DE69706071T2 - Dünnfilm gesteuerte spiegelgruppe und deren herstellungsverfahren - Google Patents

Dünnfilm gesteuerte spiegelgruppe und deren herstellungsverfahren

Info

Publication number
DE69706071T2
DE69706071T2 DE69706071T DE69706071T DE69706071T2 DE 69706071 T2 DE69706071 T2 DE 69706071T2 DE 69706071 T DE69706071 T DE 69706071T DE 69706071 T DE69706071 T DE 69706071T DE 69706071 T2 DE69706071 T2 DE 69706071T2
Authority
DE
Germany
Prior art keywords
thin film
production process
mirror group
controlled mirror
film controlled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69706071T
Other languages
English (en)
Other versions
DE69706071D1 (de
Inventor
Ki Min
Joon Choi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WiniaDaewoo Co Ltd
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Application granted granted Critical
Publication of DE69706071D1 publication Critical patent/DE69706071D1/de
Publication of DE69706071T2 publication Critical patent/DE69706071T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Elements Other Than Lenses (AREA)
DE69706071T 1997-03-05 1997-03-05 Dünnfilm gesteuerte spiegelgruppe und deren herstellungsverfahren Expired - Fee Related DE69706071T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/KR1997/000034 WO1998039922A1 (en) 1997-03-05 1997-03-05 Thin film actuated mirror array in an optical projection system and method for manufacturing the same

Publications (2)

Publication Number Publication Date
DE69706071D1 DE69706071D1 (de) 2001-09-13
DE69706071T2 true DE69706071T2 (de) 2002-04-11

Family

ID=19494067

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69706071T Expired - Fee Related DE69706071T2 (de) 1997-03-05 1997-03-05 Dünnfilm gesteuerte spiegelgruppe und deren herstellungsverfahren

Country Status (6)

Country Link
EP (1) EP0966842B1 (de)
JP (1) JP2002511153A (de)
AU (1) AU741296B2 (de)
CA (1) CA2282495A1 (de)
DE (1) DE69706071T2 (de)
WO (1) WO1998039922A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10255194A1 (de) * 2002-11-27 2004-06-09 Valeo Schalter Und Sensoren Gmbh Kamerasystem

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5126836A (en) * 1989-11-01 1992-06-30 Aura Systems, Inc. Actuated mirror optical intensity modulation
PE18996A1 (es) * 1994-03-09 1996-08-11 Daewoo Electronics Co Ltd Disposicion de espejos compuestos por peliculas delgadas accionadas para uso en un conjunto de proyeccion optica y metodo para fabricar la misma
TW305943B (de) * 1995-04-21 1997-05-21 Daewoo Electronics Co Ltd

Also Published As

Publication number Publication date
EP0966842A1 (de) 1999-12-29
EP0966842B1 (de) 2001-08-08
WO1998039922A1 (en) 1998-09-11
AU741296B2 (en) 2001-11-29
DE69706071D1 (de) 2001-09-13
JP2002511153A (ja) 2002-04-09
CA2282495A1 (en) 1998-09-11
AU2234297A (en) 1998-09-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: DAEWOO ELECTRONICS CORP., SEOUL/SOUL, KR

8339 Ceased/non-payment of the annual fee