PL178495B1 - Układ zwierciadeł cienkowarstwowych ruchomych i sposób wytwarzania w niskiej temperaturze układu zwierciadeł cienkowarstwowych ruchomych - Google Patents

Układ zwierciadeł cienkowarstwowych ruchomych i sposób wytwarzania w niskiej temperaturze układu zwierciadeł cienkowarstwowych ruchomych

Info

Publication number
PL178495B1
PL178495B1 PL95320827A PL32082795A PL178495B1 PL 178495 B1 PL178495 B1 PL 178495B1 PL 95320827 A PL95320827 A PL 95320827A PL 32082795 A PL32082795 A PL 32082795A PL 178495 B1 PL178495 B1 PL 178495B1
Authority
PL
Poland
Prior art keywords
layer
thin
thin film
electrode
electro
Prior art date
Application number
PL95320827A
Other languages
English (en)
Polish (pl)
Other versions
PL320827A1 (en
Inventor
Yong-Ki Min
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Publication of PL320827A1 publication Critical patent/PL320827A1/xx
Publication of PL178495B1 publication Critical patent/PL178495B1/pl

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Transforming Electric Information Into Light Information (AREA)
  • Bipolar Transistors (AREA)
  • Electroluminescent Light Sources (AREA)
  • Rear-View Mirror Devices That Are Mounted On The Exterior Of The Vehicle (AREA)
  • Laminated Bodies (AREA)
PL95320827A 1994-12-19 1995-11-22 Układ zwierciadeł cienkowarstwowych ruchomych i sposób wytwarzania w niskiej temperaturze układu zwierciadeł cienkowarstwowych ruchomych PL178495B1 (pl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1019940034972A KR100203577B1 (ko) 1994-12-19 1994-12-19 광로조절장치와 그 제조방법
PCT/KR1995/000153 WO1996019896A1 (en) 1994-12-19 1995-11-22 Low temperature formed thin film actuated mirror array

Publications (2)

Publication Number Publication Date
PL320827A1 PL320827A1 (en) 1997-11-10
PL178495B1 true PL178495B1 (pl) 2000-05-31

Family

ID=19402117

Family Applications (1)

Application Number Title Priority Date Filing Date
PL95320827A PL178495B1 (pl) 1994-12-19 1995-11-22 Układ zwierciadeł cienkowarstwowych ruchomych i sposób wytwarzania w niskiej temperaturze układu zwierciadeł cienkowarstwowych ruchomych

Country Status (18)

Country Link
US (1) US5706121A (OSRAM)
EP (1) EP0718658B1 (OSRAM)
JP (1) JP3523881B2 (OSRAM)
KR (1) KR100203577B1 (OSRAM)
CN (1) CN1070330C (OSRAM)
AR (1) AR000913A1 (OSRAM)
AU (1) AU703795B2 (OSRAM)
BR (1) BR9510206A (OSRAM)
CA (1) CA2208089A1 (OSRAM)
CZ (1) CZ188297A3 (OSRAM)
DE (1) DE69521283T2 (OSRAM)
HU (1) HU221359B1 (OSRAM)
MY (1) MY113094A (OSRAM)
PE (1) PE55296A1 (OSRAM)
PL (1) PL178495B1 (OSRAM)
RU (1) RU2156487C2 (OSRAM)
TW (1) TW305945B (OSRAM)
WO (1) WO1996019896A1 (OSRAM)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5991064A (en) * 1996-06-29 1999-11-23 Daewoo Electronics Co., Ltd. Thin film actuated mirror array and a method for the manufacture thereof
GB9625512D0 (en) * 1996-12-09 1997-01-29 Crosfield Electronics Ltd Radiation beam scanning apparatus and method
RU2187212C2 (ru) * 1997-05-27 2002-08-10 Дэу Электроникс Ко., Лтд. Способ изготовления матрицы управляемых тонкопленочных зеркал
US20060152830A1 (en) * 2005-01-12 2006-07-13 John Farah Polyimide deformable mirror
WO2008026056A2 (en) * 2006-08-31 2008-03-06 Dynea Oy Novel hybrid binder with natural compounds for low emission products

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3544201A (en) * 1968-01-02 1970-12-01 Gen Telephone & Elect Optical beam deflector
EP0046873A1 (en) * 1980-09-02 1982-03-10 Texas Instruments Incorporated Deformable mirror light modulator
US4615595A (en) * 1984-10-10 1986-10-07 Texas Instruments Incorporated Frame addressed spatial light modulator
US4793699A (en) * 1985-04-19 1988-12-27 Canon Kabushiki Kaisha Projection apparatus provided with an electro-mechanical transducer element
US5172262A (en) * 1985-10-30 1992-12-15 Texas Instruments Incorporated Spatial light modulator and method
JPS63117671A (ja) * 1986-10-31 1988-05-21 Minolta Camera Co Ltd バイモルフ駆動素子
JPH088777B2 (ja) * 1986-11-05 1996-01-29 三菱電機株式会社 インバ−タ装置の制御回路
US5126836A (en) * 1989-11-01 1992-06-30 Aura Systems, Inc. Actuated mirror optical intensity modulation
US5185660A (en) * 1989-11-01 1993-02-09 Aura Systems, Inc. Actuated mirror optical intensity modulation
GB2239101B (en) * 1989-11-17 1993-09-22 Marconi Gec Ltd Optical device
US5085497A (en) * 1990-03-16 1992-02-04 Aura Systems, Inc. Method for fabricating mirror array for optical projection system
JP3148946B2 (ja) * 1991-05-30 2001-03-26 キヤノン株式会社 探針駆動機構並びに該機構を用いたトンネル電流検出装置、情報処理装置、圧電式アクチュエータ
US5170283A (en) * 1991-07-24 1992-12-08 Northrop Corporation Silicon spatial light modulator
US5159225A (en) * 1991-10-18 1992-10-27 Aura Systems, Inc. Piezoelectric actuator
US5175465A (en) * 1991-10-18 1992-12-29 Aura Systems, Inc. Piezoelectric and electrostrictive actuators
US5247222A (en) * 1991-11-04 1993-09-21 Engle Craig D Constrained shear mode modulator
CA2176111A1 (en) * 1993-11-09 1995-05-18 Jeong Beom Ji Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof
US5481396A (en) * 1994-02-23 1996-01-02 Aura Systems, Inc. Thin film actuated mirror array

Also Published As

Publication number Publication date
HU221359B1 (en) 2002-09-28
JP3523881B2 (ja) 2004-04-26
MX9704519A (es) 1997-10-31
JPH10510931A (ja) 1998-10-20
TW305945B (OSRAM) 1997-05-21
RU2156487C2 (ru) 2000-09-20
US5706121A (en) 1998-01-06
BR9510206A (pt) 1997-11-04
HUT77725A (hu) 1998-07-28
AU3882095A (en) 1996-07-10
EP0718658B1 (en) 2001-06-13
DE69521283D1 (de) 2001-07-19
MY113094A (en) 2001-11-30
EP0718658A1 (en) 1996-06-26
AR000913A1 (es) 1997-08-27
PL320827A1 (en) 1997-11-10
DE69521283T2 (de) 2001-09-20
KR960028118A (ko) 1996-07-22
CN1176727A (zh) 1998-03-18
CA2208089A1 (en) 1996-06-27
PE55296A1 (es) 1996-12-03
WO1996019896A1 (en) 1996-06-27
AU703795B2 (en) 1999-04-01
KR100203577B1 (ko) 1999-06-15
CZ188297A3 (cs) 1998-03-18
CN1070330C (zh) 2001-08-29

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