JPS5733301A - Copying probe for coordinate measuring machine - Google Patents

Copying probe for coordinate measuring machine

Info

Publication number
JPS5733301A
JPS5733301A JP10896680A JP10896680A JPS5733301A JP S5733301 A JPS5733301 A JP S5733301A JP 10896680 A JP10896680 A JP 10896680A JP 10896680 A JP10896680 A JP 10896680A JP S5733301 A JPS5733301 A JP S5733301A
Authority
JP
Japan
Prior art keywords
probe
shaft
gages
strain gages
deflections
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10896680A
Other languages
Japanese (ja)
Inventor
Yutaka Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsutoyo Manufacturing Co Ltd
Original Assignee
Mitsutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Manufacturing Co Ltd filed Critical Mitsutoyo Manufacturing Co Ltd
Priority to JP10896680A priority Critical patent/JPS5733301A/en
Publication of JPS5733301A publication Critical patent/JPS5733301A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
    • G01B7/008Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
    • G01B7/012Contact-making feeler heads therefor

Abstract

PURPOSE:To permit multiple continuous measurements by mounting strain gages detecting the deflections of a probe shaft to said shaft. CONSTITUTION:Strain gages 28a-28d consisting of semiconductor strain gages or piezoelectric elements are mounted on both side surfaces in the X, Y directions of a probe shaft 24, and are discretely connected to comparators 30, 32 in the X, Y axis directions. When a probe 14 is touched to an arbitrary point of an object 12 to be measured, deflections are produced in the probe shaft 24 by contact pressure and the strain signals generated from the gages 28 are compared by comparators 30, 32, whereby the pressing direction A is determined. Since the automatic copying measurement is accomplished by moving the probe 14 with a driving motor system, the multiple measurements are made continuously.
JP10896680A 1980-08-08 1980-08-08 Copying probe for coordinate measuring machine Pending JPS5733301A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10896680A JPS5733301A (en) 1980-08-08 1980-08-08 Copying probe for coordinate measuring machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10896680A JPS5733301A (en) 1980-08-08 1980-08-08 Copying probe for coordinate measuring machine

Publications (1)

Publication Number Publication Date
JPS5733301A true JPS5733301A (en) 1982-02-23

Family

ID=14498170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10896680A Pending JPS5733301A (en) 1980-08-08 1980-08-08 Copying probe for coordinate measuring machine

Country Status (1)

Country Link
JP (1) JPS5733301A (en)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4575947A (en) * 1983-03-30 1986-03-18 Wyler Ag Measuring arm for a multiple coordinate measuring machine
JPS6267205U (en) * 1985-10-17 1987-04-27
JPH01112106A (en) * 1987-07-31 1989-04-28 Hitachi Constr Mach Co Ltd Profile controller for body in optional shape
JPH01112107A (en) * 1987-07-31 1989-04-28 Hitachi Constr Mach Co Ltd Profile controller for body in optional shape
WO1990009258A1 (en) * 1989-02-14 1990-08-23 Alan Robert Brian Smith Electronic centre-finder
US5152072A (en) * 1988-02-18 1992-10-06 Renishaw Plc Surface-sensing device
US5189806A (en) * 1988-12-19 1993-03-02 Renishaw Plc Method of and apparatus for scanning the surface of a workpiece
US5212646A (en) * 1987-12-19 1993-05-18 Renishaw Plc Method of using a mounting for surface-sensing stylus
JPH05332705A (en) * 1992-05-29 1993-12-14 Mitsutoyo Corp Touch signal probe
EP0608655A1 (en) * 1992-12-31 1994-08-03 International Business Machines Corporation Integrated tip strain sensor for use in combination with a single axis atomic force microscope
US5822876A (en) * 1996-04-25 1998-10-20 Northrop Grumman Corporation Surface displacement measurement gauge
EP0897100A1 (en) * 1997-02-17 1999-02-17 Mitutoyo Corporation Nondirectional touch signal probe
JP2008537107A (en) * 2005-03-24 2008-09-11 レニショウ パブリック リミテッド カンパニー Measuring probe
JP2009198447A (en) * 2008-02-25 2009-09-03 Nissan Motor Co Ltd Product measurement device and product measurement method
EP2131141A1 (en) 2008-06-03 2009-12-09 Panasonic Corporation Shape measuring apparatus and shape measuring method
KR100961479B1 (en) 2003-04-18 2010-06-08 한양대학교 산학협력단 Coordinate measuring machine probe using force sensor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53117464A (en) * 1977-03-19 1978-10-13 Zeiss Stiftung Measuring head

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53117464A (en) * 1977-03-19 1978-10-13 Zeiss Stiftung Measuring head

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4575947A (en) * 1983-03-30 1986-03-18 Wyler Ag Measuring arm for a multiple coordinate measuring machine
JPS6267205U (en) * 1985-10-17 1987-04-27
JPH01112106A (en) * 1987-07-31 1989-04-28 Hitachi Constr Mach Co Ltd Profile controller for body in optional shape
JPH01112107A (en) * 1987-07-31 1989-04-28 Hitachi Constr Mach Co Ltd Profile controller for body in optional shape
US5212646A (en) * 1987-12-19 1993-05-18 Renishaw Plc Method of using a mounting for surface-sensing stylus
US5152072A (en) * 1988-02-18 1992-10-06 Renishaw Plc Surface-sensing device
US5189806A (en) * 1988-12-19 1993-03-02 Renishaw Plc Method of and apparatus for scanning the surface of a workpiece
WO1990009258A1 (en) * 1989-02-14 1990-08-23 Alan Robert Brian Smith Electronic centre-finder
JPH05332705A (en) * 1992-05-29 1993-12-14 Mitsutoyo Corp Touch signal probe
EP0608655A1 (en) * 1992-12-31 1994-08-03 International Business Machines Corporation Integrated tip strain sensor for use in combination with a single axis atomic force microscope
US5822876A (en) * 1996-04-25 1998-10-20 Northrop Grumman Corporation Surface displacement measurement gauge
EP0897100A1 (en) * 1997-02-17 1999-02-17 Mitutoyo Corporation Nondirectional touch signal probe
EP0897100A4 (en) * 1997-02-17 2002-09-11 Mitutoyo Corp Nondirectional touch signal probe
KR100961479B1 (en) 2003-04-18 2010-06-08 한양대학교 산학협력단 Coordinate measuring machine probe using force sensor
JP2008537107A (en) * 2005-03-24 2008-09-11 レニショウ パブリック リミテッド カンパニー Measuring probe
EP2154471A1 (en) * 2005-03-24 2010-02-17 Renishaw plc Measurement probe
JP2009198447A (en) * 2008-02-25 2009-09-03 Nissan Motor Co Ltd Product measurement device and product measurement method
EP2131141A1 (en) 2008-06-03 2009-12-09 Panasonic Corporation Shape measuring apparatus and shape measuring method
US8006402B2 (en) 2008-06-03 2011-08-30 Panasonic Corporation Shape measuring apparatus and shape measuring method

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