HUT77725A - Vékonyréteggel működtetett tükörelem-elrendezés és eljárás annak előállítására - Google Patents

Vékonyréteggel működtetett tükörelem-elrendezés és eljárás annak előállítására

Info

Publication number
HUT77725A
HUT77725A HU9800814A HU9800814A HUT77725A HU T77725 A HUT77725 A HU T77725A HU 9800814 A HU9800814 A HU 9800814A HU 9800814 A HU9800814 A HU 9800814A HU T77725 A HUT77725 A HU T77725A
Authority
HU
Hungary
Prior art keywords
thin film
low temperature
mirror array
formed thin
actuated mirror
Prior art date
Application number
HU9800814A
Other languages
English (en)
Other versions
HU221359B1 (en
Inventor
Yong Ki Min
Original Assignee
Daewoo Electronics Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daewoo Electronics Co., Ltd. filed Critical Daewoo Electronics Co., Ltd.
Publication of HUT77725A publication Critical patent/HUT77725A/hu
Publication of HU221359B1 publication Critical patent/HU221359B1/hu

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Rear-View Mirror Devices That Are Mounted On The Exterior Of The Vehicle (AREA)
  • Laminated Bodies (AREA)
  • Bipolar Transistors (AREA)
  • Electroluminescent Light Sources (AREA)
HU9800814A 1994-12-19 1995-11-22 Low temperature formed thin film actuated mirror array HU221359B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1019940034972A KR100203577B1 (ko) 1994-12-19 1994-12-19 광로조절장치와 그 제조방법
PCT/KR1995/000153 WO1996019896A1 (en) 1994-12-19 1995-11-22 Low temperature formed thin film actuated mirror array

Publications (2)

Publication Number Publication Date
HUT77725A true HUT77725A (hu) 1998-07-28
HU221359B1 HU221359B1 (en) 2002-09-28

Family

ID=19402117

Family Applications (1)

Application Number Title Priority Date Filing Date
HU9800814A HU221359B1 (en) 1994-12-19 1995-11-22 Low temperature formed thin film actuated mirror array

Country Status (18)

Country Link
US (1) US5706121A (hu)
EP (1) EP0718658B1 (hu)
JP (1) JP3523881B2 (hu)
KR (1) KR100203577B1 (hu)
CN (1) CN1070330C (hu)
AR (1) AR000913A1 (hu)
AU (1) AU703795B2 (hu)
BR (1) BR9510206A (hu)
CA (1) CA2208089A1 (hu)
CZ (1) CZ188297A3 (hu)
DE (1) DE69521283T2 (hu)
HU (1) HU221359B1 (hu)
MY (1) MY113094A (hu)
PE (1) PE55296A1 (hu)
PL (1) PL178495B1 (hu)
RU (1) RU2156487C2 (hu)
TW (1) TW305945B (hu)
WO (1) WO1996019896A1 (hu)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5991064A (en) * 1996-06-29 1999-11-23 Daewoo Electronics Co., Ltd. Thin film actuated mirror array and a method for the manufacture thereof
GB9625512D0 (en) * 1996-12-09 1997-01-29 Crosfield Electronics Ltd Radiation beam scanning apparatus and method
US20060152830A1 (en) * 2005-01-12 2006-07-13 John Farah Polyimide deformable mirror
CN101511960A (zh) * 2006-08-31 2009-08-19 太尔公司 用于低排放产品的含有天然化合物的新型复合粘合剂

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3544201A (en) * 1968-01-02 1970-12-01 Gen Telephone & Elect Optical beam deflector
US4615595A (en) * 1984-10-10 1986-10-07 Texas Instruments Incorporated Frame addressed spatial light modulator
US4793699A (en) * 1985-04-19 1988-12-27 Canon Kabushiki Kaisha Projection apparatus provided with an electro-mechanical transducer element
US5172262A (en) * 1985-10-30 1992-12-15 Texas Instruments Incorporated Spatial light modulator and method
JPS63117671A (ja) * 1986-10-31 1988-05-21 Minolta Camera Co Ltd バイモルフ駆動素子
JPH088777B2 (ja) * 1986-11-05 1996-01-29 三菱電機株式会社 インバ−タ装置の制御回路
US5185660A (en) * 1989-11-01 1993-02-09 Aura Systems, Inc. Actuated mirror optical intensity modulation
US5126836A (en) * 1989-11-01 1992-06-30 Aura Systems, Inc. Actuated mirror optical intensity modulation
GB2239101B (en) * 1989-11-17 1993-09-22 Marconi Gec Ltd Optical device
US5085497A (en) * 1990-03-16 1992-02-04 Aura Systems, Inc. Method for fabricating mirror array for optical projection system
JP3148946B2 (ja) * 1991-05-30 2001-03-26 キヤノン株式会社 探針駆動機構並びに該機構を用いたトンネル電流検出装置、情報処理装置、圧電式アクチュエータ
US5170283A (en) * 1991-07-24 1992-12-08 Northrop Corporation Silicon spatial light modulator
US5175465A (en) * 1991-10-18 1992-12-29 Aura Systems, Inc. Piezoelectric and electrostrictive actuators
US5159225A (en) * 1991-10-18 1992-10-27 Aura Systems, Inc. Piezoelectric actuator
US5247222A (en) * 1991-11-04 1993-09-21 Engle Craig D Constrained shear mode modulator
WO1995013683A1 (en) * 1993-11-09 1995-05-18 Daewoo Electronics Co., Ltd. Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof
US5481396A (en) * 1994-02-23 1996-01-02 Aura Systems, Inc. Thin film actuated mirror array

Also Published As

Publication number Publication date
BR9510206A (pt) 1997-11-04
AU703795B2 (en) 1999-04-01
AR000913A1 (es) 1997-08-27
HU221359B1 (en) 2002-09-28
WO1996019896A1 (en) 1996-06-27
RU2156487C2 (ru) 2000-09-20
KR960028118A (ko) 1996-07-22
AU3882095A (en) 1996-07-10
DE69521283D1 (de) 2001-07-19
KR100203577B1 (ko) 1999-06-15
PE55296A1 (es) 1996-12-03
CA2208089A1 (en) 1996-06-27
DE69521283T2 (de) 2001-09-20
PL320827A1 (en) 1997-11-10
TW305945B (hu) 1997-05-21
MX9704519A (es) 1997-10-31
CN1070330C (zh) 2001-08-29
CN1176727A (zh) 1998-03-18
MY113094A (en) 2001-11-30
JPH10510931A (ja) 1998-10-20
PL178495B1 (pl) 2000-05-31
US5706121A (en) 1998-01-06
JP3523881B2 (ja) 2004-04-26
CZ188297A3 (cs) 1998-03-18
EP0718658A1 (en) 1996-06-26
EP0718658B1 (en) 2001-06-13

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