DE69625411T2 - Herstellungsverfahren für mehrschichtige Mikrolinsen und deren Verwendung - Google Patents

Herstellungsverfahren für mehrschichtige Mikrolinsen und deren Verwendung

Info

Publication number
DE69625411T2
DE69625411T2 DE69625411T DE69625411T DE69625411T2 DE 69625411 T2 DE69625411 T2 DE 69625411T2 DE 69625411 T DE69625411 T DE 69625411T DE 69625411 T DE69625411 T DE 69625411T DE 69625411 T2 DE69625411 T2 DE 69625411T2
Authority
DE
Germany
Prior art keywords
microlenses
multilayer
manufacturing process
manufacturing
multilayer microlenses
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69625411T
Other languages
English (en)
Other versions
DE69625411D1 (de
Inventor
Paul Heremans
Gustaaf Borghs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Interuniversitair Microelektronica Centrum vzw IMEC
Original Assignee
Interuniversitair Microelektronica Centrum vzw IMEC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Interuniversitair Microelektronica Centrum vzw IMEC filed Critical Interuniversitair Microelektronica Centrum vzw IMEC
Publication of DE69625411D1 publication Critical patent/DE69625411D1/de
Application granted granted Critical
Publication of DE69625411T2 publication Critical patent/DE69625411T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • G02B3/0018—Reflow, i.e. characterized by the step of melting microstructures to form curved surfaces, e.g. manufacturing of moulds and surfaces for transfer etching
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/001—Phase modulating patterns, e.g. refractive index patterns
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Led Devices (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Led Device Packages (AREA)
DE69625411T 1995-07-11 1996-07-10 Herstellungsverfahren für mehrschichtige Mikrolinsen und deren Verwendung Expired - Lifetime DE69625411T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US102395P 1995-07-11 1995-07-11

Publications (2)

Publication Number Publication Date
DE69625411D1 DE69625411D1 (de) 2003-01-30
DE69625411T2 true DE69625411T2 (de) 2003-10-30

Family

ID=21694013

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69625411T Expired - Lifetime DE69625411T2 (de) 1995-07-11 1996-07-10 Herstellungsverfahren für mehrschichtige Mikrolinsen und deren Verwendung

Country Status (3)

Country Link
US (1) US5871888A (de)
EP (1) EP0753765B1 (de)
DE (1) DE69625411T2 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3420399B2 (ja) * 1995-07-28 2003-06-23 キヤノン株式会社 発光素子
DE19913311A1 (de) * 1998-03-25 1999-09-30 Fuji Photo Film Co Ltd Bildverarbeitungsvorrichtung
US6665014B1 (en) * 1998-11-25 2003-12-16 Intel Corporation Microlens and photodetector
US7129982B1 (en) * 1999-12-30 2006-10-31 Intel Corporation Color image sensor with integrated binary optical elements
WO2001067518A1 (en) 2000-03-09 2001-09-13 Koninklijke Philips Electronics N.V. Solid state imaging sensor in a submicron technology and method of manufacturing and use of a solid state imaging sensor
US6737223B2 (en) * 2000-08-07 2004-05-18 Shipley Company, L.L.C. Fiber optic chip with lenslet array and method of fabrication
US7086134B2 (en) * 2000-08-07 2006-08-08 Shipley Company, L.L.C. Alignment apparatus and method for aligning stacked devices
TW463058B (en) * 2000-10-20 2001-11-11 Ind Tech Res Inst Method for fabricating microlens in batch and product manufactured the same
US20030118071A1 (en) * 2001-12-20 2003-06-26 Eastman Kodak Company Laser array and method of making same
US20040223071A1 (en) * 2003-05-08 2004-11-11 David Wells Multiple microlens system for image sensors or display units
US7193784B2 (en) * 2003-05-20 2007-03-20 Kansas State University Research Foundation Nitride microlens
US7205526B2 (en) * 2003-12-22 2007-04-17 Micron Technology, Inc. Methods of fabricating layered lens structures
US20090186304A1 (en) * 2008-01-22 2009-07-23 Micron Technology, Inc. Gravity and pressure enhanced reflow process to form lens structures
US8373061B2 (en) * 2008-04-29 2013-02-12 Hewlett-Packard Development Company, L.P. Photovoltaic cells with stacked light-absorption layers and methods of fabricating the same
US8217259B2 (en) * 2009-05-29 2012-07-10 International Business Machines Corporation Enhanced efficiency solar cells and method of manufacture
JP5320270B2 (ja) * 2009-11-25 2013-10-23 株式会社沖データ 表示パネルの製造方法
CN102812387A (zh) 2010-03-31 2012-12-05 Ev集团有限责任公司 用于制造微透镜的方法和装置
SG187696A1 (en) 2010-09-02 2013-03-28 Ev Group Gmbh Die tool, device and method for producing a lens wafer
JP5883447B2 (ja) 2010-10-26 2016-03-15 エーファウ・グループ・ゲーエムベーハー レンズウエハーを製造するための方法および装置
SG2014012967A (en) 2012-05-30 2014-09-26 Ev Group E Thallner Gmbh Method and device for producing a plurality of microlenses

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4689291A (en) * 1985-08-30 1987-08-25 Xerox Corporation Pedestal-type microlens fabrication process
JPH03173472A (ja) * 1989-12-01 1991-07-26 Mitsubishi Electric Corp マイクロレンズの形成方法
JPH0812904B2 (ja) * 1990-11-30 1996-02-07 三菱電機株式会社 固体撮像素子の製造方法
JPH04239781A (ja) * 1991-01-23 1992-08-27 Eastman Kodak Japan Kk Ｌｅｄアレイチップ
JP3269644B2 (ja) * 1991-08-07 2002-03-25 大日本印刷株式会社 マイクロレンズの製造方法
JPH05326900A (ja) * 1992-05-18 1993-12-10 Mitsubishi Electric Corp 固体撮像装置とその製造方法
US5605783A (en) * 1995-01-06 1997-02-25 Eastman Kodak Company Pattern transfer techniques for fabrication of lenslet arrays for solid state imagers

Also Published As

Publication number Publication date
DE69625411D1 (de) 2003-01-30
EP0753765A2 (de) 1997-01-15
US5871888A (en) 1999-02-16
EP0753765B1 (de) 2002-12-18
EP0753765A3 (de) 1997-05-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition