RU2635834C2 - Способ изготовления солнечного элемента и изготовленный с помощью этого способа солнечный элемент - Google Patents
Способ изготовления солнечного элемента и изготовленный с помощью этого способа солнечный элемент Download PDFInfo
- Publication number
- RU2635834C2 RU2635834C2 RU2015107986A RU2015107986A RU2635834C2 RU 2635834 C2 RU2635834 C2 RU 2635834C2 RU 2015107986 A RU2015107986 A RU 2015107986A RU 2015107986 A RU2015107986 A RU 2015107986A RU 2635834 C2 RU2635834 C2 RU 2635834C2
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- plasma
- chamber
- gaseous
- substrate
- silicon nitride
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 238000000034 method Methods 0.000 title claims description 26
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- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims abstract description 92
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 57
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- H—ELECTRICITY
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/452—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by activating reactive gas streams before their introduction into the reaction chamber, e.g. by ionisation or addition of reactive species
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
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- C—CHEMISTRY; METALLURGY
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- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
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- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
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- H10F77/10—Semiconductor bodies
- H10F77/16—Material structures, e.g. crystalline structures, film structures or crystal plane orientations
- H10F77/169—Thin semiconductor films on metallic or insulating substrates
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- H10F77/30—Coatings
- H10F77/306—Coatings for devices having potential barriers
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- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
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- Y02E10/547—Monocrystalline silicon PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
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- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Vapour Deposition (AREA)
- Formation Of Insulating Films (AREA)
- Photovoltaic Devices (AREA)
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012176907 | 2012-08-09 | ||
| JP2012-176907 | 2012-08-09 | ||
| PCT/JP2013/070564 WO2014024729A1 (ja) | 2012-08-09 | 2013-07-30 | 太陽電池の製造方法、及びその製造方法により製造された太陽電池 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| RU2015107986A RU2015107986A (ru) | 2016-09-27 |
| RU2635834C2 true RU2635834C2 (ru) | 2017-11-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2015107986A RU2635834C2 (ru) | 2012-08-09 | 2013-07-30 | Способ изготовления солнечного элемента и изготовленный с помощью этого способа солнечный элемент |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US9559221B2 (enExample) |
| EP (1) | EP2884544B1 (enExample) |
| JP (1) | JP5884911B2 (enExample) |
| KR (1) | KR102097758B1 (enExample) |
| CN (1) | CN104521003B (enExample) |
| IN (1) | IN2015DN01821A (enExample) |
| MY (1) | MY170163A (enExample) |
| RU (1) | RU2635834C2 (enExample) |
| TW (1) | TWI622183B (enExample) |
| WO (1) | WO2014024729A1 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014024729A1 (ja) * | 2012-08-09 | 2014-02-13 | 信越化学工業株式会社 | 太陽電池の製造方法、及びその製造方法により製造された太陽電池 |
| JP6369680B2 (ja) * | 2014-05-30 | 2018-08-08 | パナソニックＩｐマネジメント株式会社 | 太陽電池 |
| US9559236B2 (en) * | 2014-09-24 | 2017-01-31 | Sunpower Corporation | Solar cell fabricated by simplified deposition process |
| CN106282965B (zh) * | 2016-08-31 | 2019-09-20 | 东方日升新能源股份有限公司 | 太阳能电池硅片的等离子增强化学气相沉积法 |
| US20210381107A1 (en) * | 2020-06-03 | 2021-12-09 | Micron Technology, Inc. | Material deposition systems, and related methods and microelectronic devices |
| CN115425114B (zh) * | 2022-09-30 | 2025-09-12 | 福建金石能源有限公司 | 一种异质结太阳能电池的制造方法 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5073804A (en) * | 1977-12-05 | 1991-12-17 | Plasma Physics Corp. | Method of forming semiconductor materials and barriers |
| US20090007966A1 (en) * | 2004-10-27 | 2009-01-08 | Takayuki Isaka | Solar cell and method for producing solar cell |
| JP2009260281A (ja) * | 2008-03-28 | 2009-11-05 | Mitsubishi Electric Corp | 薄膜形成方法および薄膜形成装置、並びにそれを用いて製造された薄膜半導体装置 |
| RU2417481C2 (ru) * | 2009-02-13 | 2011-04-27 | Российская Академия сельскохозяйственных наук Государственное научное учреждение Всероссийский научно-исследовательский институт электрификации сельского хозяйства (ГНУ ВИЭСХ РОССЕЛЬХОЗАКАДЕМИИ) | Фотоэлектрический преобразователь (варианты) и способ его изготовления (варианты) |
| WO2012036002A1 (ja) * | 2010-09-14 | 2012-03-22 | 信越化学工業株式会社 | 太陽電池及びその製造方法 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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- 2013-07-30 RU RU2015107986A patent/RU2635834C2/ru active
- 2013-07-30 KR KR1020157003298A patent/KR102097758B1/ko active Active
- 2013-07-30 JP JP2014529435A patent/JP5884911B2/ja active Active
- 2013-07-30 US US14/417,330 patent/US9559221B2/en active Active
- 2013-07-30 CN CN201380042132.4A patent/CN104521003B/zh active Active
- 2013-07-30 MY MYPI2015000152A patent/MY170163A/en unknown
- 2013-07-30 IN IN1821DEN2015 patent/IN2015DN01821A/en unknown
- 2013-08-08 TW TW102128462A patent/TWI622183B/zh active
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| Publication number | Publication date |
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| RU2015107986A (ru) | 2016-09-27 |
| EP2884544A1 (en) | 2015-06-17 |
| CN104521003B (zh) | 2016-11-23 |
| WO2014024729A1 (ja) | 2014-02-13 |
| US9559221B2 (en) | 2017-01-31 |
| CN104521003A (zh) | 2015-04-15 |
| TWI622183B (zh) | 2018-04-21 |
| KR20150041785A (ko) | 2015-04-17 |
| EP2884544B1 (en) | 2018-05-09 |
| TW201428989A (zh) | 2014-07-16 |
| MY170163A (en) | 2019-07-09 |
| EP2884544A4 (en) | 2016-02-10 |
| IN2015DN01821A (enExample) | 2015-05-29 |
| US20150206990A1 (en) | 2015-07-23 |
| JPWO2014024729A1 (ja) | 2016-07-25 |
| KR102097758B1 (ko) | 2020-04-07 |
| JP5884911B2 (ja) | 2016-03-15 |
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