PE18996A1 - Disposicion de espejos compuestos por peliculas delgadas accionadas para uso en un conjunto de proyeccion optica y metodo para fabricar la misma - Google Patents
Disposicion de espejos compuestos por peliculas delgadas accionadas para uso en un conjunto de proyeccion optica y metodo para fabricar la mismaInfo
- Publication number
- PE18996A1 PE18996A1 PE1995263014A PE26301495A PE18996A1 PE 18996 A1 PE18996 A1 PE 18996A1 PE 1995263014 A PE1995263014 A PE 1995263014A PE 26301495 A PE26301495 A PE 26301495A PE 18996 A1 PE18996 A1 PE 18996A1
- Authority
- PE
- Peru
- Prior art keywords
- manufacture
- arrangement
- same
- thin films
- pairs
- Prior art date
Links
- 239000010409 thin film Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 230000003287 optical effect Effects 0.000 title 1
- 229910010293 ceramic material Inorganic materials 0.000 abstract 2
- 239000011159 matrix material Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N5/00—Details of television systems
- H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
- H04N5/7416—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal
- H04N5/7458—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal the modulator being an array of deformable mirrors, e.g. digital micromirror device [DMD]
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Elements Other Than Lenses (AREA)
- Transforming Electric Information Into Light Information (AREA)
- Micromachines (AREA)
Abstract
CARACTERIZADO POR SER UN CONJUNTO DE M*N ESPEJOS ACCIONADOS DE PELICULA DELGADA,EN UNA DISPOSICION DE PROYECCION OPTICA QUE COMPRENDE: A) UNA MATRIZ ACTIVA QUE INCLUYE: 1) UN SUBSTRATO; 2) UN CONJUNTO DE M*N TRANSISTORES; 3) UN CONJUNTO DE M*N PARES DE TERMINALES DE CONEXION, DONDE LOS TERMINALES DE CONEXION EN CADA PAR ESTAN ELECTRICAMENTE CONECTADOS A CADA UNO DE LOS TRANSISTORES. B) UN CONJUNTO DE M*N MIEMBROS ELASTICOS, HECHOS DE UN MATERIAL CERAMICO, PROVISTOS CON UN EXTREMO DISTAL Y UN EXTREMO PROXIMAL, UNA SUPERFICIE SUPERIOR Y UNA INFERIOR; C) UN CONJUNTO DE M*N PARES DE ESTRUCTURAS DE ACCIONAMIENTO; D) UN CONJUNTO DE M*N PARES DE MIEMBROS DE SOPORTE, UTILIZADOS PARA SOSTENER CADA UNO DE LOS MIEMBROS ELASTICOS EN SU LUGAR, HECHOS DE MATERIAL CERAMICO; E) UN CONJUNTO DE M*N ESPEJOS PARA REFLEJAR RAYOS DE LUZ, PROVISTOS CON UN PAR DE CONDUCTOS HECHOS DE UN METAL
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019940004519A KR100207369B1 (ko) | 1994-03-09 | 1994-03-09 | 광로조절장치 및 그 제조방법 |
| KR1019940014155A KR100207366B1 (ko) | 1994-06-22 | 1994-06-22 | 광로조절장치 및 그 제조방법 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| PE18996A1 true PE18996A1 (es) | 1996-08-11 |
Family
ID=26630240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PE1995263014A PE18996A1 (es) | 1994-03-09 | 1995-03-01 | Disposicion de espejos compuestos por peliculas delgadas accionadas para uso en un conjunto de proyeccion optica y metodo para fabricar la misma |
Country Status (16)
| Country | Link |
|---|---|
| US (1) | US5663830A (es) |
| EP (1) | EP0671645A3 (es) |
| JP (1) | JPH09510025A (es) |
| CN (1) | CN1074226C (es) |
| AU (1) | AU683363B2 (es) |
| BR (1) | BR9507022A (es) |
| CA (1) | CA2191132A1 (es) |
| CZ (1) | CZ288251B6 (es) |
| HU (1) | HU220466B1 (es) |
| MX (1) | MX9603949A (es) |
| PE (1) | PE18996A1 (es) |
| PL (1) | PL176509B1 (es) |
| RU (1) | RU2129759C1 (es) |
| TW (1) | TW279207B (es) |
| UY (1) | UY23931A1 (es) |
| WO (1) | WO1995024798A1 (es) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5636051A (en) * | 1996-01-03 | 1997-06-03 | Daewoo Electronics Co., Ltd | Thin film actuated mirror array having dielectric layers |
| KR100229788B1 (ko) * | 1996-05-29 | 1999-11-15 | 전주범 | 광로 조절 장치의 제조 방법 |
| EP0810458B1 (en) * | 1996-05-29 | 2001-09-19 | Daewoo Electronics Co., Ltd | Array of thin film actuated mirrors and method for the manufacture thereof |
| US5930025A (en) * | 1996-05-29 | 1999-07-27 | Daewoo Electronics Co., Ltd. | Array of thin film actuated mirrors and method for the manufacture thereof |
| KR980003662A (ko) * | 1996-06-28 | 1998-03-30 | 배순훈 | 큰 구동 각도를 가지는 박막형 광로 조절 장치 |
| WO1998008127A1 (en) * | 1996-08-21 | 1998-02-26 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array for use in an optical projection system |
| US5898515A (en) * | 1996-11-21 | 1999-04-27 | Eastman Kodak Company | Light reflecting micromachined cantilever |
| CA2278624A1 (en) * | 1997-01-23 | 1998-07-30 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array in an optical projection system and method for manufacturing the same |
| EP0856825B1 (en) * | 1997-01-31 | 2004-11-17 | STMicroelectronics S.r.l. | Process for manufacturing integrated semiconductor devices comprising a chemoresistive gas microsensor |
| KR19980069199A (ko) * | 1997-02-27 | 1998-10-26 | 배순훈 | 광효율을 향상시킬 수 있는 박막형 광로 조절장치 및 그 제조 방법 |
| WO1998039922A1 (en) * | 1997-03-05 | 1998-09-11 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array in an optical projection system and method for manufacturing the same |
| US5815305A (en) * | 1997-03-10 | 1998-09-29 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array in an optical projection system and method for manufacturing the same |
| KR19990004774A (ko) * | 1997-06-30 | 1999-01-25 | 배순훈 | 박막형 광로 조절 장치의 제조 방법 |
| US5920421A (en) * | 1997-12-10 | 1999-07-06 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array in an optical projection system and method for manufacturing the same |
| GB2332750B (en) * | 1997-12-23 | 2000-02-23 | Daewoo Electronics Co Ltd | Thin film actuated mirror array in an optical projection system and method for manufacturing the same |
| US7281808B2 (en) * | 2003-06-21 | 2007-10-16 | Qortek, Inc. | Thin, nearly wireless adaptive optical device |
| WO2013100350A1 (en) * | 2011-12-28 | 2013-07-04 | Samsung Electronics Co., Ltd. | Image processing apparatus, upgrade apparatus, display system including the same, and control method thereof |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4954789A (en) * | 1989-09-28 | 1990-09-04 | Texas Instruments Incorporated | Spatial light modulator |
| US5126836A (en) * | 1989-11-01 | 1992-06-30 | Aura Systems, Inc. | Actuated mirror optical intensity modulation |
| US5085497A (en) * | 1990-03-16 | 1992-02-04 | Aura Systems, Inc. | Method for fabricating mirror array for optical projection system |
| US5062689A (en) * | 1990-08-21 | 1991-11-05 | Koehler Dale R | Electrostatically actuatable light modulating device |
| US5247222A (en) * | 1991-11-04 | 1993-09-21 | Engle Craig D | Constrained shear mode modulator |
| US5481396A (en) * | 1994-02-23 | 1996-01-02 | Aura Systems, Inc. | Thin film actuated mirror array |
-
1995
- 1995-03-01 PE PE1995263014A patent/PE18996A1/es not_active Application Discontinuation
- 1995-03-02 CN CN95192032A patent/CN1074226C/zh not_active Expired - Fee Related
- 1995-03-02 CZ CZ19962621A patent/CZ288251B6/cs not_active IP Right Cessation
- 1995-03-02 HU HU9602405A patent/HU220466B1/hu not_active IP Right Cessation
- 1995-03-02 PL PL95316170A patent/PL176509B1/pl not_active IP Right Cessation
- 1995-03-02 BR BR9507022A patent/BR9507022A/pt not_active IP Right Cessation
- 1995-03-02 AU AU19612/95A patent/AU683363B2/en not_active Ceased
- 1995-03-02 WO PCT/KR1995/000015 patent/WO1995024798A1/en active IP Right Grant
- 1995-03-02 JP JP7523368A patent/JPH09510025A/ja not_active Ceased
- 1995-03-02 RU RU96119962A patent/RU2129759C1/ru not_active IP Right Cessation
- 1995-03-02 MX MX9603949A patent/MX9603949A/es unknown
- 1995-03-02 CA CA002191132A patent/CA2191132A1/en not_active Abandoned
- 1995-03-07 US US08/400,065 patent/US5663830A/en not_active Expired - Fee Related
- 1995-03-08 TW TW084102214A patent/TW279207B/zh active
- 1995-03-09 EP EP95103441A patent/EP0671645A3/en not_active Withdrawn
- 1995-03-09 UY UY23931A patent/UY23931A1/es not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| CA2191132A1 (en) | 1995-09-14 |
| AU1961295A (en) | 1995-09-25 |
| US5663830A (en) | 1997-09-02 |
| HUT76217A (en) | 1997-07-28 |
| UY23931A1 (es) | 1995-08-14 |
| TW279207B (es) | 1996-06-21 |
| EP0671645A2 (en) | 1995-09-13 |
| HU220466B1 (hu) | 2002-02-28 |
| CN1074226C (zh) | 2001-10-31 |
| BR9507022A (pt) | 1997-09-09 |
| WO1995024798A1 (en) | 1995-09-14 |
| RU2129759C1 (ru) | 1999-04-27 |
| HU9602405D0 (en) | 1996-11-28 |
| CN1152988A (zh) | 1997-06-25 |
| MX9603949A (es) | 1997-05-31 |
| AU683363B2 (en) | 1997-11-06 |
| PL176509B1 (pl) | 1999-06-30 |
| CZ288251B6 (en) | 2001-05-16 |
| PL316170A1 (en) | 1996-12-23 |
| JPH09510025A (ja) | 1997-10-07 |
| CZ262196A3 (en) | 1997-06-11 |
| EP0671645A3 (en) | 1996-10-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FG | Grant, registration | ||
| FD | Application declared void or lapsed |