PL3017079T5 - Sposób wytwarzania warstw tixsi1-xn - Google Patents
Sposób wytwarzania warstw tixsi1-xnInfo
- Publication number
- PL3017079T5 PL3017079T5 PL14737148T PL14737148T PL3017079T5 PL 3017079 T5 PL3017079 T5 PL 3017079T5 PL 14737148 T PL14737148 T PL 14737148T PL 14737148 T PL14737148 T PL 14737148T PL 3017079 T5 PL3017079 T5 PL 3017079T5
- Authority
- PL
- Poland
- Prior art keywords
- tixsi1
- layers
- production
- production tixsi1
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/027—Graded interfaces
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0682—Silicides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3485—Sputtering using pulsed power to the target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Coating By Spraying Or Casting (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102013011073.4A DE102013011073A1 (de) | 2013-07-03 | 2013-07-03 | TlxSi1-xN Schichten und ihre Herstellung |
DE201310011071 DE102013011071A1 (de) | 2013-07-03 | 2013-07-03 | TixSi1-xN Schichten mit CryAl1-yN Haftschicht und ihre Herstellung |
EP14737148.8A EP3017079B2 (de) | 2013-07-03 | 2014-07-01 | Verfahren zur herstellung von tixsi1-xn schichten |
PCT/EP2014/001792 WO2015000581A1 (de) | 2013-07-03 | 2014-07-01 | Tixsi1-xn schichten und ihre herstellung |
Publications (2)
Publication Number | Publication Date |
---|---|
PL3017079T3 PL3017079T3 (pl) | 2017-09-29 |
PL3017079T5 true PL3017079T5 (pl) | 2020-12-28 |
Family
ID=51167846
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PL14737148T PL3017079T5 (pl) | 2013-07-03 | 2014-07-01 | Sposób wytwarzania warstw tixsi1-xn |
Country Status (18)
Country | Link |
---|---|
US (1) | US9840768B2 (pl) |
EP (1) | EP3017079B2 (pl) |
JP (1) | JP6122975B2 (pl) |
KR (2) | KR102178189B1 (pl) |
CN (1) | CN105392911B (pl) |
BR (1) | BR112015032169B1 (pl) |
CA (1) | CA2916784C (pl) |
ES (1) | ES2630316T5 (pl) |
HK (1) | HK1219516A1 (pl) |
IL (1) | IL243136A (pl) |
MX (1) | MX361325B (pl) |
MY (1) | MY187100A (pl) |
PH (1) | PH12015502753A1 (pl) |
PL (1) | PL3017079T5 (pl) |
PT (1) | PT3017079T (pl) |
RU (1) | RU2674179C2 (pl) |
SG (1) | SG11201510417RA (pl) |
WO (1) | WO2015000581A1 (pl) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6362003B2 (ja) * | 2016-03-30 | 2018-07-25 | 三菱日立ツール株式会社 | 被覆切削工具 |
KR102336097B1 (ko) * | 2017-09-27 | 2021-12-06 | 가부시키가이샤 몰디노 | 피복 절삭 공구 |
CN115125486B (zh) * | 2022-07-27 | 2024-01-02 | 安徽工业大学 | 一种含有多层结构的高强韧纳米复合涂层及其制备方法 |
Family Cites Families (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07197246A (ja) * | 1993-12-28 | 1995-08-01 | Mitsubishi Materials Corp | 成膜中にパーティクル発生の少ないスパッタリング用Tiシリサイド焼結ターゲット材 |
JPH0867971A (ja) * | 1994-08-30 | 1996-03-12 | Mitsubishi Materials Corp | モザイク状Tiシリサイドターゲット材 |
DE19625577A1 (de) | 1996-06-27 | 1998-01-02 | Vaw Motor Gmbh | Aluminium-Gußteil und Verfahren zu seiner Herstellung |
JP3417907B2 (ja) * | 2000-07-13 | 2003-06-16 | 日立ツール株式会社 | 多層皮膜被覆工具 |
JP3996809B2 (ja) | 2002-07-11 | 2007-10-24 | 住友電工ハードメタル株式会社 | 被覆切削工具 |
US6906295B2 (en) * | 2003-02-20 | 2005-06-14 | National Material L.P. | Foodware with multilayer stick resistant ceramic coating and method of making |
AU2003903853A0 (en) | 2003-07-25 | 2003-08-07 | Antoine Bittar | Barriers, materials and processes for solar selective surfaces |
US7097922B2 (en) * | 2004-05-03 | 2006-08-29 | General Motors Corporation | Multi-layered superhard nanocomposite coatings |
JP2005344148A (ja) * | 2004-06-01 | 2005-12-15 | Sumitomo Electric Ind Ltd | 耐摩耗性被膜およびこれを用いた表面被覆切削工具 |
US7790003B2 (en) * | 2004-10-12 | 2010-09-07 | Southwest Research Institute | Method for magnetron sputter deposition |
US7348074B2 (en) * | 2005-04-01 | 2008-03-25 | Oc Oerlikon Balzers Ag | Multilayer hard coating for tools |
SE0500994L (sv) * | 2005-04-29 | 2006-10-30 | Seco Tools Ab | Tunt slitstarkt skikt |
WO2007048098A2 (en) * | 2005-10-18 | 2007-04-26 | Southwest Research Institute | Erosion resistant coatings |
GB0608582D0 (en) † | 2006-05-02 | 2006-06-07 | Univ Sheffield Hallam | High power impulse magnetron sputtering vapour deposition |
CA2652586C (en) * | 2006-05-17 | 2015-07-07 | G & H Technologies Llc | Wear resistant coating |
RU2327811C1 (ru) * | 2006-11-14 | 2008-06-27 | Государственное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" | Способ получения многослойного покрытия для режущего инструмента |
SE0602814L (sv) * | 2006-12-27 | 2008-06-28 | Sandvik Intellectual Property | Skärverktyg med multiskiktbeläggning |
US7923130B2 (en) | 2007-05-30 | 2011-04-12 | Sumitomo Electric Hardmetal Corp. | Surface-coated cutting tool |
US8304098B2 (en) * | 2007-10-12 | 2012-11-06 | Hitachi Tool Engineering, Ltd. | Hard-coated member, and its production method |
EP2072637B1 (en) † | 2007-12-21 | 2018-08-15 | Sandvik Intellectual Property AB | Coated cutting tool and a method of making a coated cutting tool |
MX2011000331A (es) | 2008-07-09 | 2011-06-20 | Oerlikon Trading Ag | Sistema de recubrimiento, pieza de trabajo recubierta y metodo para la elaboracion del mismo. |
ATE535629T1 (de) * | 2008-07-29 | 2011-12-15 | Sulzer Metaplas Gmbh | Gepulstes hochleistungs-magnetronsputterverfahren sowie hochleistungs-elektroenergiequelle |
JP5156971B2 (ja) | 2009-03-17 | 2013-03-06 | Smc株式会社 | 溶損防止用被覆部材 |
SE533883C2 (sv) | 2009-06-01 | 2011-02-22 | Seco Tools Ab | Nanolaminerat belagt skärverktyg |
WO2010150335A1 (ja) * | 2009-06-22 | 2010-12-29 | 株式会社タンガロイ | 被覆立方晶窒化硼素焼結体工具 |
EP2336383A1 (en) † | 2009-12-04 | 2011-06-22 | Sandvik Intellectual Property AB | Multilayered coated cutting tool |
JP5190971B2 (ja) * | 2009-12-16 | 2013-04-24 | 住友電気工業株式会社 | 被膜、切削工具および被膜の製造方法 |
WO2011083457A1 (en) | 2010-01-11 | 2011-07-14 | Iscar Ltd. | Coated cutting tool |
JP2011167793A (ja) * | 2010-02-18 | 2011-09-01 | Mitsubishi Materials Corp | 表面被覆切削工具 |
RU2428509C1 (ru) * | 2010-04-13 | 2011-09-10 | Государственное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" | Способ получения многослойного покрытия для режущего инструмента |
RU2419680C1 (ru) * | 2010-04-20 | 2011-05-27 | Государственное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" | Способ получения многослойного покрытия для режущего инструмента |
WO2011131756A1 (en) * | 2010-04-23 | 2011-10-27 | Seco Tools Ab | Pvd coating for metal machining |
US8409695B2 (en) | 2010-05-28 | 2013-04-02 | Kennametal Inc. | Multilayer nitride hard coatings |
EP2591869B1 (en) * | 2010-07-06 | 2015-09-09 | Tungaloy Corporation | Coated polycrystalline cbn tool |
DE102010034321B4 (de) | 2010-08-09 | 2017-04-06 | Technische Universität Dresden | Verfahren zur Herstellung einer Hartstoffbeschichtung auf metallischen, keramischen oder hartmetallischen Bauteilen sowie eine mit dem Verfahren hergestellte Hartstoffbeschichtung |
US9056437B2 (en) | 2010-11-26 | 2015-06-16 | Sumitomo Electric Hardmetal Corp. | Surface-coated sintered body |
DE102011117177A1 (de) † | 2011-10-28 | 2013-05-02 | Oerlikon Trading Ag, Trübbach | Verfahren zur Bereitstellung sequenzieller Leistungspulse |
DE102011018363A1 (de) † | 2011-04-20 | 2012-10-25 | Oerlikon Trading Ag, Trübbach | Hochleistungszerstäubungsquelle |
EP2699709A1 (en) † | 2011-04-20 | 2014-02-26 | Oerlikon Trading AG, Trübbach | High power impulse magnetron sputtering method providing enhanced ionization of the sputtered particles and apparatus for its implementation |
DE102011053372A1 (de) | 2011-09-07 | 2013-03-07 | Walter Ag | Werkzeug mit chromhaltiger Funktionsschicht |
MY181526A (en) | 2011-12-05 | 2020-12-25 | Oerlikon Surface Solutions Ag Trubbach | Reactive sputtering process |
DE102012209293B3 (de) † | 2012-06-01 | 2013-06-20 | Helmholtz-Zentrum Dresden - Rossendorf E.V. | Sputterverfahren |
-
2014
- 2014-07-01 CA CA2916784A patent/CA2916784C/en not_active Expired - Fee Related
- 2014-07-01 CN CN201480037761.2A patent/CN105392911B/zh active Active
- 2014-07-01 KR KR1020177026135A patent/KR102178189B1/ko active IP Right Grant
- 2014-07-01 PT PT147371488T patent/PT3017079T/pt unknown
- 2014-07-01 RU RU2016102845A patent/RU2674179C2/ru active
- 2014-07-01 BR BR112015032169-0A patent/BR112015032169B1/pt active IP Right Grant
- 2014-07-01 SG SG11201510417RA patent/SG11201510417RA/en unknown
- 2014-07-01 MY MYPI2015704719A patent/MY187100A/en unknown
- 2014-07-01 US US14/902,826 patent/US9840768B2/en active Active
- 2014-07-01 WO PCT/EP2014/001792 patent/WO2015000581A1/de active Application Filing
- 2014-07-01 PL PL14737148T patent/PL3017079T5/pl unknown
- 2014-07-01 KR KR1020167002703A patent/KR101891900B1/ko active IP Right Grant
- 2014-07-01 MX MX2015017033A patent/MX361325B/es active IP Right Grant
- 2014-07-01 JP JP2015563197A patent/JP6122975B2/ja active Active
- 2014-07-01 ES ES14737148T patent/ES2630316T5/es active Active
- 2014-07-01 EP EP14737148.8A patent/EP3017079B2/de active Active
-
2015
- 2015-12-09 PH PH12015502753A patent/PH12015502753A1/en unknown
- 2015-12-15 IL IL243136A patent/IL243136A/en active IP Right Grant
-
2016
- 2016-06-29 HK HK16107568.9A patent/HK1219516A1/zh unknown
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