AR000913A1 - Conjunto de m x n espejos accionados de pelicula delgada y metodo para la fabricacion del mismo. - Google Patents
Conjunto de m x n espejos accionados de pelicula delgada y metodo para la fabricacion del mismo.Info
- Publication number
- AR000913A1 AR000913A1 ARP950100283A AR10028395A AR000913A1 AR 000913 A1 AR000913 A1 AR 000913A1 AR P950100283 A ARP950100283 A AR P950100283A AR 10028395 A AR10028395 A AR 10028395A AR 000913 A1 AR000913 A1 AR 000913A1
- Authority
- AR
- Argentina
- Prior art keywords
- thin film
- electrode
- actuator
- electromovable
- manufacture
- Prior art date
Links
- 239000010409 thin film Substances 0.000 title abstract 7
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title 1
- 239000011159 matrix material Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S359/00—Optical: systems and elements
- Y10S359/904—Micromirror
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
- Optical Elements Other Than Lenses (AREA)
- Transforming Electric Information Into Light Information (AREA)
- Bipolar Transistors (AREA)
- Electroluminescent Light Sources (AREA)
- Rear-View Mirror Devices That Are Mounted On The Exterior Of The Vehicle (AREA)
- Laminated Bodies (AREA)
Abstract
Un conjunto de M x N espejos accionados de película delgada y método para fabricarlo, incluyendo el conjunto una matriz activa que tiene un substrato, unconjunto de M x N terminales de conexión y un conjunto de M x N transistores, y un conjunto deM x N estructuras accionadoras, donde cada una de lasestructuras accionadoras presenta una estructura bimorfa, e incluye una porción accionadora y una porción reflectora de luz, incluyendo la porción accionadorauna porción frontal de un primer electrodo de película delgada, un miembro electromovible superior, un electrodo intermedio, un miembro electromovibleinferior, y una porción frontal de un segundo electrodo de película delgada, estando la porción frontal eléctricamente conectada acada uno de losterminales de conexión y a cada uno de los transistores, y la porción restante del primer electrodo de película delgada está dispuesta sobre la parte superiorde la porción restante del segundo electrodo de película delgada,para formarla la porción reflectora de luz, permitiendo que los electrodos de películadelgada primero y segundo funcionen como un electrodo de senal, estando el electrodo intermedio dispuesto los miembros electromovibles superior e inferiory funcionando como un electrodo de bias común.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019940034972A KR100203577B1 (ko) | 1994-12-19 | 1994-12-19 | 광로조절장치와 그 제조방법 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AR000913A1 true AR000913A1 (es) | 1997-08-27 |
Family
ID=19402117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ARP950100283A AR000913A1 (es) | 1994-12-19 | 1995-11-23 | Conjunto de m x n espejos accionados de pelicula delgada y metodo para la fabricacion del mismo. |
Country Status (18)
| Country | Link |
|---|---|
| US (1) | US5706121A (es) |
| EP (1) | EP0718658B1 (es) |
| JP (1) | JP3523881B2 (es) |
| KR (1) | KR100203577B1 (es) |
| CN (1) | CN1070330C (es) |
| AR (1) | AR000913A1 (es) |
| AU (1) | AU703795B2 (es) |
| BR (1) | BR9510206A (es) |
| CA (1) | CA2208089A1 (es) |
| CZ (1) | CZ188297A3 (es) |
| DE (1) | DE69521283T2 (es) |
| HU (1) | HU221359B1 (es) |
| MY (1) | MY113094A (es) |
| PE (1) | PE55296A1 (es) |
| PL (1) | PL178495B1 (es) |
| RU (1) | RU2156487C2 (es) |
| TW (1) | TW305945B (es) |
| WO (1) | WO1996019896A1 (es) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5991064A (en) * | 1996-06-29 | 1999-11-23 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array and a method for the manufacture thereof |
| GB9625512D0 (en) * | 1996-12-09 | 1997-01-29 | Crosfield Electronics Ltd | Radiation beam scanning apparatus and method |
| US20060152830A1 (en) * | 2005-01-12 | 2006-07-13 | John Farah | Polyimide deformable mirror |
| CN101511960A (zh) * | 2006-08-31 | 2009-08-19 | 太尔公司 | 用于低排放产品的含有天然化合物的新型复合粘合剂 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3544201A (en) * | 1968-01-02 | 1970-12-01 | Gen Telephone & Elect | Optical beam deflector |
| US4615595A (en) * | 1984-10-10 | 1986-10-07 | Texas Instruments Incorporated | Frame addressed spatial light modulator |
| US4793699A (en) * | 1985-04-19 | 1988-12-27 | Canon Kabushiki Kaisha | Projection apparatus provided with an electro-mechanical transducer element |
| US5172262A (en) * | 1985-10-30 | 1992-12-15 | Texas Instruments Incorporated | Spatial light modulator and method |
| JPS63117671A (ja) * | 1986-10-31 | 1988-05-21 | Minolta Camera Co Ltd | バイモルフ駆動素子 |
| JPH088777B2 (ja) * | 1986-11-05 | 1996-01-29 | 三菱電機株式会社 | インバ−タ装置の制御回路 |
| US5185660A (en) * | 1989-11-01 | 1993-02-09 | Aura Systems, Inc. | Actuated mirror optical intensity modulation |
| US5126836A (en) * | 1989-11-01 | 1992-06-30 | Aura Systems, Inc. | Actuated mirror optical intensity modulation |
| GB2239101B (en) * | 1989-11-17 | 1993-09-22 | Marconi Gec Ltd | Optical device |
| US5085497A (en) * | 1990-03-16 | 1992-02-04 | Aura Systems, Inc. | Method for fabricating mirror array for optical projection system |
| JP3148946B2 (ja) * | 1991-05-30 | 2001-03-26 | キヤノン株式会社 | 探針駆動機構並びに該機構を用いたトンネル電流検出装置、情報処理装置、圧電式アクチュエータ |
| US5170283A (en) * | 1991-07-24 | 1992-12-08 | Northrop Corporation | Silicon spatial light modulator |
| US5175465A (en) * | 1991-10-18 | 1992-12-29 | Aura Systems, Inc. | Piezoelectric and electrostrictive actuators |
| US5159225A (en) * | 1991-10-18 | 1992-10-27 | Aura Systems, Inc. | Piezoelectric actuator |
| US5247222A (en) * | 1991-11-04 | 1993-09-21 | Engle Craig D | Constrained shear mode modulator |
| CA2176111A1 (en) * | 1993-11-09 | 1995-05-18 | Jeong Beom Ji | Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof |
| US5481396A (en) * | 1994-02-23 | 1996-01-02 | Aura Systems, Inc. | Thin film actuated mirror array |
-
1994
- 1994-12-19 KR KR1019940034972A patent/KR100203577B1/ko not_active IP Right Cessation
-
1995
- 1995-11-18 TW TW084112258A patent/TW305945B/zh active
- 1995-11-18 MY MYPI95003523A patent/MY113094A/en unknown
- 1995-11-22 RU RU97112466/09A patent/RU2156487C2/ru not_active IP Right Cessation
- 1995-11-22 BR BR9510206A patent/BR9510206A/pt not_active IP Right Cessation
- 1995-11-22 HU HU9800814A patent/HU221359B1/hu unknown
- 1995-11-22 CN CN95196838A patent/CN1070330C/zh not_active Expired - Lifetime
- 1995-11-22 CZ CZ971882A patent/CZ188297A3/cs unknown
- 1995-11-22 CA CA002208089A patent/CA2208089A1/en not_active Abandoned
- 1995-11-22 WO PCT/KR1995/000153 patent/WO1996019896A1/en not_active Application Discontinuation
- 1995-11-22 PL PL95320827A patent/PL178495B1/pl unknown
- 1995-11-22 JP JP51967796A patent/JP3523881B2/ja not_active Expired - Fee Related
- 1995-11-22 AU AU38820/95A patent/AU703795B2/en not_active Ceased
- 1995-11-22 DE DE69521283T patent/DE69521283T2/de not_active Expired - Lifetime
- 1995-11-22 EP EP95118378A patent/EP0718658B1/en not_active Expired - Lifetime
- 1995-11-23 AR ARP950100283A patent/AR000913A1/es unknown
- 1995-11-30 US US08/565,713 patent/US5706121A/en not_active Expired - Lifetime
- 1995-12-06 PE PE1995286536A patent/PE55296A1/es not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| RU2156487C2 (ru) | 2000-09-20 |
| PL178495B1 (pl) | 2000-05-31 |
| CN1176727A (zh) | 1998-03-18 |
| CN1070330C (zh) | 2001-08-29 |
| WO1996019896A1 (en) | 1996-06-27 |
| CA2208089A1 (en) | 1996-06-27 |
| JP3523881B2 (ja) | 2004-04-26 |
| US5706121A (en) | 1998-01-06 |
| AU3882095A (en) | 1996-07-10 |
| DE69521283D1 (de) | 2001-07-19 |
| HUT77725A (hu) | 1998-07-28 |
| EP0718658B1 (en) | 2001-06-13 |
| HU221359B1 (en) | 2002-09-28 |
| KR960028118A (ko) | 1996-07-22 |
| JPH10510931A (ja) | 1998-10-20 |
| PL320827A1 (en) | 1997-11-10 |
| DE69521283T2 (de) | 2001-09-20 |
| AU703795B2 (en) | 1999-04-01 |
| TW305945B (es) | 1997-05-21 |
| EP0718658A1 (en) | 1996-06-26 |
| BR9510206A (pt) | 1997-11-04 |
| PE55296A1 (es) | 1996-12-03 |
| MX9704519A (es) | 1997-10-31 |
| MY113094A (en) | 2001-11-30 |
| KR100203577B1 (ko) | 1999-06-15 |
| CZ188297A3 (cs) | 1998-03-18 |
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