IT1224301B - Accelerometro capacitivo e metodo per produrlo - Google Patents

Accelerometro capacitivo e metodo per produrlo

Info

Publication number
IT1224301B
IT1224301B IT48532/88A IT4853288A IT1224301B IT 1224301 B IT1224301 B IT 1224301B IT 48532/88 A IT48532/88 A IT 48532/88A IT 4853288 A IT4853288 A IT 4853288A IT 1224301 B IT1224301 B IT 1224301B
Authority
IT
Italy
Prior art keywords
produce
capacitive accelerometer
accelerometer
capacitive
Prior art date
Application number
IT48532/88A
Other languages
English (en)
Other versions
IT8848532A0 (it
Inventor
Ari Lehto
Kalervo Jappinen
Anna-Mai Ja Karkkainen
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Publication of IT8848532A0 publication Critical patent/IT8848532A0/it
Application granted granted Critical
Publication of IT1224301B publication Critical patent/IT1224301B/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
IT48532/88A 1987-11-09 1988-11-08 Accelerometro capacitivo e metodo per produrlo IT1224301B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI874942A FI81915C (fi) 1987-11-09 1987-11-09 Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav.

Publications (2)

Publication Number Publication Date
IT8848532A0 IT8848532A0 (it) 1988-11-08
IT1224301B true IT1224301B (it) 1990-10-04

Family

ID=8525381

Family Applications (1)

Application Number Title Priority Date Filing Date
IT48532/88A IT1224301B (it) 1987-11-09 1988-11-08 Accelerometro capacitivo e metodo per produrlo

Country Status (10)

Country Link
JP (1) JPH01259265A (it)
KR (1) KR890008569A (it)
CN (1) CN1022136C (it)
DE (1) DE3837883A1 (it)
ES (1) ES2012420A6 (it)
FI (1) FI81915C (it)
FR (1) FR2622975B1 (it)
GB (1) GB2212274A (it)
IT (1) IT1224301B (it)
SE (1) SE468067B (it)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4983485A (en) * 1988-04-13 1991-01-08 Shikoku Chemicals Corporation Positively chargeable toner
JPH0623782B2 (ja) * 1988-11-15 1994-03-30 株式会社日立製作所 静電容量式加速度センサ及び半導体圧力センサ
US5228341A (en) * 1989-10-18 1993-07-20 Hitachi, Ltd. Capacitive acceleration detector having reduced mass portion
US6864677B1 (en) 1993-12-15 2005-03-08 Kazuhiro Okada Method of testing a sensor
JPH03210478A (ja) * 1990-01-12 1991-09-13 Nissan Motor Co Ltd 半導体加速度センサ
DE4000903C1 (it) * 1990-01-15 1990-08-09 Robert Bosch Gmbh, 7000 Stuttgart, De
JP2786321B2 (ja) * 1990-09-07 1998-08-13 株式会社日立製作所 半導体容量式加速度センサ及びその製造方法
DE4222472C2 (de) * 1992-07-09 1998-07-02 Bosch Gmbh Robert Beschleunigungssensor
JP2533272B2 (ja) * 1992-11-17 1996-09-11 住友電気工業株式会社 半導体デバイスの製造方法
FR2698447B1 (fr) * 1992-11-23 1995-02-03 Suisse Electronique Microtech Cellule de mesure micro-usinée.
DE10117630B4 (de) * 2001-04-09 2005-12-29 Eads Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
EP1243930A1 (de) 2001-03-08 2002-09-25 EADS Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
DE10111149B4 (de) * 2001-03-08 2011-01-05 Eads Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
DE10117257A1 (de) * 2001-04-06 2002-10-17 Eads Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
JP2005077349A (ja) * 2003-09-03 2005-03-24 Mitsubishi Electric Corp 加速度センサ
WO2007104289A1 (de) 2006-03-10 2007-09-20 Conti Temic Microelectronic Gmbh Mikromechanischer drehratensensor
EP2259018B1 (en) * 2009-05-29 2017-06-28 Infineon Technologies AG Gap control for die or layer bonding using intermediate layers of a micro-electromechanical system
WO2013165348A1 (en) * 2012-04-30 2013-11-07 Hewlett-Packard Development Company Control signal based on a command tapped by a user
CN106771361B (zh) * 2016-12-15 2023-04-25 西安邮电大学 双电容式微机械加速度传感器及基于其的温度自补偿系统
CN106841683B (zh) * 2017-04-06 2023-09-01 中国工程物理研究院电子工程研究所 石英摆式加速度计及其制备方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH642461A5 (fr) * 1981-07-02 1984-04-13 Centre Electron Horloger Accelerometre.
JPS6197572A (ja) * 1984-10-19 1986-05-16 Nissan Motor Co Ltd 半導体加速度センサの製造方法
US4679434A (en) * 1985-07-25 1987-07-14 Litton Systems, Inc. Integrated force balanced accelerometer
US4744249A (en) * 1985-07-25 1988-05-17 Litton Systems, Inc. Vibrating accelerometer-multisensor
DE3625411A1 (de) * 1986-07-26 1988-02-04 Messerschmitt Boelkow Blohm Kapazitiver beschleunigungssensor
DE3703793A1 (de) * 1987-02-07 1988-08-18 Messerschmitt Boelkow Blohm Detektorelement

Also Published As

Publication number Publication date
FI874942A0 (fi) 1987-11-09
IT8848532A0 (it) 1988-11-08
FR2622975B1 (fr) 1991-07-12
JPH01259265A (ja) 1989-10-16
FI874942A (fi) 1989-05-10
SE468067B (sv) 1992-10-26
CN1022136C (zh) 1993-09-15
FI81915B (fi) 1990-08-31
SE8804039D0 (sv) 1988-11-08
GB8826263D0 (en) 1988-12-14
KR890008569A (ko) 1989-07-12
DE3837883A1 (de) 1989-05-18
CN1033110A (zh) 1989-05-24
FI81915C (fi) 1990-12-10
GB2212274A (en) 1989-07-19
FR2622975A1 (fr) 1989-05-12
SE8804039A (it) 1988-11-08
ES2012420A6 (es) 1990-03-16

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Legal Events

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TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19971009