UY24183A1 - Conjunto de espejos accionados de pelicula delgada para ser utilizados en un sistema de proyeccion optica - Google Patents

Conjunto de espejos accionados de pelicula delgada para ser utilizados en un sistema de proyeccion optica

Info

Publication number
UY24183A1
UY24183A1 UY24183A UY24183A UY24183A1 UY 24183 A1 UY24183 A1 UY 24183A1 UY 24183 A UY24183 A UY 24183A UY 24183 A UY24183 A UY 24183A UY 24183 A1 UY24183 A1 UY 24183A1
Authority
UY
Uruguay
Prior art keywords
thin
film
thin film
projection system
mirrors
Prior art date
Application number
UY24183A
Other languages
English (en)
Inventor
Yong-Ki Min
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1019950009394A external-priority patent/KR0154923B1/ko
Priority claimed from KR1019950009398A external-priority patent/KR0177250B1/ko
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Publication of UY24183A1 publication Critical patent/UY24183A1/es

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror

Abstract

Conjunto de MxN espejos accionados de película delgada que incluye una matriz activa, una capa aisladora, una capa de detención de grabado químico, y un conjunto de MxN estructuras actuadoras. Cada una presenta una punta en el extremo distal y una abertura de grabado que la atraviesa completamente, también incluye un primer electrodo de película delgada con una raya o línea horizontal, un miembro electromovible de película delgada, un segundo electrodo de película delgada, un miembro elástico y un conducto. La raya o línea horizontal, la punta y la abertura, están creadas para incrementar la eficiencia óptica de cada uno de los espejos accionados.
UY24183A 1995-04-21 1996-03-18 Conjunto de espejos accionados de pelicula delgada para ser utilizados en un sistema de proyeccion optica UY24183A1 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1019950009394A KR0154923B1 (ko) 1995-04-21 1995-04-21 광로 조절 장치의 제조방법
KR1019950009398A KR0177250B1 (ko) 1995-04-21 1995-04-21 광로 조절 장치

Publications (1)

Publication Number Publication Date
UY24183A1 true UY24183A1 (es) 1996-06-21

Family

ID=36955856

Family Applications (1)

Application Number Title Priority Date Filing Date
UY24183A UY24183A1 (es) 1995-04-21 1996-03-18 Conjunto de espejos accionados de pelicula delgada para ser utilizados en un sistema de proyeccion optica

Country Status (16)

Country Link
US (1) US5757539A (es)
EP (1) EP0741310B1 (es)
JP (1) JP3734271B2 (es)
CN (1) CN1082770C (es)
AR (1) AR001107A1 (es)
AU (1) AU698094B2 (es)
BR (1) BR9608226A (es)
CA (1) CA2218655A1 (es)
CZ (1) CZ328097A3 (es)
DE (1) DE69621516T2 (es)
HU (1) HUP9801824A3 (es)
PL (1) PL179925B1 (es)
RU (1) RU2166784C2 (es)
TW (1) TW305943B (es)
UY (1) UY24183A1 (es)
WO (1) WO1996033576A1 (es)

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US6849471B2 (en) * 2003-03-28 2005-02-01 Reflectivity, Inc. Barrier layers for microelectromechanical systems
US6969635B2 (en) * 2000-12-07 2005-11-29 Reflectivity, Inc. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
JPH1062614A (ja) * 1996-05-23 1998-03-06 Daewoo Electron Co Ltd Ｍ×ｎ個の薄膜アクチュエーテッドミラーアレイの製造方法
KR100212539B1 (ko) * 1996-06-29 1999-08-02 전주범 박막형 광로조절장치의 엑츄에이터 및 제조방법
US5991064A (en) * 1996-06-29 1999-11-23 Daewoo Electronics Co., Ltd. Thin film actuated mirror array and a method for the manufacture thereof
WO1998008127A1 (en) * 1996-08-21 1998-02-26 Daewoo Electronics Co., Ltd. Thin film actuated mirror array for use in an optical projection system
US6136390A (en) * 1996-12-11 2000-10-24 Daewoo Electronics Co., Ltd. Method for manufacturing a thin film actuatable mirror array having an enhanced structural integrity
US5949568A (en) * 1996-12-30 1999-09-07 Daewoo Electronics Co., Ltd. Array of thin film actuated mirrors having a levelling member
WO1998038801A1 (en) * 1997-02-26 1998-09-03 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
AU722330B2 (en) * 1997-02-26 2000-07-27 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
DE69706071T2 (de) * 1997-03-05 2002-04-11 Daewoo Electronics Co Ltd Dünnfilm gesteuerte spiegelgruppe und deren herstellungsverfahren
US5815305A (en) * 1997-03-10 1998-09-29 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
US5917645A (en) * 1997-03-28 1999-06-29 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
US6104525A (en) * 1997-04-29 2000-08-15 Daewoo Electronics Co., Ltd. Array of thin film actuated mirrors and method for the manufacture thereof
US5937271A (en) * 1997-05-23 1999-08-10 Daewoo Electronics Co., Inc. Method for manufacturing a thin film actuated mirror array
DE19782276T1 (de) * 1997-05-27 2000-05-25 Daewoo Electronics Co Ltd Verfahren für die Herstellung einer Dünnfilm-Stellspiegelanordnung
EP1033037B1 (en) * 1997-06-30 2006-12-13 Daewoo Electronics Corporation Thin film actuated mirror including a seeding member and an electrodisplacive member made of materials having the same crystal structure and growth direction
KR19990004774A (ko) * 1997-06-30 1999-01-25 배순훈 박막형 광로 조절 장치의 제조 방법
KR19990004787A (ko) * 1997-06-30 1999-01-25 배순훈 박막형 광로 조절 장치
EP1025711A1 (en) 1997-10-31 2000-08-09 Daewoo Electronics Co., Ltd Method for manufacturing thin film actuated mirror array in an optical projection system
US5920421A (en) * 1997-12-10 1999-07-06 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
GB2332750B (en) * 1997-12-23 2000-02-23 Daewoo Electronics Co Ltd Thin film actuated mirror array in an optical projection system and method for manufacturing the same
US6523961B2 (en) 2000-08-30 2003-02-25 Reflectivity, Inc. Projection system and mirror elements for improved contrast ratio in spatial light modulators
US7012731B2 (en) * 2000-08-30 2006-03-14 Reflectivity, Inc Packaged micromirror array for a projection display
US7027418B2 (en) 2001-01-25 2006-04-11 Bandspeed, Inc. Approach for selecting communications channels based on performance
US7023606B2 (en) * 2001-08-03 2006-04-04 Reflectivity, Inc Micromirror array for projection TV
KR100394020B1 (ko) * 2001-10-18 2003-08-09 엘지전자 주식회사 Ｄｍｄ 패널의 제조 방법
US6965468B2 (en) * 2003-07-03 2005-11-15 Reflectivity, Inc Micromirror array having reduced gap between adjacent micromirrors of the micromirror array
US20040006490A1 (en) * 2002-07-08 2004-01-08 Gingrich Mark A. Prescription data exchange system
US7042622B2 (en) * 2003-10-30 2006-05-09 Reflectivity, Inc Micromirror and post arrangements on substrates
US7281808B2 (en) * 2003-06-21 2007-10-16 Qortek, Inc. Thin, nearly wireless adaptive optical device
US20050070049A1 (en) * 2003-09-29 2005-03-31 Cheng S. J. Method for fabricating wafer-level chip scale packages
CN101038582B (zh) * 2007-04-02 2010-05-12 中国科学院光电技术研究所 用于自适应光学波前复原运算的脉动阵列处理方法及电路
US8447252B2 (en) * 2009-01-21 2013-05-21 Bandspeed, Inc. Adaptive channel scanning for detection and classification of RF signals
US8849213B2 (en) * 2009-01-21 2014-09-30 Bandspeed, Inc. Integrated circuit for signal analysis
KR101368608B1 (ko) * 2009-12-01 2014-02-27 샤프 가부시키가이샤 액티브 매트릭스 기판 및 표시 장치
JP6613593B2 (ja) 2015-04-01 2019-12-04 セイコーエプソン株式会社 電気光学装置、電気光学装置の製造方法、および電子機器

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Publication number Priority date Publication date Assignee Title
US4441791A (en) * 1980-09-02 1984-04-10 Texas Instruments Incorporated Deformable mirror light modulator
US4662746A (en) * 1985-10-30 1987-05-05 Texas Instruments Incorporated Spatial light modulator and method
US5172262A (en) * 1985-10-30 1992-12-15 Texas Instruments Incorporated Spatial light modulator and method
US5099353A (en) * 1990-06-29 1992-03-24 Texas Instruments Incorporated Architecture and process for integrating DMD with control circuit substrates
US5247222A (en) * 1991-11-04 1993-09-21 Engle Craig D Constrained shear mode modulator
US5481396A (en) * 1994-02-23 1996-01-02 Aura Systems, Inc. Thin film actuated mirror array
CN1062664C (zh) * 1994-06-22 2001-02-28 大宇电子株式会社 改进的制造薄膜可致动反射镜阵列的方法

Also Published As

Publication number Publication date
CZ328097A3 (cs) 1998-04-15
BR9608226A (pt) 1998-12-29
EP0741310B1 (en) 2002-06-05
JP3734271B2 (ja) 2006-01-11
AR001107A1 (es) 1997-09-24
CN1182519A (zh) 1998-05-20
EP0741310A1 (en) 1996-11-06
US5757539A (en) 1998-05-26
HUP9801824A3 (en) 2002-07-29
PL322906A1 (en) 1998-03-02
WO1996033576A1 (en) 1996-10-24
DE69621516D1 (de) 2002-07-11
AU698094B2 (en) 1998-10-22
JPH11503843A (ja) 1999-03-30
TW305943B (es) 1997-05-21
PL179925B1 (pl) 2000-11-30
CN1082770C (zh) 2002-04-10
RU2166784C2 (ru) 2001-05-10
CA2218655A1 (en) 1996-10-24
HUP9801824A2 (hu) 1998-11-30
AU4957096A (en) 1996-11-07
DE69621516T2 (de) 2003-01-16

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Effective date: 20160318