JP2008096374A - Sensor device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To electrically connect a package member to a case, without changing arrangement of a terminal, even when the package member is arranged in the case to differ detection directions each other, in an acceleration sensor device mounted with the package member provided with a sensing part having a unidirectional detecting direction on the case, and having a sensor terminal of the package member connected electrically to the terminal of the case. <P>SOLUTION: The plurality of terminals 210 is used in common in both cases of the first case where the package member 100 is arranged in the case 200 to bring the detecting direction into parallel to the first direction x and the second case where the package member 100 is arranged in the case 200 to bring the detecting direction into parallel to the second direction y crossed with the first direction x. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a sensor device in which a detection member having a sensing portion having a detection direction in one direction is mounted on a case, and a sensor terminal of the detection member and a terminal of the case are electrically connected. The present invention can be applied to an acceleration sensor that detects acceleration in a direction.

  Conventionally, as this type of sensor device, a device provided with a detection member in which a sensor chip including a sensing unit having a detection direction in one direction is accommodated in a ceramic package has been proposed (for example, Patent Documents). 1).

  In this detection member, the sensing unit and the package are electrically connected by a bonding wire or the like. Thereby, the sensor terminal for external connection provided in the package is electrically connected to the sensing unit.

Such a detection member is usually configured to be further housed in a case. Specifically, using the sensor terminal in the detection member, the detection member is mounted on a wiring board or the like via solder as described in Patent Document 2 and the like. Then, this detection member is housed in a case having a terminal together with the wiring board, and the wiring board and the terminal of the case are electrically connected.
JP 2006-84200 A JP 2002-354842 A

  However, in the conventional sensor device, the arrangement and shape of connection parts such as sensor terminals provided on the detection member and terminals on the case side are determined according to the detection direction of the sensing part.

  Here, when designing sensor devices with different detection directions, the detection members are mounted on the case with different detection directions. Then, in order to correspond to each detection direction, a plurality of cases, terminals, or wiring boards are required, resulting in problems such as an increase in component costs.

  With regard to making the detection direction different, the acceleration sensor will be specifically described as an example. In the first state where the acceleration detection direction is arranged in parallel with a certain direction, the detection member is mounted on the case. This means that the detection member is mounted in the second state in which the acceleration detection direction is varied so as to intersect the first direction.

  In such a case, for example, in the arrangement in the first state, each of the case terminal, the wiring board, and the detection member can be connected with bonding wires or solder, but in the arrangement in the second state. The problem arises that these connections cannot be made. Specifically, in the second state, there arises a problem that the distance between the terminal and the sensor terminal becomes large and the bonding wire cannot reach.

  The present invention has been made in view of the above problems, and a detection member including a sensing unit having a detection direction in one direction is mounted on a case provided with a plurality of conductive terminals, and the detection member is provided. In the sensor device in which the sensor terminal and the plurality of terminals are electrically connected, even if the detection members are arranged in the case with different detection directions, the detection members are not changed without changing the arrangement of the terminals. The purpose is to allow electrical connection between the case and the case.

  In order to achieve the above object, the present invention provides a first case where the detection member (100) is arranged in the case (200) so that the detection direction is parallel to the first direction (x), and the detection direction is In both cases, the detection member (100) is arranged in the case (200) so as to be parallel to the second direction (y) different from the first direction (x). A plurality of terminals (210) are also used.

  According to this, in mounting the detection member (100) on the case (200), the first case where the detection direction is arranged in parallel with the first direction (x), and the detection direction is the first direction. The terminal (200) can be used in both cases of the second case (parallel to the second direction (y) different from the direction (x)), so that the detection directions are different from each other. Even if the detection member (100) is arranged, the detection member (100) and the case (200) can be electrically connected without changing the arrangement configuration of the terminal (210) in either case. .

  Here, the surface of the detection member (100) where the sensor terminal (35) is provided, that is, the connection surface (33) which is an electrical connection with the case (200) of the detection member (100). ) Can form a quadrangle and have a sensor terminal (35) at the periphery thereof.

  In the case of such a rectangular connection surface, a plurality of terminals (210) are formed to extend so as to surround at least two sides of the connection surface (33), and the respective terminals (210) and sensor terminals ( 35) is preferably electrically connected via a bonding wire (41) as a connecting member.

  Further, in the case of the rectangular connection surface, the plurality of terminals (210) are arranged so as to extend along each of the three sides outside the three consecutive sides on the connection surface (33). The terminals (210) and the sensor terminals (35) may be electrically connected to each other via bonding wires (41) as connecting members outside one side.

  Thus, when the connection surface (33) of the detection member (100) is a quadrangle and the sensor terminal (35) is provided on the periphery thereof, the terminal (210) is provided corresponding to the three sides. If it is, it is preferable in order to exhibit the effect of the above-mentioned this invention.

  Furthermore, when the terminal (210) is provided corresponding to the three sides of the connection surface (33) as described above, the terminal (210) is positioned in the middle of the three sides of the connection surface (33). It is composed of a plurality of terminals extending from the outside of the side toward the side located in the middle, and the end of the terminal closer to the center among the plurality of terminals (210) is positioned in the middle of the connection surface (33) Of the plurality of terminals (210), the ends of the terminals located outside are connected to the sides of the sides located in the middle of the connection surface (33). It is good also as what makes the shape which wraps around outside and extends.

  Furthermore, if the sensor terminal (35) is provided on each of three continuous sides on the connection surface (33) of the detection member (100) and has a shape extending along each of the three sides, Since the sensor terminal (35) side is also extended, it is possible to make the distance between the sensor terminal (35) and the terminal (210) closer in both cases.

  In the case of the rectangular connection surface, the plurality of terminals (210) are composed of a plurality of terminals whose one end faces one side of the connection surface (33). 35) are arranged in an L shape along the one side of the connecting surface (33) and a side orthogonal to the one side, and the end of each terminal (210) and the sensor terminal (35). May be electrically connected to each other via a bonding wire (41).

  In the case of the rectangular connection surface, the plurality of terminals (210) extend from the outside of one side of the connection surface (33) to the outside of the side opposite to the one side over the connection surface (33). The terminal (210) and the sensor terminal (35) are connected to each other via a bonding wire (41) outside the one side of the connection surface (33) and outside the side facing the one side. May be electrically connected.

  Further, the connection surface (33) of the detection member (100) is opposed to the surface of the case (200) where the plurality of terminals (210) are provided, and each terminal (210) is connected to the connection surface (33). The sensor terminal (35) and the terminal (210) are arranged so as to overlap the connection surface (33) from the outside of the sensor terminal and are disposed to face the sensor terminal (35) provided on the connection surface (33). May be electrically connected via a conductive bonding member (42) as a connecting member.

  In each of the above-described configurations, the detection element (100) or the terminal (210) may be mounted with the electronic element (300). According to this, it is possible to eliminate the circuit board. Become.

  The sensing unit (11) may detect acceleration in the detection direction, and the second direction (y) different from the first direction (x) may be the first direction (x). The direction can be orthogonal.

  In addition, the code | symbol in the bracket | parenthesis of each means described in the claim and this column is an example which shows a corresponding relationship with the specific means as described in embodiment mentioned later.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following embodiments, parts that are the same or equivalent to each other are given the same reference numerals in the drawings in order to simplify the description.

(First embodiment)
In the first embodiment of the present invention, an example of an acceleration sensor device S1 that detects acceleration in one direction will be described as a sensor device. FIG. 1 is a diagram showing a schematic cross-sectional configuration of a package member 100 as a detection member according to the first embodiment of the present invention. 2 is a schematic top view of the package member 100 in FIG. 1, showing a state in which the lid 32 is removed from the package member 100. FIG.

  FIG. 3 is a schematic cross-sectional view of an acceleration sensor device S1 as a sensor device according to the present embodiment. This sensor device S1 is obtained by mounting the package member 100 on a case 200 having a terminal 210.

  4 is a schematic top view of the sensor device S1 in FIG. 3. FIG. 4A is a first view in which the package member 100 is arranged so that the detection direction of the sensing unit 11 is parallel to the first direction x. In the case of (2), (b) shows a second case in which the package member 100 is arranged so that the detection direction is parallel to the second direction y. This acceleration sensor device S1 is applied, for example, as a device that is mounted on a vehicle and detects acceleration applied to the vehicle.

[Configuration of detection member, etc.]
First, the configuration and the like of the package member 100 as a detection member will be described with reference to FIGS.

  As shown in FIG. 1 and FIG. 2, the package member 100 accommodates a sensor chip 10 having a sensing unit 11 as an acceleration detection element, a circuit chip 20, and both the chips 10 and 20. A ceramic package 30 and a bonding wire 40 that electrically connects these members 10, 20, 30 are provided.

  As illustrated in FIG. 2, the circuit chip 20 and the sensor chip 10 are sequentially stacked on the ceramic package 30. Here, the ceramic package 30 and the circuit chip 20 and the sensor chip 10 and the circuit chip 20 are bonded and fixed by an adhesive (not shown) made of an epoxy resin or a silicone resin. Thereby, the sensor chip 10 and the circuit chip 20 are supported by the ceramic package 30.

  As shown in FIG. 1, the sensor chip 10 has a rectangular plate shape, and a sensing unit 11 as an acceleration detection element is provided on one surface of the sensor chip 10 (the upper surface of the sensor chip 10 in FIG. 2). It has been.

  Here, although not shown, the sensing unit 11 is specifically configured to include a comb-like movable electrode generally known as an acceleration detecting element and a fixed electrode facing the movable electrode.

  And the said movable electrode is displaced to the said detection direction with the application of the acceleration along the detection direction in FIG. Along with this displacement, a capacitance change occurs between the fixed electrode facing the movable electrode, and the applied acceleration is detected by detecting a signal of this capacitance change. Thus, the sensing unit 11 has a detection direction in one direction, and detects acceleration in the detection direction.

  Further, as shown in FIG. 1, a pad 12 is provided on one surface of the sensor chip 10. The pads 12 of the sensor chip 10 are electrically connected to the sensing unit 11, and are used to electrically connect the sensing unit 11 and the outside to exchange signals.

  Such a sensor chip 10 is formed by performing known micromachining on a semiconductor substrate such as an SOI (silicon-on-insulator) substrate.

  Here, the circuit chip 20 has a rectangular plate shape that is slightly larger than the sensor chip 10 (see FIGS. 1 and 2). On one surface of the circuit chip 20 (the upper surface of the circuit chip 20 in FIG. 2), a pad 22 is provided on the outer peripheral portion of the portion where the sensor chip 10 is mounted.

  The pad 12 of the sensor chip 10 and the pad 22 of the circuit chip 20 are connected by the bonding wire 40. Thereby, both the chips 10 and 20 are electrically connected. The bonding wire 40 is made of gold or aluminum, and is formed by a normal wire bonding method.

  The circuit chip 20 is configured as a signal processing chip having functions such as sending an input signal to the sensor chip 10 and processing an output signal from the sensor chip 10 to output it to the outside.

  Such a circuit chip 20 is configured by an IC chip or the like in which a MOS transistor, a bipolar transistor, or the like is formed on a silicon substrate or the like using a known semiconductor process.

  In the present embodiment, the ceramic package 30 has an opening 31 in which both the chips 10 and 20 are accommodated and a lid 32 that covers the opening 31. This ceramic package 30 is configured as a laminated body in which a plurality of ceramic layers such as alumina are laminated, for example, and wiring is formed on the surface of each ceramic layer or inside a through hole formed in each ceramic layer. is there.

  In the ceramic package 30, the wiring is exposed to the connection surface 33, which is the surface of the ceramic package 30 located on the side opposite to the inner surface in the opening 31 and the lid portion 32.

  Here, the wiring 34 exposed on the inner surface in the opening 31 is shown in FIG. 1, and the wiring 34 and the pad 22 of the circuit chip 20 are connected by the bonding wire 40. Thereby, the circuit chip 20 and the ceramic package 30 are electrically connected.

  Moreover, the connection surface 33 (refer FIG. 2) of the ceramic package 30 is a surface which performs the electrical connection with the case 200 in the package member 100 so that it may mention later. As shown in FIG. 4, the connection surface 33 forms a quadrangle following the planar shape of the ceramic package 30. As shown in FIG. 4, a sensor terminal 35 as the wiring 35 exposed on the connection surface 33 is provided in the periphery of the connection surface 33 in the package member 100.

  The wiring 34 in the opening 31 and the sensor terminal 35 are electrically connected via a through hole (not shown) provided in the ceramic package 30. In this way, the sensing unit 11 of the sensor chip 10 is electrically connected to the sensor terminal 35 from the pad 12 of the sensor chip 10 via the bonding wire 40, the circuit chip 20, the bonding wire 40, and the wiring 34.

  Note that the wiring 34, the sensor terminal 35, and the through hole in the ceramic package 30 are formed using a conductive paste or the like in the same manner as the wiring in the normal ceramic laminated substrate.

  In the ceramic package 30, the lid 32 is made of metal, resin, ceramic, or the like, and is attached to the edge of the opening 31 by welding or brazing so as to cover the opening 31. . Thereby, the inside of the opening 31 is a space sealed by the lid 32 and protected from the outside.

[Configuration of mounting detection member on case, etc.]
The package member 100 as the detection member configured as described above is mounted on the case 200 as shown in FIGS. The case 200 is provided with a plurality of terminals 210 having conductivity.

  The main body of the case 200 is made of a resin such as PBT (polybutylene terephthalate) or PPS (polypropylene sulfide), and is made by molding using these resins.

  In this case 200, a recess 201 for housing the package member 100, a connector opening 202 which is a portion connected to an external wiring member, and the case 200, that is, the present acceleration sensor device S1, are attached at appropriate positions of the automobile. A mounting hole 203 is provided. Here, a nut or the like is inserted into the mounting hole 203, and the mounting hole 203 can be attached to the automobile with a screw or the like.

  The plurality of terminals 210 are rod-shaped made of a conductive material such as copper or 42 alloy. Here, the terminals 210 are insert-molded into the case 200 and integrated with the case 200. In the present embodiment, as shown in FIG. 3, three terminals 210 are provided in the case 200.

  Here, one end of each terminal 210 protrudes into the connector opening 202 of the case 200 and is connected to the external wiring member described above. On the other hand, a portion on the other end side of each terminal 210 is exposed on the bottom surface of the recess 201 of the case 200 (see FIGS. 3 and 4).

  That is, the bottom surface of the recess 201 is a surface on which the plurality of terminals 210 in the case 200 are provided. In the terminal 210 exposed at the bottom surface of the recess 201, the bottom surface and the exposed surface of the terminal 210 are substantially in the same plane, that is, the so-called “Tsuraichi” relationship, but the exposed surface of the terminal 210 is the bottom surface. It may be more protruding than it may be, or it may be retracted.

  With respect to such a case 200, the package member 100 is mounted on the case 200 with the lid portion 32 side facing the bottom surface of the concave portion 201 of the case 200. An adhesive 220 made of an epoxy resin, a silicone resin, or the like is interposed between the lid portion 32 of the package member 100 and the bottom surface of the recess 201, and the package member 100 and the case 200 are bonded by the adhesive 220. Has been.

  Here, in the acceleration sensor device S1 of the present embodiment, as shown in FIGS. 3 and 4, each terminal 210 and the sensor terminal 35 positioned on the connection surface 33 of the package member 100 serve as a connection member. They are electrically connected via bonding wires 41.

  The bonding wire 41 is made of gold, aluminum, or the like, like the bonding wire 40 provided inside the package member 100, and can be formed by a normal wire bonding method.

  In the present embodiment, as shown in FIGS. 4A and 4B, in the first case, the package member 100 is arranged so that the detection direction of the sensing unit 11 is parallel to the first direction x. And the second case where the package member 100 is disposed so that the detection direction is parallel to the second direction y orthogonal to the first direction x, the plurality of terminals 210 are also used. ing.

  Here, in the first case, acceleration parallel to the first direction x in FIG. 4A is detected, and the displacement direction of the movable electrode in the sensing unit 11 becomes the first direction x. As described above, the package member 100 is mounted on the case 200.

  In the second case, an acceleration parallel to the second direction y in FIG. 4B is detected, and the package member is arranged so that the displacement direction of the movable electrode is the second direction y. This is a case where 100 is mounted on the case 200.

  In this embodiment, in both the first case and the second case, the layout of the terminal 210 is not changed, or another wiring member is not added, that is, both of them. In this case, the package member 100 is mounted on the case 200 using the case 200 having the same configuration.

  Specifically, as shown in FIG. 4, the connection surface 33 of the package member 100 forms a quadrangle and includes the sensor terminals 35 at the periphery thereof, but the three terminals 210 are connected to the connection surface 33. It is arranged outside the three consecutive sides in 33 so as to extend along each of the three sides.

  Here, in the first case shown in FIG. 4A, the three consecutive sides in the connection surface 33 are two sides along the detection direction, that is, the first direction x, and the middle of the two sides. Is one side orthogonal to the first direction x. Further, in the second case shown in FIG. 4B, three consecutive sides in the connection surface 33 are on one side along the detection direction, that is, the second direction y, and on both sides of the one side. Two sides that are positioned and orthogonal to the second direction y.

  Each terminal 210 and the sensor terminal 35 are connected and electrically connected via a bonding wire 41 as a connecting member. In FIGS. 3 and 4, the sensor terminal 35 and the terminal 210 are connected by the same bonding wire 41 as necessary even in portions other than the bonding wire 41 shown in the drawings. Also good.

  Here, all three terminals 210 are arranged on the side located in the middle from the outside (here, the connector opening 202 side) of the side located in the middle of the three sides of the connection surface 33. It has a shape extending toward it.

  And about one terminal 210 of the center among these three terminals 210, the edge part by the side of the connection surface 33 has made the form extended in parallel with the side located in the middle in the connection surface 33, The overall shape is substantially T-shaped (see FIG. 4).

  In addition, for the two terminals 210 located outside of the three terminals 210, the ends on the connection surface 33 side are outside the sides located on both sides of the intermediate side on the connection surface 33. (See FIG. 4).

  The sensor terminals 35 located on each side of the connection surface 33 are connected and electrically connected to the end portions of the terminals 210 located outside the three sides via the bonding wires 41. .

  In this way, the package member 100 is mounted on the case 200, and the terminal 210 and the package member 100 and thus the sensing unit 11 are electrically connected. Note that the opening of the recess 201 of the case 200 may be sealed with a lid or the like (not shown).

  And in this acceleration sensor apparatus S1, the acceleration of a detection direction is detected in the sensing part 11 in the state attached to the motor vehicle, The signal is sent from the package member 100 via the bonding wire 41 and the terminal 210 to ECU. To be sent to external circuits.

[Effects]
By the way, according to the acceleration sensor device S1 of the present embodiment, the first case where the detection direction is arranged in parallel with the first direction x and the second case where the detection direction is orthogonal to the first direction x. The terminal 210 can also be used in both cases of the second case arranged so as to be parallel to the direction y.

  For this reason, when the package member 100 is mounted on the case 200, even if the detection directions are different from each other, the electrical connection between the package member 100 and the case 200 can be achieved without changing the arrangement configuration of the terminal 210 in either case. Connection can be made.

  In particular, as shown in FIG. 4, when the connection surface 33 of the package member 100 is square and the sensor terminal 35 is provided on the periphery thereof, outside the three continuous sides of the connection surface 33, If the terminal 210 is provided along each of the three sides, it is easy to make the distance between the sensor terminal 35 and the terminal 210 as close as possible to wire bonding in the first and second cases. become.

  As shown in FIG. 4 above, the end of the terminal 210 closer to the center of the plurality of terminals 210 has a shape extending in parallel with the side located in the middle of the connection surface 33, and is located outside. The configuration in which the end portion of 210 extends so as to wrap around the outside of each side located on both sides of the middle side of the connection surface 33 can be realized even when there are four or more terminals 210. it can.

  For example, if there are four terminals, the ends of the two terminals at the center extend in parallel with the middle side of the connection surface 33, and the ends of the two outer terminals are connected to the connection surface. What is necessary is just to make it the shape extended so that it may wrap around to the outer side of each edge | side located in the both sides of the edge | side located in the middle in 33. Furthermore, in the case of six, for example, it may be configured similarly with two at the center and two at the outside.

(Second Embodiment)
FIG. 5 is a schematic plan view showing an acceleration sensor device S2 according to the second embodiment of the present invention. FIG. 5A shows the package member 100 so that the detection direction of the sensing unit 11 is parallel to the first direction x. (B) shows the second case where the package member 100 is arranged so that the detection direction is parallel to the second direction y.

  In this embodiment, the layout of the sensor terminals 35 provided on the connection surface 33 of the package member 100 is changed in the acceleration sensor device shown in the first embodiment, and the other parts are the same as those in the first embodiment. It is the same as the form.

  Also in this embodiment, as shown in FIG. 5, the end of one central terminal 210 among the three terminals 210 has a shape extending in parallel with the side located in the middle of the connection surface 33, The ends of the two terminals 210 located outside extend in a manner extending around the outside of each side located on both sides of the middle side of the connection surface 33. Thereby, the terminal 210 is provided outside the three continuous sides of the connection surface 33 along the three sides.

  In addition to the extended shape of the terminal 210 as described above, in the present embodiment, the sensor terminal 35 is also extended, so that both the first case and the second case described above are used. On the other hand, the terminal 210 can also be used.

  Specifically, the sensor terminal 35 is provided on each of the three sides of the connection surface 33 of the package member 100 and has a shape extending along each of the three sides. In each of these three sides, the sensor terminal 35 and the terminal 210 are connected by a bonding wire 41 and are electrically connected.

  According to the present embodiment, the sensor terminal 35 and the terminal 210 can be formed in the first and second cases by providing the sensor terminal 35 with an extended shape in addition to the effect of the combined use of the terminal 210 described above. And the wire bonding becomes easier.

(Third embodiment)
FIG. 6 is a schematic plan view showing an acceleration sensor device S3 according to the third embodiment of the present invention. FIG. 6A shows a package member 100 so that the detection direction of the sensing unit 11 is parallel to the first direction x. (B) shows the second case where the package member 100 is arranged so that the detection direction is parallel to the second direction y.

  In the present embodiment, in the acceleration sensor device shown in the first embodiment, the layout of the terminal 210 exposed at the bottom of the recess 201 of the case 200 and the sensor terminal 35 provided on the connection surface 33 of the package member 100. The other parts are the same as those in the first embodiment.

  As shown in FIG. 6, also in the present embodiment, the connection surface 33 has a quadrangular shape and includes a sensor terminal 35 at the periphery thereof, but for the terminal 210, one end of the three terminals 210 is connected to the connection surface. The layout is provided so as to be opposed to one side in 33, and the terminal 210 does not exist outside the remaining three sides.

  In such a layout of the terminal 210, in the configuration of the normal sensor terminal 35, when the detection direction is changed between the first case and the second case, there is a possibility that the wire bonding connection cannot be performed in either case. Is expensive. Therefore, in the present embodiment, by changing the layout of the sensor terminals 35, the terminal 210 can be used in both cases of the first case and the second case.

  Specifically, as illustrated in FIG. 6, the sensor terminal 35 is configured so that the end of the three terminals 210 face each other on the connection surface 33 and the side orthogonal to the one side. It is arranged in a letter shape. And the edge part of each terminal 210 and the sensor terminal 35 are connected and electrically connected via the bonding wire 41 as a connection member.

  Thus, also in this embodiment, since the terminal 210 is also used for both the first case and the second case described above, the package member 100 can be mounted with different detection directions. Even if it arrange | positions, the electrical connection of the package member 100 and the case 200 can be performed, without changing the arrangement configuration of the terminal 210. FIG.

  Further, according to the present embodiment, as shown in FIG. 6, the sensor terminals 35 arranged in an L shape are arranged so as to be approximately line symmetric in the first case and the second case. Become. Therefore, in both the first and second cases, the distance relationship between the terminal 210 and the sensor terminal 35 need not be significantly changed, and wire bonding can be easily performed.

(Fourth embodiment)
FIG. 7 is a schematic plan view showing an acceleration sensor device S4 according to the fourth embodiment of the present invention. FIG. 7A shows a package member 100 so that the detection direction of the sensing unit 11 is parallel to the first direction x. (B) shows the second case where the package member 100 is arranged so that the detection direction is parallel to the second direction y.

  In the present embodiment, in the acceleration sensor device shown in the first embodiment, the layout of the terminal 210 exposed at the bottom of the concave portion 201 of the case 200 is changed, and the other portions are the same as those in the first embodiment. It is the same.

  As shown in FIG. 7, also in the present embodiment, the connection surface 33 of the package member 100 forms a quadrangle and includes a sensor terminal 35 at the periphery thereof. The three terminals 210 are located at the bottom of the recess 201 of the case 200 from the outside of one side of the connection surface 33 (here, the side on the connector opening 202 side) beyond the connection surface 33. It extends to the outside of the side facing the side (side on the mounting hole 203 side).

  In this case, the three terminals 210 pass through the lower part of the connection surface 33, that is, the lower part of the package member 100 in a state where the three terminals 210 are exposed from the bottom part of the concave part 201 of the case 200. The package member 100 is bonded and fixed to the terminal 210 located at the lower portion via the adhesive 220 at the lid portion 32 as in the case of FIG.

  As shown in FIG. 7, each of the terminals 210 and the sensor terminals 35 is bonded as a connecting member on the outside of the one side and the outside of the side facing the one side on the connection surface 33. The wires 41 are connected and electrically connected via the wires 41.

  Also in the present embodiment, by adopting the layout configuration of the terminal 210 as shown in FIG. 7, the terminal 200 is also used for both the first case and the second case described above. Therefore, even if the package member 100 is arranged with different detection directions, the package member 100 and the case 210 can be electrically connected without changing the arrangement configuration of the terminal 210.

(Fifth embodiment)
FIG. 8 is a schematic plan view showing an acceleration sensor device S5 according to the fifth embodiment of the present invention. FIG. 8A shows the package member 100 so that the detection direction of the sensing unit 11 is parallel to the first direction x. (B) shows the second case where the package member 100 is arranged so that the detection direction is parallel to the second direction y.

  FIG. 9 is a partial cross-sectional view showing a connection portion by the connection member 42 between the package member 100 and the terminal 210 of the case 200 in FIG. In addition, about the same connection part in FIG.8 (b), it is a structure substantially the same as what is shown by this FIG.

  In this embodiment, in the acceleration sensor device shown in the first embodiment, the layout of the terminal 210 exposed at the bottom of the recess 201 of the case 200 is changed, and the connection member is changed from the bonding wire to the conductive bonding member 42. The other parts are the same as those of the first embodiment.

  In each of the above embodiments, the lid 32 on the opposite side of the connection surface 33 of the package member 100 is directed to the bottom of the recess 201 that is the surface of the case 200 on which the plurality of terminals 210 are provided. The member 100 was mounted on the case 200. On the contrary, in this embodiment, as shown in FIGS. 8 and 9, the package member 100 is mounted on the case 200 with the connection surface 33 facing the bottom of the recess 201.

  Each of the three terminals 210 extends from the outside of the connection surface 33 (here, the connector opening 202 side) so as to overlap the connection surface 33. That is, each terminal 210 is disposed so as to be exposed in a region where the package member 100 is mounted on the bottom surface of the recess 201 of the case 200.

  Further, each terminal 210 is disposed at a position facing the sensor terminal 35 provided on the connection surface 33. The sensor terminals 35 facing each other and the respective terminals 210 are electrically and mechanically connected via a conductive joining member 42 as a connecting member, as shown in FIGS.

  The conductive bonding member 42 is configured as a metal bump such as gold, copper, or solder, a conductive adhesive, or a reflowed solder provided by printing or the like. As a method for forming the conductive bonding member 42 and a method for bonding the members, known methods using these constituent materials can be employed.

  Also in this embodiment, both the first case and the second case described above are adopted by adopting the layout configuration of the terminal 210 and the connection configuration by the conductive bonding member 42 as shown in FIGS. In this case, the terminal 210 is also used.

  Therefore, even if the package member 100 is arranged with different detection directions, the package member 100 and the case 200 can be electrically connected without changing the arrangement configuration of the terminal 210. Moreover, according to this embodiment, it becomes a structure suitable for flip chip mounting, and the space for wire bonding becomes unnecessary, and the size reduction of the apparatus can be expected.

(Sixth embodiment)
FIG. 10 is a schematic plan view showing an acceleration sensor device according to a sixth embodiment of the present invention. FIG. 10A shows an example in which the electronic element 300 is mounted on the connection surface 33 of the package member 100, and FIG. Shows an example in which the electronic element 300 is mounted on the terminal 210. This embodiment is applicable to each of the above embodiments.

  Here, the electronic element 300 is a capacitor, but other than the capacitor, for example, a resistor element may be used. In short, as the electronic element 300, a surface mount component that can be mounted on the connection surface 33 or the terminal 210 with solder, a conductive adhesive, or the like can be used.

  In the example shown in FIG. 10A, the electronic element 300 is electrically connected to the sensor terminal 35 of the connection surface 33 by solder or the like. In the example shown in FIG. 300 is electrically connected to the two terminals 210 by solder or the like.

  In this way, by mounting a capacitor or the like as the electronic element 300, the signal processing function or the like performed by the circuit board can be substituted for the electronic element 300. Therefore, the circuit chip 20 in the package member 100, etc. Can be abolished.

(Other embodiments)
In each of the above embodiments, the second direction y is a direction orthogonal to the first direction x. However, the first direction x and the second direction y are different by 90 °. The first direction x and the second direction y are, for example, an angle such as 30 °, 45 °, or 60 °. It may be shifted to form

  Even in such a case, for example, if the terminal 210 is laid out so as to surround the connection surface 33 of the package member 100 as shown in FIG. A distance capable of wire bonding with the terminal can be secured, and the terminal 210 can also be used.

  The plurality of terminals 210 may not be three as in the above embodiment, but may be two or four or more. For example, even in the case of two, the connection surface 33 of the rectangular package member 100 may be surrounded by the terminal by designing the layout such as bending and extending the terminal.

  In this case, as shown in FIG. 4 above, the outside of the three sides of the connection surface 33 is not limited to be surrounded by the terminal, but only two sides of the connection surface 33 are surrounded by the terminal. However, the effect of the present invention can be expected.

  Further, the detection member is not limited to the package member 100 described above, and any member that includes a sensing unit having a detection direction in one direction and can be mounted on the case 200 may be used.

  For example, the detection member may not be a sensor chip or circuit chip housed in a package, but may be a bare chip. That is, the detection member may be only the sensor chip 10 described above, or may be in a state where the sensor chip 10 and the circuit chip 20 are stacked.

  In the case of this bare chip, for example, the sensor chip 10 and the circuit chip 20 may be directly fixed to the bottom surface of the recess 201 of the case 200 with an adhesive or the like. In this case, the pad 12 (see FIG. 1) of the sensor chip 10 and the pad 22 of the circuit chip 20 are sensor terminals, and the surface of the sensor chip 10 or the circuit chip 20 provided with the pad is a detection member. This is the connection surface.

  In addition, since a ceramic package as described above, or a sensor chip or a circuit chip is used as a detection member, the connection surface of the detection member is usually a quadrangle, but for example, a circle, a triangle, etc. Shape may be sufficient.

  In addition, the sensing unit in the detection member may be any sensor that has a detection direction in one direction. In addition to the acceleration sensor, for example, an angular velocity sensor whose detection direction is the direction in which the Coriolis force is generated may be used. .

  Moreover, as a case, what is provided with an electroconductive terminal should just be provided, and it may consist of ceramics etc. besides resin. The terminal may not be insert-molded, and may be attached to the case by, for example, adhesion or fastening.

It is a schematic sectional drawing of the package member as a member for a detection concerning a 1st embodiment of the present invention. It is a schematic top view of the package member in FIG. It is a schematic sectional drawing of the acceleration sensor apparatus as a sensor apparatus which concerns on 1st Embodiment. FIG. 4 is a schematic top view of the acceleration sensor device in FIG. 3, where (a) is a first case where a detection direction is arranged in parallel with a first direction x, and (b) is a detection direction in parallel with a second direction y. The 2nd case arrange | positioned is shown. It is a schematic plan view which shows the acceleration sensor apparatus which concerns on 2nd Embodiment of this invention, (a) is a 1st case where a detection direction is arrange | positioned in parallel with the 1st direction x, (b) The 2nd case arrange | positioned in parallel with the direction y of 2 is shown. It is a schematic plan view which shows the acceleration sensor apparatus which concerns on 3rd Embodiment of this invention, (a) is a 1st case which has arrange | positioned the detection direction in parallel with the 1st direction x, (b) The 2nd case arrange | positioned in parallel with the direction y of 2 is shown. It is a schematic plan view which shows the acceleration sensor apparatus which concerns on 4th Embodiment of this invention, (a) is a 1st case which has arrange | positioned the detection direction in parallel with the 1st direction x, (b) The 2nd case arrange | positioned in parallel with the direction y of 2 is shown. It is a schematic plan view which shows the acceleration sensor apparatus which concerns on 5th Embodiment of this invention, (a) is a 1st case which has arrange | positioned the detection direction in parallel with the 1st direction x, (b) The 2nd case arrange | positioned in parallel with the direction y of 2 is shown. It is a fragmentary sectional view which shows the connection part by the connection member of the package member and terminal in FIG. It is a schematic plan view which shows the acceleration sensor apparatus which concerns on 6th Embodiment of this invention, (a) is the example which mounted the electronic element in the connection surface of a package member, (b) is the example which mounted the electronic element in the terminal. Indicates.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 ... Sensing part, 33 ... Connection surface of a package member, 35 ... Sensor terminal,
41: Bonding wire as a connecting member,
42 ... Conductive joining member as a connecting member,
100: Package member as detection member, 200: Case,
210 ... terminal, 300 ... electronic element, x ... first direction, y ... second direction.

Claims (13)

A case (200) provided with a plurality of terminals (210) having conductivity;
A detection member (100) including a sensing unit (11) having a detection direction in one direction and mounted on the case (200);
A sensor terminal (35) provided on a connection surface (33) which is a surface for electrical connection with the case (200) in the detection member (100) and electrically connected to the sensing unit (11);
In the sensor device in which the plurality of terminals (210) and the sensor terminal (35) are electrically connected via connection members (41, 42),
A first case where the detection member (100) is arranged so that the detection direction is parallel to the first direction (x), and a second case where the detection direction is different from the first direction (x). The two or more terminals (210) are shared in both cases of the second case in which the detection member (100) is arranged so as to be parallel to the direction (y) of Sensor device. The connection surface (33) of the detection member (100) forms a quadrangle and includes the sensor terminal (35) at the periphery thereof,
The plurality of terminals (210) have a shape extending so as to surround the outside of at least two sides of the connection surface (33),
2. The sensor device according to claim 1, wherein each of the terminals (210) and the sensor terminal (35) are electrically connected via a bonding wire (41) as the connection member. 3. . The connection surface (33) of the detection member (100) forms a quadrangle and includes the sensor terminal (35) at the periphery thereof,
The plurality of terminals (210) are arranged so as to extend along each of the three sides outside the three consecutive sides on the connection surface (33),
Outside the three sides, each of the terminal (210) and the sensor terminal (35) is electrically connected via a bonding wire (41) as the connecting member. The sensor device according to claim 1. The plurality of terminals (210) arranged so as to extend along the three sides outside the three sides on the connection surface (33) of the detection member (100) include the connection surface. (33) consisting of a plurality of ones extending from the outside of the side located in the middle of the three sides to the side located in the middle,
The end of the terminal closer to the center of the plurality of terminals (210) has a shape extending in parallel with the intermediate side of the connection surface (33),
Of the plurality of terminals (210), the end of the terminal located outside extends around the outside of each side located on both sides of the middle side of the connection surface (33). The sensor device according to claim 2, wherein: The sensor terminal (35) is provided on each of the three sides of the connection surface (33) of the detection member (100) and extends along each of the three sides. The sensor device according to claim 2, wherein the sensor device is a sensor device. The connection surface (33) of the detection member (100) forms a quadrangle and includes the sensor terminal (35) at the periphery thereof,
The plurality of terminals (210) are composed of a plurality of terminals whose one end is provided to face one side of the connection surface (33),
The sensor terminal (35) is arranged in an L shape along the one side of the connection surface (33) and a side orthogonal to the one side,
The end part of each said terminal (210) and the said sensor terminal (35) are electrically connected via the bonding wire (41) as the said connection member, The 1st aspect is characterized by the above-mentioned. Sensor device. The connection surface (33) of the detection member (100) forms a quadrangle and includes the sensor terminal (35) at the periphery thereof,
The plurality of terminals (210) extend from the outside of one side of the connection surface (33) to the outside of the side facing the one side over the connection surface (33),
Each of the terminal (210) and the sensor terminal (35) is bonded as a connecting member on the outside of the one side and the outside of the side facing the one side on the connection surface (33). Sensor device according to claim 1, characterized in that it is electrically connected via a wire (41). The connection surface (33) of the detection member (100) is opposed to a surface of the case (200) where the plurality of terminals (210) are provided,
Each terminal (210) extends from the outside of the connection surface (33) so as to overlap the connection surface (33), and the sensor terminal (35) provided on the connection surface (33). Is arranged opposite to
The said sensor terminal (35) and each said terminal (210) which mutually oppose are electrically connected via the electroconductive joining member (42) as said connection member. The sensor device according to 1. The sensor according to any one of claims 1 to 8, wherein the case (200) is made of resin, and the plurality of terminals (210) are insert-molded in the case (200). apparatus. 10. The sensor device according to claim 1, wherein an electronic element (300) is mounted on the detection member (100). 10. The sensor device according to claim 1, wherein an electronic element (300) is mounted on the terminal (210). The sensor device according to any one of claims 1 to 11, wherein the sensing unit (11) detects acceleration in the detection direction. The sensor device according to any one of claims 1 to 12, wherein the second direction (y) is a direction orthogonal to the first direction (x).

Images