RU2348088C2 - Регулирование электромеханического поведения структур в устройстве микроэлектромеханических систем - Google Patents

Регулирование электромеханического поведения структур в устройстве микроэлектромеханических систем Download PDF

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Publication number
RU2348088C2
RU2348088C2 RU2005111765/28A RU2005111765A RU2348088C2 RU 2348088 C2 RU2348088 C2 RU 2348088C2 RU 2005111765/28 A RU2005111765/28 A RU 2005111765/28A RU 2005111765 A RU2005111765 A RU 2005111765A RU 2348088 C2 RU2348088 C2 RU 2348088C2
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Russia
Prior art keywords
layer
electrode
substrate
electric charges
mems
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RU2005111765/28A
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English (en)
Russian (ru)
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RU2005111765A (ru
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Марк В. МАЙЛС (US)
Марк В. МАЙЛС
Джон БЕЙТИ (US)
Джон БЕЙТИ
Клэренс ЧУЙ (US)
Клэренс ЧУЙ
Маниш КОТАРИ (US)
Маниш КОТАРИ
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АйДиСи, ЭлЭлСи
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/82—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of the magnetic field applied to the device
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements

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  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Power Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Ceramic Engineering (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Measuring Fluid Pressure (AREA)
RU2005111765/28A 2002-09-20 2003-09-18 Регулирование электромеханического поведения структур в устройстве микроэлектромеханических систем RU2348088C2 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/251,196 US7550794B2 (en) 2002-09-20 2002-09-20 Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
US10/251,196 2002-09-20

Publications (2)

Publication Number Publication Date
RU2005111765A RU2005111765A (ru) 2006-01-20
RU2348088C2 true RU2348088C2 (ru) 2009-02-27

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RU2005111765/28A RU2348088C2 (ru) 2002-09-20 2003-09-18 Регулирование электромеханического поведения структур в устройстве микроэлектромеханических систем

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US (2) US7550794B2 (ja)
EP (1) EP1540738B1 (ja)
JP (1) JP4800619B2 (ja)
KR (2) KR101117059B1 (ja)
CN (1) CN1723571B (ja)
AU (1) AU2003275194A1 (ja)
BR (1) BR0314604A (ja)
CA (1) CA2499208C (ja)
ES (1) ES2523980T3 (ja)
HK (1) HK1085305A1 (ja)
MX (1) MXPA05003078A (ja)
RU (1) RU2348088C2 (ja)
TW (1) TWI289538B (ja)
WO (1) WO2004026757A2 (ja)

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