BR9608226A - Conjunto de espelhos atuados por um filme fino para uso em um sistema de projeção ótica - Google Patents

Conjunto de espelhos atuados por um filme fino para uso em um sistema de projeção ótica

Info

Publication number
BR9608226A
BR9608226A BR9608226A BR9608226A BR9608226A BR 9608226 A BR9608226 A BR 9608226A BR 9608226 A BR9608226 A BR 9608226A BR 9608226 A BR9608226 A BR 9608226A BR 9608226 A BR9608226 A BR 9608226A
Authority
BR
Brazil
Prior art keywords
projection system
optical projection
mirror film
actuator set
film actuator
Prior art date
Application number
BR9608226A
Other languages
English (en)
Inventor
Yong-Ki Min
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1019950009394A external-priority patent/KR0154923B1/ko
Priority claimed from KR1019950009398A external-priority patent/KR0177250B1/ko
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Publication of BR9608226A publication Critical patent/BR9608226A/pt

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror
BR9608226A 1995-04-21 1996-03-07 Conjunto de espelhos atuados por um filme fino para uso em um sistema de projeção ótica BR9608226A (pt)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR1019950009394A KR0154923B1 (ko) 1995-04-21 1995-04-21 광로 조절 장치의 제조방법
KR1019950009398A KR0177250B1 (ko) 1995-04-21 1995-04-21 광로 조절 장치
PCT/KR1996/000033 WO1996033576A1 (en) 1995-04-21 1996-03-07 Thin film actuated mirror array for use in an optical projection system

Publications (1)

Publication Number Publication Date
BR9608226A true BR9608226A (pt) 1998-12-29

Family

ID=36955856

Family Applications (1)

Application Number Title Priority Date Filing Date
BR9608226A BR9608226A (pt) 1995-04-21 1996-03-07 Conjunto de espelhos atuados por um filme fino para uso em um sistema de projeção ótica

Country Status (16)

Country Link
US (1) US5757539A (pt)
EP (1) EP0741310B1 (pt)
JP (1) JP3734271B2 (pt)
CN (1) CN1082770C (pt)
AR (1) AR001107A1 (pt)
AU (1) AU698094B2 (pt)
BR (1) BR9608226A (pt)
CA (1) CA2218655A1 (pt)
CZ (1) CZ328097A3 (pt)
DE (1) DE69621516T2 (pt)
HU (1) HUP9801824A3 (pt)
PL (1) PL179925B1 (pt)
RU (1) RU2166784C2 (pt)
TW (1) TW305943B (pt)
UY (1) UY24183A1 (pt)
WO (1) WO1996033576A1 (pt)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6849471B2 (en) * 2003-03-28 2005-02-01 Reflectivity, Inc. Barrier layers for microelectromechanical systems
US6969635B2 (en) * 2000-12-07 2005-11-29 Reflectivity, Inc. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
JPH1062614A (ja) * 1996-05-23 1998-03-06 Daewoo Electron Co Ltd Ｍ×ｎ個の薄膜アクチュエーテッドミラーアレイの製造方法
KR100212539B1 (ko) * 1996-06-29 1999-08-02 전주범 박막형 광로조절장치의 엑츄에이터 및 제조방법
US5991064A (en) * 1996-06-29 1999-11-23 Daewoo Electronics Co., Ltd. Thin film actuated mirror array and a method for the manufacture thereof
WO1998008127A1 (en) * 1996-08-21 1998-02-26 Daewoo Electronics Co., Ltd. Thin film actuated mirror array for use in an optical projection system
US6136390A (en) * 1996-12-11 2000-10-24 Daewoo Electronics Co., Ltd. Method for manufacturing a thin film actuatable mirror array having an enhanced structural integrity
US5949568A (en) * 1996-12-30 1999-09-07 Daewoo Electronics Co., Ltd. Array of thin film actuated mirrors having a levelling member
WO1998038801A1 (en) * 1997-02-26 1998-09-03 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
AU722330B2 (en) * 1997-02-26 2000-07-27 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
DE69706071T2 (de) * 1997-03-05 2002-04-11 Daewoo Electronics Co Ltd Dünnfilm gesteuerte spiegelgruppe und deren herstellungsverfahren
US5815305A (en) * 1997-03-10 1998-09-29 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
US5917645A (en) * 1997-03-28 1999-06-29 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
US6104525A (en) * 1997-04-29 2000-08-15 Daewoo Electronics Co., Ltd. Array of thin film actuated mirrors and method for the manufacture thereof
US5937271A (en) * 1997-05-23 1999-08-10 Daewoo Electronics Co., Inc. Method for manufacturing a thin film actuated mirror array
DE19782276T1 (de) * 1997-05-27 2000-05-25 Daewoo Electronics Co Ltd Verfahren für die Herstellung einer Dünnfilm-Stellspiegelanordnung
EP1033037B1 (en) * 1997-06-30 2006-12-13 Daewoo Electronics Corporation Thin film actuated mirror including a seeding member and an electrodisplacive member made of materials having the same crystal structure and growth direction
KR19990004774A (ko) * 1997-06-30 1999-01-25 배순훈 박막형 광로 조절 장치의 제조 방법
KR19990004787A (ko) * 1997-06-30 1999-01-25 배순훈 박막형 광로 조절 장치
EP1025711A1 (en) 1997-10-31 2000-08-09 Daewoo Electronics Co., Ltd Method for manufacturing thin film actuated mirror array in an optical projection system
US5920421A (en) * 1997-12-10 1999-07-06 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
GB2332750B (en) * 1997-12-23 2000-02-23 Daewoo Electronics Co Ltd Thin film actuated mirror array in an optical projection system and method for manufacturing the same
US6523961B2 (en) 2000-08-30 2003-02-25 Reflectivity, Inc. Projection system and mirror elements for improved contrast ratio in spatial light modulators
US7012731B2 (en) * 2000-08-30 2006-03-14 Reflectivity, Inc Packaged micromirror array for a projection display
US7027418B2 (en) 2001-01-25 2006-04-11 Bandspeed, Inc. Approach for selecting communications channels based on performance
US7023606B2 (en) * 2001-08-03 2006-04-04 Reflectivity, Inc Micromirror array for projection TV
KR100394020B1 (ko) * 2001-10-18 2003-08-09 엘지전자 주식회사 Ｄｍｄ 패널의 제조 방법
US6965468B2 (en) * 2003-07-03 2005-11-15 Reflectivity, Inc Micromirror array having reduced gap between adjacent micromirrors of the micromirror array
US20040006490A1 (en) * 2002-07-08 2004-01-08 Gingrich Mark A. Prescription data exchange system
US7042622B2 (en) * 2003-10-30 2006-05-09 Reflectivity, Inc Micromirror and post arrangements on substrates
US7281808B2 (en) * 2003-06-21 2007-10-16 Qortek, Inc. Thin, nearly wireless adaptive optical device
US20050070049A1 (en) * 2003-09-29 2005-03-31 Cheng S. J. Method for fabricating wafer-level chip scale packages
CN101038582B (zh) * 2007-04-02 2010-05-12 中国科学院光电技术研究所 用于自适应光学波前复原运算的脉动阵列处理方法及电路
US8447252B2 (en) * 2009-01-21 2013-05-21 Bandspeed, Inc. Adaptive channel scanning for detection and classification of RF signals
US8849213B2 (en) * 2009-01-21 2014-09-30 Bandspeed, Inc. Integrated circuit for signal analysis
KR101368608B1 (ko) * 2009-12-01 2014-02-27 샤프 가부시키가이샤 액티브 매트릭스 기판 및 표시 장치
JP6613593B2 (ja) 2015-04-01 2019-12-04 セイコーエプソン株式会社 電気光学装置、電気光学装置の製造方法、および電子機器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4441791A (en) * 1980-09-02 1984-04-10 Texas Instruments Incorporated Deformable mirror light modulator
US4662746A (en) * 1985-10-30 1987-05-05 Texas Instruments Incorporated Spatial light modulator and method
US5172262A (en) * 1985-10-30 1992-12-15 Texas Instruments Incorporated Spatial light modulator and method
US5099353A (en) * 1990-06-29 1992-03-24 Texas Instruments Incorporated Architecture and process for integrating DMD with control circuit substrates
US5247222A (en) * 1991-11-04 1993-09-21 Engle Craig D Constrained shear mode modulator
US5481396A (en) * 1994-02-23 1996-01-02 Aura Systems, Inc. Thin film actuated mirror array
CN1062664C (zh) * 1994-06-22 2001-02-28 大宇电子株式会社 改进的制造薄膜可致动反射镜阵列的方法

Also Published As

Publication number Publication date
CZ328097A3 (cs) 1998-04-15
EP0741310B1 (en) 2002-06-05
JP3734271B2 (ja) 2006-01-11
AR001107A1 (es) 1997-09-24
CN1182519A (zh) 1998-05-20
EP0741310A1 (en) 1996-11-06
US5757539A (en) 1998-05-26
HUP9801824A3 (en) 2002-07-29
PL322906A1 (en) 1998-03-02
WO1996033576A1 (en) 1996-10-24
DE69621516D1 (de) 2002-07-11
AU698094B2 (en) 1998-10-22
JPH11503843A (ja) 1999-03-30
TW305943B (pt) 1997-05-21
PL179925B1 (pl) 2000-11-30
CN1082770C (zh) 2002-04-10
RU2166784C2 (ru) 2001-05-10
CA2218655A1 (en) 1996-10-24
UY24183A1 (es) 1996-06-21
HUP9801824A2 (hu) 1998-11-30
AU4957096A (en) 1996-11-07
DE69621516T2 (de) 2003-01-16

Similar Documents

Publication Publication Date Title
BR9608226A (pt) Conjunto de espelhos atuados por um filme fino para uso em um sistema de projeção ótica
BR9509460A (pt) Arranjo de espelhos acionados por película delgada m x n para uso em sistema de projeção óptica
BR9408009A (pt) Disposição de m x n espelhos de película delgada móveis sistema de projeção óptico método para a fabricação de uma disposição de m x n espelhos de película delgada móveis para uso em um sistema de projeção óptico
DE69531153D1 (de) Optisches Projektionssystem mit Belichtungsgerät
BR9408054A (pt) Disposição de M X N espelhos de película delgada móveis para uso em um sistema de projeção óptico sistema de projeção óptico método para a fabricação de uma disposição de M X N espelhos de película delgada móveis para uso em um sistema de projeção óptico
DE69921944D1 (de) Lithographische vorrichtung mit hierfür geeignetem spiegelprojektionssystem
DE69724159D1 (de) Optische lithographie mit extrem hoher auflösung
DE69624861D1 (de) Optische Belichtungseinheit
EP1336887A4 (en) CATADIOPTRIC SYSTEM AND EXPOSURE DEVICE PROVIDED WITH SAID SYSTEM
DE59611251D1 (de) Mikrolithographie-Projektionsbelichtungsanlage mit radial-polarisations-drehender optischer Anordnung
DE69532009D1 (de) Optisches System für Rückprojektionsgerät
GB2322711B (en) Thin film actuated mirror array in an optical projection system and method for manufacturing the same
BR9507022A (pt) Conjunto de m x n espelhos atuados por filme fino no qual m e n sao números inteiros para uso em um sistema de projeçao ótica sistema de projeçao ótica e processo para fabricaçao de m x n espelhos atuados por filme fino para uso em um sistema de projeçao ótica
DE19680063D2 (de) Festkörperlasersystem für Farbbildprojektion
BR9407923A (pt) Conjunto de M x N espelhos atuados de filme fino sistema de projeçao ótico e processo para fabricaçao de um conjunto de M x N espelhos atuados de filme fino
DE69629277D1 (de) Optisches Projektionssystem und damit ausgerüstetes Belichtungsgerät
DE69632804D1 (de) Positionseinstellvorrichtung für eine optische Quelle
DE69517220D1 (de) Optisches Projektionssystem
BR9509645A (pt) Aparelho para usar com um conjunto de espelhos atuados m x n (ama) incluído em um sistema de projeção ótica
BR9402472A (pt) Filme para um emplastro adesivo para primeiros socorros
BR9206097A (pt) Sistema de lentes para uso em um projetor suspenso
AU2572000A (en) Synthetic quartz glass optical member for ultraviolet light and reduction projection exposure system using the same
GB2323678B (en) Thin film actuated mirror array in an optical projection system and method for manufacturing the same
GB2329975B (en) Thin film actuated mirror array in an optical projection system and method for manufacturing the same
ID17881A (id) Susunan cermin yang digerakkan film yang tipis didalam suatu sistim proyeksi optik dan metode pembuatannya

Legal Events

Date Code Title Description
FF Decision: intention to grant
FG9A Patent or certificate of addition granted
B24C Patent annual fee: request for for restoration

Free format text: REFERENTE A 9A,10A,11A,12A,13A,14A E 15A ANUIDADE(S).

B24H Lapse because of non-payment of annual fees (definitively: art 78 iv lpi)
B24F Patent annual fee: publication cancelled

Free format text: ANULADA A PUBLICACAO CODIGO 24.8 NA RPI NO 2256 DE 01/04/2014 POR TER SIDO INDEVIDA.

B21F Lapse acc. art. 78, item iv - on non-payment of the annual fees in time

Free format text: REFERENTE AS 9A, 10A, 11A, 12A, 13A, 14A E 15A ANUIDADES.

B24J Lapse because of non-payment of annual fees (definitively: art 78 iv lpi, resolution 113/2013 art. 12)

Free format text: EM VIRTUDE DA EXTINCAO PUBLICADA NA RPI 2606 DE 15-12-2020 E CONSIDERANDO AUSENCIA DE MANIFESTACAO DENTRO DOS PRAZOS LEGAIS, INFORMO QUE CABE SER MANTIDA A EXTINCAO DA PATENTE E SEUS CERTIFICADOS, CONFORME O DISPOSTO NO ARTIGO 12, DA RESOLUCAO 113/2013.