DE3837883A1 - Kapazitiver beschleunigungsmesser und verfahren zu seiner herstellung - Google Patents
Kapazitiver beschleunigungsmesser und verfahren zu seiner herstellungInfo
- Publication number
- DE3837883A1 DE3837883A1 DE3837883A DE3837883A DE3837883A1 DE 3837883 A1 DE3837883 A1 DE 3837883A1 DE 3837883 A DE3837883 A DE 3837883A DE 3837883 A DE3837883 A DE 3837883A DE 3837883 A1 DE3837883 A1 DE 3837883A1
- Authority
- DE
- Germany
- Prior art keywords
- electrode
- accelerometer
- center electrode
- electrode structure
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI874942A FI81915C (fi) | 1987-11-09 | 1987-11-09 | Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav. |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3837883A1 true DE3837883A1 (de) | 1989-05-18 |
Family
ID=8525381
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3837883A Ceased DE3837883A1 (de) | 1987-11-09 | 1988-11-08 | Kapazitiver beschleunigungsmesser und verfahren zu seiner herstellung |
Country Status (10)
Country | Link |
---|---|
JP (1) | JPH01259265A (it) |
KR (1) | KR890008569A (it) |
CN (1) | CN1022136C (it) |
DE (1) | DE3837883A1 (it) |
ES (1) | ES2012420A6 (it) |
FI (1) | FI81915C (it) |
FR (1) | FR2622975B1 (it) |
GB (1) | GB2212274A (it) |
IT (1) | IT1224301B (it) |
SE (1) | SE468067B (it) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4032828A1 (de) * | 1989-10-18 | 1991-04-25 | Hitachi Ltd | Beschleunigungsdetektor |
DE4100451A1 (de) * | 1990-01-12 | 1991-07-25 | Nissan Motor | Halbleiterbeschleunigungsmesser |
DE4222472A1 (de) * | 1992-07-09 | 1994-01-13 | Bosch Gmbh Robert | Beschleunigungssensor |
WO2002082101A1 (de) * | 2001-04-06 | 2002-10-17 | Eads Deutschland Gmbh | Mikromechanischer kapazitiver beschleunigungssensor |
DE10117630B4 (de) * | 2001-04-09 | 2005-12-29 | Eads Deutschland Gmbh | Mikromechanischer kapazitiver Beschleunigungssensor |
US7343801B2 (en) | 2001-03-08 | 2008-03-18 | Conti Temic Microelectronic Gmbh | Micromechanical capacitive acceleration sensor |
DE10111149B4 (de) * | 2001-03-08 | 2011-01-05 | Eads Deutschland Gmbh | Mikromechanischer kapazitiver Beschleunigungssensor |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4983485A (en) * | 1988-04-13 | 1991-01-08 | Shikoku Chemicals Corporation | Positively chargeable toner |
JPH0623782B2 (ja) * | 1988-11-15 | 1994-03-30 | 株式会社日立製作所 | 静電容量式加速度センサ及び半導体圧力センサ |
US6864677B1 (en) | 1993-12-15 | 2005-03-08 | Kazuhiro Okada | Method of testing a sensor |
DE4000903C1 (it) * | 1990-01-15 | 1990-08-09 | Robert Bosch Gmbh, 7000 Stuttgart, De | |
JP2786321B2 (ja) * | 1990-09-07 | 1998-08-13 | 株式会社日立製作所 | 半導体容量式加速度センサ及びその製造方法 |
JP2533272B2 (ja) * | 1992-11-17 | 1996-09-11 | 住友電気工業株式会社 | 半導体デバイスの製造方法 |
FR2698447B1 (fr) * | 1992-11-23 | 1995-02-03 | Suisse Electronique Microtech | Cellule de mesure micro-usinée. |
JP2005077349A (ja) * | 2003-09-03 | 2005-03-24 | Mitsubishi Electric Corp | 加速度センサ |
US8342022B2 (en) | 2006-03-10 | 2013-01-01 | Conti Temic Microelectronic Gmbh | Micromechanical rotational speed sensor |
EP2259018B1 (en) | 2009-05-29 | 2017-06-28 | Infineon Technologies AG | Gap control for die or layer bonding using intermediate layers of a micro-electromechanical system |
GB2518050A (en) * | 2012-04-30 | 2015-03-11 | Hewlett Packard Development Co | Control Signal Based On a Command Tapped By A User |
CN106771361B (zh) * | 2016-12-15 | 2023-04-25 | 西安邮电大学 | 双电容式微机械加速度传感器及基于其的温度自补偿系统 |
CN117368525A (zh) * | 2017-04-06 | 2024-01-09 | 中国工程物理研究院电子工程研究所 | 石英摆式加速度计 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3223987A1 (de) * | 1981-07-02 | 1983-01-20 | Centre Electronique Horloger S.A., 2000 Neuchâtel | Beschleunigungsmesser |
US4679434A (en) * | 1985-07-25 | 1987-07-14 | Litton Systems, Inc. | Integrated force balanced accelerometer |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6197572A (ja) * | 1984-10-19 | 1986-05-16 | Nissan Motor Co Ltd | 半導体加速度センサの製造方法 |
US4744249A (en) * | 1985-07-25 | 1988-05-17 | Litton Systems, Inc. | Vibrating accelerometer-multisensor |
DE3625411A1 (de) * | 1986-07-26 | 1988-02-04 | Messerschmitt Boelkow Blohm | Kapazitiver beschleunigungssensor |
DE3703793A1 (de) * | 1987-02-07 | 1988-08-18 | Messerschmitt Boelkow Blohm | Detektorelement |
-
1987
- 1987-11-09 FI FI874942A patent/FI81915C/fi not_active IP Right Cessation
-
1988
- 1988-11-08 ES ES8803392A patent/ES2012420A6/es not_active Expired - Fee Related
- 1988-11-08 IT IT48532/88A patent/IT1224301B/it active
- 1988-11-08 DE DE3837883A patent/DE3837883A1/de not_active Ceased
- 1988-11-08 FR FR888814564A patent/FR2622975B1/fr not_active Expired - Lifetime
- 1988-11-08 SE SE8804039A patent/SE468067B/sv unknown
- 1988-11-08 KR KR1019880014655A patent/KR890008569A/ko not_active Application Discontinuation
- 1988-11-09 CN CN88107822A patent/CN1022136C/zh not_active Expired - Lifetime
- 1988-11-09 JP JP63283533A patent/JPH01259265A/ja active Pending
- 1988-11-09 GB GB8826263A patent/GB2212274A/en not_active Withdrawn
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3223987A1 (de) * | 1981-07-02 | 1983-01-20 | Centre Electronique Horloger S.A., 2000 Neuchâtel | Beschleunigungsmesser |
US4679434A (en) * | 1985-07-25 | 1987-07-14 | Litton Systems, Inc. | Integrated force balanced accelerometer |
Non-Patent Citations (1)
Title |
---|
US-Z.: IEEE Transactions on Electron Devices, Vol. ED-26, No. 12, Dec. 1979, S. 1911-1917 * |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4032828A1 (de) * | 1989-10-18 | 1991-04-25 | Hitachi Ltd | Beschleunigungsdetektor |
DE4100451A1 (de) * | 1990-01-12 | 1991-07-25 | Nissan Motor | Halbleiterbeschleunigungsmesser |
DE4222472A1 (de) * | 1992-07-09 | 1994-01-13 | Bosch Gmbh Robert | Beschleunigungssensor |
DE4222472C2 (de) * | 1992-07-09 | 1998-07-02 | Bosch Gmbh Robert | Beschleunigungssensor |
US7343801B2 (en) | 2001-03-08 | 2008-03-18 | Conti Temic Microelectronic Gmbh | Micromechanical capacitive acceleration sensor |
DE10111149B4 (de) * | 2001-03-08 | 2011-01-05 | Eads Deutschland Gmbh | Mikromechanischer kapazitiver Beschleunigungssensor |
WO2002082101A1 (de) * | 2001-04-06 | 2002-10-17 | Eads Deutschland Gmbh | Mikromechanischer kapazitiver beschleunigungssensor |
DE10117630B4 (de) * | 2001-04-09 | 2005-12-29 | Eads Deutschland Gmbh | Mikromechanischer kapazitiver Beschleunigungssensor |
Also Published As
Publication number | Publication date |
---|---|
SE8804039D0 (sv) | 1988-11-08 |
FR2622975B1 (fr) | 1991-07-12 |
CN1022136C (zh) | 1993-09-15 |
JPH01259265A (ja) | 1989-10-16 |
ES2012420A6 (es) | 1990-03-16 |
IT1224301B (it) | 1990-10-04 |
FI81915B (fi) | 1990-08-31 |
IT8848532A0 (it) | 1988-11-08 |
FI874942A0 (fi) | 1987-11-09 |
GB2212274A (en) | 1989-07-19 |
FI874942A (fi) | 1989-05-10 |
SE468067B (sv) | 1992-10-26 |
KR890008569A (ko) | 1989-07-12 |
FR2622975A1 (fr) | 1989-05-12 |
CN1033110A (zh) | 1989-05-24 |
GB8826263D0 (en) | 1988-12-14 |
FI81915C (fi) | 1990-12-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8110 | Request for examination paragraph 44 | ||
8131 | Rejection |