JPS5733301A - Copying probe for coordinate measuring machine - Google Patents
Copying probe for coordinate measuring machineInfo
- Publication number
- JPS5733301A JPS5733301A JP10896680A JP10896680A JPS5733301A JP S5733301 A JPS5733301 A JP S5733301A JP 10896680 A JP10896680 A JP 10896680A JP 10896680 A JP10896680 A JP 10896680A JP S5733301 A JPS5733301 A JP S5733301A
- Authority
- JP
- Japan
- Prior art keywords
- probe
- shaft
- gages
- strain gages
- deflections
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
- G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
- G01B7/012—Contact-making feeler heads therefor
Abstract
PURPOSE:To permit multiple continuous measurements by mounting strain gages detecting the deflections of a probe shaft to said shaft. CONSTITUTION:Strain gages 28a-28d consisting of semiconductor strain gages or piezoelectric elements are mounted on both side surfaces in the X, Y directions of a probe shaft 24, and are discretely connected to comparators 30, 32 in the X, Y axis directions. When a probe 14 is touched to an arbitrary point of an object 12 to be measured, deflections are produced in the probe shaft 24 by contact pressure and the strain signals generated from the gages 28 are compared by comparators 30, 32, whereby the pressing direction A is determined. Since the automatic copying measurement is accomplished by moving the probe 14 with a driving motor system, the multiple measurements are made continuously.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10896680A JPS5733301A (en) | 1980-08-08 | 1980-08-08 | Copying probe for coordinate measuring machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10896680A JPS5733301A (en) | 1980-08-08 | 1980-08-08 | Copying probe for coordinate measuring machine |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5733301A true JPS5733301A (en) | 1982-02-23 |
Family
ID=14498170
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10896680A Pending JPS5733301A (en) | 1980-08-08 | 1980-08-08 | Copying probe for coordinate measuring machine |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5733301A (en) |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4575947A (en) * | 1983-03-30 | 1986-03-18 | Wyler Ag | Measuring arm for a multiple coordinate measuring machine |
JPS6267205U (en) * | 1985-10-17 | 1987-04-27 | ||
JPH01112106A (en) * | 1987-07-31 | 1989-04-28 | Hitachi Constr Mach Co Ltd | Profile controller for body in optional shape |
JPH01112107A (en) * | 1987-07-31 | 1989-04-28 | Hitachi Constr Mach Co Ltd | Profile controller for body in optional shape |
WO1990009258A1 (en) * | 1989-02-14 | 1990-08-23 | Alan Robert Brian Smith | Electronic centre-finder |
US5152072A (en) * | 1988-02-18 | 1992-10-06 | Renishaw Plc | Surface-sensing device |
US5189806A (en) * | 1988-12-19 | 1993-03-02 | Renishaw Plc | Method of and apparatus for scanning the surface of a workpiece |
US5212646A (en) * | 1987-12-19 | 1993-05-18 | Renishaw Plc | Method of using a mounting for surface-sensing stylus |
JPH05332705A (en) * | 1992-05-29 | 1993-12-14 | Mitsutoyo Corp | Touch signal probe |
EP0608655A1 (en) * | 1992-12-31 | 1994-08-03 | International Business Machines Corporation | Integrated tip strain sensor for use in combination with a single axis atomic force microscope |
US5822876A (en) * | 1996-04-25 | 1998-10-20 | Northrop Grumman Corporation | Surface displacement measurement gauge |
EP0897100A1 (en) * | 1997-02-17 | 1999-02-17 | Mitutoyo Corporation | Nondirectional touch signal probe |
JP2008537107A (en) * | 2005-03-24 | 2008-09-11 | レニショウ パブリック リミテッド カンパニー | Measuring probe |
JP2009198447A (en) * | 2008-02-25 | 2009-09-03 | Nissan Motor Co Ltd | Product measurement device and product measurement method |
EP2131141A1 (en) | 2008-06-03 | 2009-12-09 | Panasonic Corporation | Shape measuring apparatus and shape measuring method |
KR100961479B1 (en) | 2003-04-18 | 2010-06-08 | 한양대학교 산학협력단 | Coordinate measuring machine probe using force sensor |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53117464A (en) * | 1977-03-19 | 1978-10-13 | Zeiss Stiftung | Measuring head |
-
1980
- 1980-08-08 JP JP10896680A patent/JPS5733301A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53117464A (en) * | 1977-03-19 | 1978-10-13 | Zeiss Stiftung | Measuring head |
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4575947A (en) * | 1983-03-30 | 1986-03-18 | Wyler Ag | Measuring arm for a multiple coordinate measuring machine |
JPS6267205U (en) * | 1985-10-17 | 1987-04-27 | ||
JPH01112106A (en) * | 1987-07-31 | 1989-04-28 | Hitachi Constr Mach Co Ltd | Profile controller for body in optional shape |
JPH01112107A (en) * | 1987-07-31 | 1989-04-28 | Hitachi Constr Mach Co Ltd | Profile controller for body in optional shape |
US5212646A (en) * | 1987-12-19 | 1993-05-18 | Renishaw Plc | Method of using a mounting for surface-sensing stylus |
US5152072A (en) * | 1988-02-18 | 1992-10-06 | Renishaw Plc | Surface-sensing device |
US5189806A (en) * | 1988-12-19 | 1993-03-02 | Renishaw Plc | Method of and apparatus for scanning the surface of a workpiece |
WO1990009258A1 (en) * | 1989-02-14 | 1990-08-23 | Alan Robert Brian Smith | Electronic centre-finder |
JPH05332705A (en) * | 1992-05-29 | 1993-12-14 | Mitsutoyo Corp | Touch signal probe |
EP0608655A1 (en) * | 1992-12-31 | 1994-08-03 | International Business Machines Corporation | Integrated tip strain sensor for use in combination with a single axis atomic force microscope |
US5822876A (en) * | 1996-04-25 | 1998-10-20 | Northrop Grumman Corporation | Surface displacement measurement gauge |
EP0897100A1 (en) * | 1997-02-17 | 1999-02-17 | Mitutoyo Corporation | Nondirectional touch signal probe |
EP0897100A4 (en) * | 1997-02-17 | 2002-09-11 | Mitutoyo Corp | Nondirectional touch signal probe |
KR100961479B1 (en) | 2003-04-18 | 2010-06-08 | 한양대학교 산학협력단 | Coordinate measuring machine probe using force sensor |
JP2008537107A (en) * | 2005-03-24 | 2008-09-11 | レニショウ パブリック リミテッド カンパニー | Measuring probe |
EP2154471A1 (en) * | 2005-03-24 | 2010-02-17 | Renishaw plc | Measurement probe |
JP2009198447A (en) * | 2008-02-25 | 2009-09-03 | Nissan Motor Co Ltd | Product measurement device and product measurement method |
EP2131141A1 (en) | 2008-06-03 | 2009-12-09 | Panasonic Corporation | Shape measuring apparatus and shape measuring method |
US8006402B2 (en) | 2008-06-03 | 2011-08-30 | Panasonic Corporation | Shape measuring apparatus and shape measuring method |
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