項（１）に記載の
高精度調整器。(3) The high-precision regulator according to claim (1), wherein a getter (12) heated and activated by beam irradiation is disposed in the pressure sensitive chamber (B).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1020488A JP2762094B2 (en) | 1989-01-30 | 1989-01-30 | High precision adjuster |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1020488A JP2762094B2 (en) | 1989-01-30 | 1989-01-30 | High precision adjuster |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02201510A true JPH02201510A (en) | 1990-08-09 |
| JP2762094B2 JP2762094B2 (en) | 1998-06-04 |
Family
ID=12028532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1020488A Expired - Fee Related JP2762094B2 (en) | 1989-01-30 | 1989-01-30 | High precision adjuster |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2762094B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5634627A (en) * | 1995-05-10 | 1997-06-03 | Fujikin Incorporated | Controller |
| CN110114536A (en) * | 2016-12-28 | 2019-08-09 | 3伊弗洛股份制有限公司 | Damp valve cell |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4981917A (en) * | 1972-12-11 | 1974-08-07 | ||
| JPS5562331A (en) * | 1978-11-06 | 1980-05-10 | Hitachi Ltd | Absolute pressure reference type pressure sensor |
| JPS59153216A (en) * | 1983-02-22 | 1984-09-01 | Matsushita Electric Ind Co Ltd | Proportional control valve of gas |
| JPS61201417A (en) * | 1985-03-04 | 1986-09-06 | Nissin Electric Co Ltd | Driving mechanism in vacuum container |
| JPS62192287A (en) * | 1986-02-18 | 1987-08-22 | Mazda Motor Corp | Flange welding method by high energy beam |
| JPS6351037A (en) * | 1986-08-20 | 1988-03-04 | Toshiba Corp | Anode chamber of electron beam device |
| JPS63146614U (en) * | 1987-03-18 | 1988-09-27 |
-
1989
- 1989-01-30 JP JP1020488A patent/JP2762094B2/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4981917A (en) * | 1972-12-11 | 1974-08-07 | ||
| JPS5562331A (en) * | 1978-11-06 | 1980-05-10 | Hitachi Ltd | Absolute pressure reference type pressure sensor |
| JPS59153216A (en) * | 1983-02-22 | 1984-09-01 | Matsushita Electric Ind Co Ltd | Proportional control valve of gas |
| JPS61201417A (en) * | 1985-03-04 | 1986-09-06 | Nissin Electric Co Ltd | Driving mechanism in vacuum container |
| JPS62192287A (en) * | 1986-02-18 | 1987-08-22 | Mazda Motor Corp | Flange welding method by high energy beam |
| JPS6351037A (en) * | 1986-08-20 | 1988-03-04 | Toshiba Corp | Anode chamber of electron beam device |
| JPS63146614U (en) * | 1987-03-18 | 1988-09-27 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5634627A (en) * | 1995-05-10 | 1997-06-03 | Fujikin Incorporated | Controller |
| CN110114536A (en) * | 2016-12-28 | 2019-08-09 | 3伊弗洛股份制有限公司 | Damp valve cell |
| JP2020504878A (en) * | 2016-12-28 | 2020-02-13 | スリーイーフロー エービー | Damping valve unit |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2762094B2 (en) | 1998-06-04 |
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