DE69732920D1 - Spiegelraster mit dünnem film in einem optischen projektionssystem und herstellungsverfahren - Google Patents

Spiegelraster mit dünnem film in einem optischen projektionssystem und herstellungsverfahren

Info

Publication number
DE69732920D1
DE69732920D1 DE69732920T DE69732920T DE69732920D1 DE 69732920 D1 DE69732920 D1 DE 69732920D1 DE 69732920 T DE69732920 T DE 69732920T DE 69732920 T DE69732920 T DE 69732920T DE 69732920 D1 DE69732920 D1 DE 69732920D1
Authority
DE
Germany
Prior art keywords
manufacturing
thin film
projection system
optical projection
mirror grid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69732920T
Other languages
English (en)
Other versions
DE69732920T2 (de
Inventor
Joon Choi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WiniaDaewoo Co Ltd
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Priority claimed from PCT/KR1997/000015 external-priority patent/WO1998033327A1/en
Publication of DE69732920D1 publication Critical patent/DE69732920D1/de
Application granted granted Critical
Publication of DE69732920T2 publication Critical patent/DE69732920T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Elements Other Than Lenses (AREA)
DE69732920T 1997-01-23 1997-01-23 Spiegelraster mit dünnem film in einem optischen projektionssystem und herstellungsverfahren Expired - Fee Related DE69732920T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/KR1997/000015 WO1998033327A1 (en) 1997-01-23 1997-01-23 Thin film actuated mirror array in an optical projection system and method for manufacturing the same

Publications (2)

Publication Number Publication Date
DE69732920D1 true DE69732920D1 (de) 2005-05-04
DE69732920T2 DE69732920T2 (de) 2006-03-30

Family

ID=19494056

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69732920T Expired - Fee Related DE69732920T2 (de) 1997-01-23 1997-01-23 Spiegelraster mit dünnem film in einem optischen projektionssystem und herstellungsverfahren

Country Status (5)

Country Link
EP (1) EP0954929B1 (de)
JP (1) JP2002512701A (de)
AU (1) AU722024B2 (de)
CA (1) CA2278624A1 (de)
DE (1) DE69732920T2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009258511A (ja) * 2008-04-18 2009-11-05 Toyota Central R&D Labs Inc 光学素子と光学装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3283881B2 (ja) * 1993-10-29 2002-05-20 テーウー エレクトロニクス カンパニー リミテッド Ｍ×ｎ個の薄膜アクチュエーテッドミラーアレイ及びその製造方法
EP0653657B1 (de) * 1993-11-16 2000-02-23 Daewoo Electronics Co., Ltd Anordnung von gesteuerten Dünnschichtspiegeln für ein optisches Projektionssystem und Verfahren zu deren Herstellung
PE18996A1 (es) * 1994-03-09 1996-08-11 Daewoo Electronics Co Ltd Disposicion de espejos compuestos por peliculas delgadas accionadas para uso en un conjunto de proyeccion optica y metodo para fabricar la misma

Also Published As

Publication number Publication date
CA2278624A1 (en) 1998-07-30
EP0954929A1 (de) 1999-11-10
AU1320997A (en) 1998-08-18
AU722024B2 (en) 2000-07-20
JP2002512701A (ja) 2002-04-23
DE69732920T2 (de) 2006-03-30
EP0954929B1 (de) 2005-03-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee