ID17881A - Susunan cermin yang digerakkan film yang tipis didalam suatu sistim proyeksi optik dan metode pembuatannya - Google Patents

Susunan cermin yang digerakkan film yang tipis didalam suatu sistim proyeksi optik dan metode pembuatannya

Info

Publication number
ID17881A
ID17881A IDP970296A ID970296A ID17881A ID 17881 A ID17881 A ID 17881A ID P970296 A IDP970296 A ID P970296A ID 970296 A ID970296 A ID 970296A ID 17881 A ID17881 A ID 17881A
Authority
ID
Indonesia
Prior art keywords
thin film
production method
projection system
optical projection
moved
Prior art date
Application number
IDP970296A
Other languages
English (en)
Inventor
Yun-Woo Nam
Sang-Chol Jung
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1019960033605A external-priority patent/KR100209941B1/ko
Priority claimed from KR1019960033606A external-priority patent/KR100209943B1/ko
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Publication of ID17881A publication Critical patent/ID17881A/id

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Elements Other Than Lenses (AREA)
IDP970296A 1996-08-13 1997-01-31 Susunan cermin yang digerakkan film yang tipis didalam suatu sistim proyeksi optik dan metode pembuatannya ID17881A (id)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1019960033605A KR100209941B1 (ko) 1996-08-13 1996-08-13 큰 구동 각도를 가지는 박막형 광로 조절 장치
KR1019960033606A KR100209943B1 (ko) 1996-08-13 1996-08-13 큰 구동 각도를 가지는 박막형 광로 조절장치의 제조 방법

Publications (1)

Publication Number Publication Date
ID17881A true ID17881A (id) 1998-02-05

Family

ID=26632088

Family Applications (1)

Application Number Title Priority Date Filing Date
IDP970296A ID17881A (id) 1996-08-13 1997-01-31 Susunan cermin yang digerakkan film yang tipis didalam suatu sistim proyeksi optik dan metode pembuatannya

Country Status (7)

Country Link
US (1) US5786928A (id)
EP (1) EP0855120A1 (id)
JP (1) JPH11514105A (id)
AR (1) AR005674A1 (id)
AU (1) AU1320897A (id)
ID (1) ID17881A (id)
WO (1) WO1998007280A1 (id)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6136390A (en) * 1996-12-11 2000-10-24 Daewoo Electronics Co., Ltd. Method for manufacturing a thin film actuatable mirror array having an enhanced structural integrity
CN1283369A (zh) * 1997-10-31 2001-02-07 大宇电子株式会社 光学投影系统中的薄膜驱动的反光镜组的制造方法
US6906846B2 (en) * 2002-08-14 2005-06-14 Triquint Technology Holding Co. Micro-electro-mechanical system device and method of making same
US20080080037A1 (en) * 2003-11-08 2008-04-03 Hyeong-Ryeol Oh Precisely Actuating Member and Image Tilting Device and Projection System Having Them

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5126836A (en) * 1989-11-01 1992-06-30 Aura Systems, Inc. Actuated mirror optical intensity modulation
KR970003007B1 (ko) * 1993-05-21 1997-03-13 대우전자 주식회사 투사형 화상표시장치용 광로조절장치 및 그 구동방법
PL175809B1 (pl) * 1993-11-16 1999-02-26 Daewoo Electronics Co Ltd Układ zwierciadeł cienkowarstwowych ruchomych i sposób wytwarzania układu zwierciadeł cienkowarstwowych ruchomych
KR950024553A (ko) * 1994-01-18 1995-08-21 배순훈 광로조절장치 및 제조방법
US5481396A (en) * 1994-02-23 1996-01-02 Aura Systems, Inc. Thin film actuated mirror array

Also Published As

Publication number Publication date
EP0855120A1 (en) 1998-07-29
WO1998007280A1 (en) 1998-02-19
AU1320897A (en) 1998-03-06
US5786928A (en) 1998-07-28
JPH11514105A (ja) 1999-11-30
AR005674A1 (es) 1999-07-14

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