PL3017079T3 - Sposób wytwarzania warstw tixsi1-xn - Google Patents

Sposób wytwarzania warstw tixsi1-xn

Info

Publication number
PL3017079T3
PL3017079T3 PL14737148T PL14737148T PL3017079T3 PL 3017079 T3 PL3017079 T3 PL 3017079T3 PL 14737148 T PL14737148 T PL 14737148T PL 14737148 T PL14737148 T PL 14737148T PL 3017079 T3 PL3017079 T3 PL 3017079T3
Authority
PL
Poland
Prior art keywords
tixsi1
layers
production
production tixsi1
Prior art date
Application number
PL14737148T
Other languages
English (en)
Other versions
PL3017079T5 (pl
Inventor
Denis Kurapov
Siegfried Krassnitzer
Original Assignee
Oerlikon Surface Solutions Ag, Pfäffikon
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=51167846&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=PL3017079(T3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from DE102013011073.4A external-priority patent/DE102013011073A1/de
Priority claimed from DE201310011071 external-priority patent/DE102013011071A1/de
Application filed by Oerlikon Surface Solutions Ag, Pfäffikon filed Critical Oerlikon Surface Solutions Ag, Pfäffikon
Publication of PL3017079T3 publication Critical patent/PL3017079T3/pl
Publication of PL3017079T5 publication Critical patent/PL3017079T5/pl

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/027—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0682—Silicides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3485—Sputtering using pulsed power to the target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Coating By Spraying Or Casting (AREA)
PL14737148T 2013-07-03 2014-07-01 Sposób wytwarzania warstw tixsi1-xn PL3017079T5 (pl)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102013011073.4A DE102013011073A1 (de) 2013-07-03 2013-07-03 TlxSi1-xN Schichten und ihre Herstellung
DE201310011071 DE102013011071A1 (de) 2013-07-03 2013-07-03 TixSi1-xN Schichten mit CryAl1-yN Haftschicht und ihre Herstellung
PCT/EP2014/001792 WO2015000581A1 (de) 2013-07-03 2014-07-01 Tixsi1-xn schichten und ihre herstellung
EP14737148.8A EP3017079B2 (de) 2013-07-03 2014-07-01 Verfahren zur herstellung von tixsi1-xn schichten

Publications (2)

Publication Number Publication Date
PL3017079T3 true PL3017079T3 (pl) 2017-09-29
PL3017079T5 PL3017079T5 (pl) 2020-12-28

Family

ID=51167846

Family Applications (1)

Application Number Title Priority Date Filing Date
PL14737148T PL3017079T5 (pl) 2013-07-03 2014-07-01 Sposób wytwarzania warstw tixsi1-xn

Country Status (17)

Country Link
US (1) US9840768B2 (pl)
EP (1) EP3017079B2 (pl)
JP (1) JP6122975B2 (pl)
KR (2) KR102178189B1 (pl)
CN (1) CN105392911B (pl)
BR (1) BR112015032169B1 (pl)
CA (1) CA2916784C (pl)
ES (1) ES2630316T5 (pl)
IL (1) IL243136A (pl)
MX (1) MX361325B (pl)
MY (1) MY187100A (pl)
PH (1) PH12015502753B1 (pl)
PL (1) PL3017079T5 (pl)
PT (1) PT3017079T (pl)
RU (1) RU2674179C2 (pl)
SG (1) SG11201510417RA (pl)
WO (1) WO2015000581A1 (pl)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017170536A1 (ja) * 2016-03-30 2017-10-05 三菱日立ツール株式会社 被覆切削工具
EP3689513A4 (en) * 2017-09-27 2021-03-17 Mitsubishi Hitachi Tool Engineering, Ltd. COATED CUTTING TOOL
CN115125486B (zh) * 2022-07-27 2024-01-02 安徽工业大学 一种含有多层结构的高强韧纳米复合涂层及其制备方法

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JP3417907B2 (ja) 2000-07-13 2003-06-16 日立ツール株式会社 多層皮膜被覆工具
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RU2419680C1 (ru) * 2010-04-20 2011-05-27 Государственное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
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Also Published As

Publication number Publication date
KR102178189B1 (ko) 2020-11-13
EP3017079B1 (de) 2017-04-12
RU2016102845A3 (pl) 2018-05-24
HK1219516A1 (zh) 2017-04-07
RU2674179C2 (ru) 2018-12-05
ES2630316T5 (es) 2021-06-18
MY187100A (en) 2021-08-31
CA2916784A1 (en) 2015-01-08
KR20160029091A (ko) 2016-03-14
MX361325B (es) 2018-11-20
KR101891900B1 (ko) 2018-09-28
CN105392911B (zh) 2018-12-21
ES2630316T3 (es) 2017-08-21
IL243136A (en) 2017-04-30
PH12015502753A1 (en) 2016-03-21
BR112015032169A8 (pt) 2018-01-02
JP6122975B2 (ja) 2017-04-26
WO2015000581A1 (de) 2015-01-08
US20160177436A1 (en) 2016-06-23
BR112015032169B1 (pt) 2022-04-19
PL3017079T5 (pl) 2020-12-28
CA2916784C (en) 2018-07-31
PH12015502753B1 (en) 2016-03-21
EP3017079A1 (de) 2016-05-11
BR112015032169A2 (pt) 2017-07-25
US9840768B2 (en) 2017-12-12
PT3017079T (pt) 2017-07-19
CN105392911A (zh) 2016-03-09
JP2016534217A (ja) 2016-11-04
KR20170108177A (ko) 2017-09-26
SG11201510417RA (en) 2016-01-28
RU2016102845A (ru) 2017-08-09
MX2015017033A (es) 2016-10-26
EP3017079B2 (de) 2020-09-09

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