DE69629882D1 - Dünnfilm-Mehrschichtelektrode und deren Herstellungsverfahren - Google Patents

Dünnfilm-Mehrschichtelektrode und deren Herstellungsverfahren

Info

Publication number
DE69629882D1
DE69629882D1 DE69629882T DE69629882T DE69629882D1 DE 69629882 D1 DE69629882 D1 DE 69629882D1 DE 69629882 T DE69629882 T DE 69629882T DE 69629882 T DE69629882 T DE 69629882T DE 69629882 D1 DE69629882 D1 DE 69629882D1
Authority
DE
Germany
Prior art keywords
thin film
manufacturing process
film multilayer
multilayer electrode
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69629882T
Other languages
English (en)
Other versions
DE69629882T2 (de
Inventor
Yoshihiko Goto
Masato Kobayashi
Yukio Yoshino
Yuzo Katayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Application granted granted Critical
Publication of DE69629882D1 publication Critical patent/DE69629882D1/de
Publication of DE69629882T2 publication Critical patent/DE69629882T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P7/00—Resonators of the waveguide type
    • H01P7/08—Strip line resonators
    • H01P7/082—Microstripline resonators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/20—Frequency-selective devices, e.g. filters
    • H01P1/201—Filters for transverse electromagnetic waves
    • H01P1/203—Strip line filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P3/00—Waveguides; Transmission lines of the waveguide type
    • H01P3/02—Waveguides; Transmission lines of the waveguide type with two longitudinal conductors
    • H01P3/08—Microstrips; Strip lines
    • H01P3/081—Microstriplines
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P3/00—Waveguides; Transmission lines of the waveguide type
    • H01P3/18—Waveguides; Transmission lines of the waveguide type built-up from several layers to increase operating surface, i.e. alternately conductive and dielectric layers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0213—Electrical arrangements not otherwise provided for
    • H05K1/0237—High frequency adaptations

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Waveguides (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
DE69629882T 1995-08-23 1996-08-23 Dünnfilm-Mehrschichtelektrode und deren Herstellungsverfahren Expired - Fee Related DE69629882T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP23912595 1995-08-23
JP7239125A JPH0964609A (ja) 1995-08-23 1995-08-23 薄膜積層電極及びその製造方法

Publications (2)

Publication Number Publication Date
DE69629882D1 true DE69629882D1 (de) 2003-10-16
DE69629882T2 DE69629882T2 (de) 2004-07-29

Family

ID=17040164

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69629882T Expired - Fee Related DE69629882T2 (de) 1995-08-23 1996-08-23 Dünnfilm-Mehrschichtelektrode und deren Herstellungsverfahren

Country Status (7)

Country Link
US (1) US5770988A (de)
EP (1) EP0759642B1 (de)
JP (1) JPH0964609A (de)
KR (1) KR100217462B1 (de)
CA (1) CA2184022C (de)
DE (1) DE69629882T2 (de)
TW (1) TW301810B (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3087651B2 (ja) * 1996-06-03 2000-09-11 株式会社村田製作所 薄膜多層電極、高周波伝送線路、高周波共振器及び高周波フィルタ
DE69833543D1 (de) * 1997-01-28 2006-04-27 Murata Manufacturing Co Dielektrischer resonator, dielektrisches filter, dielektrischer duplexer sowie verfahren zur herstellung eines dielektrischen resonators
JPH11177310A (ja) * 1997-10-09 1999-07-02 Murata Mfg Co Ltd 高周波伝送線路、誘電体共振器、フィルタ、デュプレクサおよび通信機
EP0917237B1 (de) * 1997-10-21 2005-09-14 Murata Manufacturing Co., Ltd. Dünnfilm-Mehrschichtelektrode, Hochfrequenzübertragungsleitung, Hochfrequenzresonator und Hochfrequenzfilter
US6238812B1 (en) 1998-04-06 2001-05-29 Paul M. Brown Isotopic semiconductor batteries
US6118204A (en) * 1999-02-01 2000-09-12 Brown; Paul M. Layered metal foil semiconductor power device
JP4754670B2 (ja) * 1999-11-05 2011-08-24 住友大阪セメント株式会社 光導波路素子
GB0012437D0 (en) * 2000-05-24 2000-07-12 Univ Cranfield Improvements to filters
US7026886B2 (en) * 2003-10-09 2006-04-11 National Chiao Tung University Miniaturized microwave integrated circuit using complementary conducting surfaces
US20080272857A1 (en) * 2007-05-03 2008-11-06 Honeywell International Inc. Tunable millimeter-wave mems phase-shifter
JP2009181623A (ja) * 2008-01-30 2009-08-13 Fujitsu Ltd 磁気ヘッドおよび磁気ヘッドの製造方法
US9728304B2 (en) 2009-07-16 2017-08-08 Pct International, Inc. Shielding tape with multiple foil layers
CN103259070B (zh) * 2013-04-12 2016-08-03 上海安费诺永亿通讯电子有限公司 一种降低损耗的传输线
CN103259069B (zh) * 2013-04-12 2015-06-24 上海安费诺永亿通讯电子有限公司 一种改进损耗的传输线
US11626228B2 (en) * 2016-12-22 2023-04-11 Rogers Corporation Multi-layer magneto-dielectric material
CN106992120A (zh) * 2017-04-10 2017-07-28 华南理工大学 一种显示用电子器件高导电联耦合电极及其制备方法
CN108963402B (zh) * 2018-08-16 2023-09-26 北京华镁钛科技有限公司 一种用于制作射频微波器件及天线的传输结构及制作方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2769148A (en) * 1951-03-07 1956-10-30 Bell Telephone Labor Inc Electrical conductors
US2879183A (en) * 1955-12-15 1959-03-24 Bell Telephone Labor Inc Insulating coatings and a method for their production
US4157518A (en) * 1977-07-27 1979-06-05 Belden Corporation Leaky coaxial cable having shield layer with uniform gap
US5355105A (en) * 1993-04-12 1994-10-11 Angelucci Sr Thomas L Multi-layer flexible printed circuit and method of making same
US6148221A (en) * 1993-08-27 2000-11-14 Murata Manufacturing Co., Ltd. Thin film multilayered electrode of high frequency electromagnetic field coupling

Also Published As

Publication number Publication date
US5770988A (en) 1998-06-23
EP0759642B1 (de) 2003-09-10
CA2184022C (en) 1999-11-02
DE69629882T2 (de) 2004-07-29
CA2184022A1 (en) 1997-02-24
TW301810B (de) 1997-04-01
KR100217462B1 (ko) 1999-09-01
EP0759642A1 (de) 1997-02-26
JPH0964609A (ja) 1997-03-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee