DE69722673D1 - Laserherstellungsverfahren für Glassubstrate und so hergestellte Mikrolinsenmatrizen - Google Patents

Laserherstellungsverfahren für Glassubstrate und so hergestellte Mikrolinsenmatrizen

Info

Publication number
DE69722673D1
DE69722673D1 DE69722673T DE69722673T DE69722673D1 DE 69722673 D1 DE69722673 D1 DE 69722673D1 DE 69722673 T DE69722673 T DE 69722673T DE 69722673 T DE69722673 T DE 69722673T DE 69722673 D1 DE69722673 D1 DE 69722673D1
Authority
DE
Germany
Prior art keywords
produced
manufacturing process
glass substrates
microlens arrays
laser manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69722673T
Other languages
English (en)
Other versions
DE69722673T2 (de
Inventor
Tadashi Koyama
Keiji Tsunetomo
Masahiro Oikawa
Kenjiro Hamanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sheet Glass Co Ltd
Original Assignee
Nippon Sheet Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP06844096A external-priority patent/JP3797702B2/ja
Priority claimed from JP06845596A external-priority patent/JP3797703B2/ja
Priority claimed from JP17612496A external-priority patent/JP3838700B2/ja
Application filed by Nippon Sheet Glass Co Ltd filed Critical Nippon Sheet Glass Co Ltd
Application granted granted Critical
Publication of DE69722673D1 publication Critical patent/DE69722673D1/de
Publication of DE69722673T2 publication Critical patent/DE69722673T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/18—Working by laser beam, e.g. welding, cutting or boring using absorbing layers on the workpiece, e.g. for marking or protecting purposes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/389—Removing material by boring or cutting by boring of fluid openings, e.g. nozzles, jets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00—Re-forming shaped glass
    • C03B23/006—Re-forming shaped glass by fusing, e.g. for flame sealing
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00—Re-forming shaped glass
    • C03B23/02—Re-forming glass sheets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B29/00—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B29/00—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins
    • C03B29/02—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a discontinuous way
    • C03B29/025—Glass sheets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/58—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with metals in non-oxide form, e.g. CdSe
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3632—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means
    • G02B6/3644—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means the coupling means being through-holes or wall apertures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3664—2D cross sectional arrangements of the fibres
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Laser Beam Processing (AREA)
  • Surface Treatment Of Glass (AREA)
DE69722673T 1996-03-25 1997-03-14 Laserherstellungsverfahren für Glassubstrate und so hergestellte Mikrolinsenmatrizen Expired - Fee Related DE69722673T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP06844096A JP3797702B2 (ja) 1996-03-25 1996-03-25 ガラス基材のレーザ加工方法、この方法によって得られる回折格子及びマイクロレンズアレイ
JP6845596 1996-03-25
JP06845596A JP3797703B2 (ja) 1996-03-25 1996-03-25 ガラス基材のレーザ加工方法
JP6844096 1996-03-25
JP17612496 1996-07-05
JP17612496A JP3838700B2 (ja) 1996-07-05 1996-07-05 ガラス基材のレーザ加工方法

Publications (2)

Publication Number Publication Date
DE69722673D1 true DE69722673D1 (de) 2003-07-10
DE69722673T2 DE69722673T2 (de) 2004-02-05

Family

ID=27299743

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69722673T Expired - Fee Related DE69722673T2 (de) 1996-03-25 1997-03-14 Laserherstellungsverfahren für Glassubstrate und so hergestellte Mikrolinsenmatrizen
DE69705827T Expired - Fee Related DE69705827T2 (de) 1996-03-25 1997-03-14 Laserherstellungsverfahren für glassubstrate, und damit hergestellte beugunggitter

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69705827T Expired - Fee Related DE69705827T2 (de) 1996-03-25 1997-03-14 Laserherstellungsverfahren für glassubstrate, und damit hergestellte beugunggitter

Country Status (6)

Country Link
US (3) US6220058B1 (de)
EP (2) EP1016634B1 (de)
AU (1) AU1941397A (de)
DE (2) DE69722673T2 (de)
TW (1) TW440551B (de)
WO (1) WO1997035811A1 (de)

Families Citing this family (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6473220B1 (en) * 1998-01-22 2002-10-29 Trivium Technologies, Inc. Film having transmissive and reflective properties
JP2001105164A (ja) * 1999-10-07 2001-04-17 Sumitomo Heavy Ind Ltd レーザ穴あけ加工方法及び加工装置
US6825995B2 (en) 2000-04-27 2004-11-30 Sony Corporation Optical device, optical system, method of production of same, and mold for production of same
JP4659300B2 (ja) 2000-09-13 2011-03-30 浜松ホトニクス株式会社 レーザ加工方法及び半導体チップの製造方法
US20020033558A1 (en) * 2000-09-20 2002-03-21 Fahey Kevin P. UV laser cutting or shape modification of brittle, high melting temperature target materials such as ceramics or glasses
US7157038B2 (en) 2000-09-20 2007-01-02 Electro Scientific Industries, Inc. Ultraviolet laser ablative patterning of microstructures in semiconductors
US6676878B2 (en) 2001-01-31 2004-01-13 Electro Scientific Industries, Inc. Laser segmented cutting
JP4512786B2 (ja) * 2000-11-17 2010-07-28 独立行政法人産業技術総合研究所 ガラス基板の加工方法
JP2002350673A (ja) * 2001-05-23 2002-12-04 Nippon Sheet Glass Co Ltd 光モジュールおよびその組立て方法
JP2002350674A (ja) 2001-05-23 2002-12-04 Nippon Sheet Glass Co Ltd 光モジュールおよびその製造方法
JP5067684B2 (ja) * 2001-06-14 2012-11-07 Ｎｌｔテクノロジー株式会社 液晶表示装置及びその製造方法
KR100415625B1 (ko) * 2001-08-06 2004-01-24 한국전자통신연구원 이온 교환법을 이용한 평면형 광도파로 제조 방법
JP4041298B2 (ja) * 2001-10-05 2008-01-30 日本板硝子株式会社 レーザ光照射によるガラスの加工方法
JP3925169B2 (ja) * 2001-11-26 2007-06-06 株式会社デンソー レーザー光による材料の同時一括溶融方法及び装置
JP2003215388A (ja) * 2002-01-25 2003-07-30 Hitachi Metals Ltd レンズ付き光ファイバー組立体とその製造方法
US6756563B2 (en) * 2002-03-07 2004-06-29 Orbotech Ltd. System and method for forming holes in substrates containing glass
US8268704B2 (en) 2002-03-12 2012-09-18 Hamamatsu Photonics K.K. Method for dicing substrate
ATE493226T1 (de) 2002-03-12 2011-01-15 Hamamatsu Photonics Kk Verfahren zum schneiden eines bearbeiteten objekts
TWI326626B (en) 2002-03-12 2010-07-01 Hamamatsu Photonics Kk Laser processing method
US7345824B2 (en) * 2002-03-26 2008-03-18 Trivium Technologies, Inc. Light collimating device
JP2003307602A (ja) * 2002-04-18 2003-10-31 Nippon Sheet Glass Co Ltd 平板レンズおよび平板レンズアレイの製造方法
JP2003340580A (ja) * 2002-05-24 2003-12-02 Konica Minolta Holdings Inc レーザ加工方法
SG108299A1 (en) * 2002-06-11 2005-01-28 Inst Data Storage Method and apparatus for forming periodic structures
WO2004035255A1 (ja) * 2002-09-27 2004-04-29 Nec Machinery Corporation 周期構造作成方法および表面処理方法
WO2004036294A2 (en) * 2002-10-17 2004-04-29 Trivium Technologies, Inc. Light control device and methods of making same
TWI520269B (zh) 2002-12-03 2016-02-01 Hamamatsu Photonics Kk Cutting method of semiconductor substrate
FR2852250B1 (fr) 2003-03-11 2009-07-24 Jean Luc Jouvin Fourreau de protection pour canule, un ensemble d'injection comportant un tel fourreau et aiguille equipee d'un tel fourreau
DE60315515T2 (de) 2003-03-12 2007-12-13 Hamamatsu Photonics K.K., Hamamatsu Laserstrahlbearbeitungsverfahren
US7655152B2 (en) * 2004-04-26 2010-02-02 Hewlett-Packard Development Company, L.P. Etching
DE102004039023A1 (de) * 2004-08-11 2006-02-23 Siemens Ag Verfahren zur Bearbeitung eines Werkstücks mittels Laserstrahlung, Laserbearbeitungssystem
GB0509727D0 (en) * 2005-05-13 2005-06-22 Renishaw Plc Method and apparatus for scale manufacture
GB2454342B (en) * 2005-06-30 2010-02-03 Hoya Corp Optical image stabilizer
JP2007298697A (ja) * 2006-04-28 2007-11-15 Univ Of Southampton 回折素子とその製造方法
GB2451595B (en) * 2006-04-28 2009-06-17 Univ Southampton Diffraction element and method of manufacturing the same
US20100027114A1 (en) 2006-12-19 2010-02-04 Koninklijke Philips Electronics N.V. Lens structure and manufacturing method, and the manufacture of shaped polymer articles
DE102007035147A1 (de) * 2007-03-27 2008-10-02 Schleifring Und Apparatebau Gmbh Linsenanordnung für optische Drehübertrager in beliebigen Umgebungsmedien
US8226253B2 (en) * 2008-02-27 2012-07-24 Lubart Neil D Concentrators for solar power generating systems
TWI395630B (zh) * 2009-06-30 2013-05-11 Mitsuboshi Diamond Ind Co Ltd 使用雷射光之玻璃基板加工裝置
US20130051530A1 (en) * 2011-08-30 2013-02-28 Fujifilm Corporation High Aspect Ratio Grid for Phase Contrast X-ray Imaging and Method of Making the Same
CN102581109B (zh) * 2012-03-26 2014-05-28 江苏大学 一种生物非光滑表面的制备方法和装置
US9938186B2 (en) * 2012-04-13 2018-04-10 Corning Incorporated Strengthened glass articles having etched features and methods of forming the same
DE102012010635B4 (de) 2012-05-18 2022-04-07 Leibniz-Institut für Oberflächenmodifizierung e.V. Verfahren zur 3D-Strukturierung und Formgebung von Oberflächen aus harten, spröden und optischen Materialien
CN103253851A (zh) * 2013-04-27 2013-08-21 北京工业大学 一种掩膜贴片选区co2激光辐照制作玻璃微透镜的方法
CN103273196B (zh) * 2013-06-20 2015-07-08 北京工业大学 有机玻璃的co2激光选区辐照扫描加工微透镜阵列的方法
CN106574988B (zh) * 2014-07-29 2018-11-20 杜比实验室特许公司 激光加工的光学部件以及用于拾取和接合组件的相关方法
EP3047932B1 (de) * 2015-01-21 2018-12-26 Agie Charmilles New Technologies SA Laserablationsverfahren zum Gravieren einer Oberfläche mit Patch-Optimierung, mit entsprechenden Software und Bearbeitungsmaschine
CN108569851A (zh) * 2017-03-14 2018-09-25 鸿富锦精密工业（深圳）有限公司 玻璃切割方法
US11719891B2 (en) * 2020-08-05 2023-08-08 Corning Research & Development Corporation Method of making a lensed connector with photosensitive glass
US11269136B1 (en) 2020-08-27 2022-03-08 Northrop Grumman Systems Corporation Hollow core optical fiber array launcher with sealed lens block
US11446776B2 (en) 2020-08-27 2022-09-20 Northrop Grumman Systems Corporation Method for assembling a hollow core optical fiber array launcher
CN113296178B (zh) * 2021-06-09 2022-07-19 中国工程物理研究院激光聚变研究中心 一种co2激光在熔石英表面直接制备正弦相位光栅的方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3604778A (en) * 1969-10-22 1971-09-14 Bell Telephone Labor Inc Fourier transform recording with random phase shifting
US4022602A (en) * 1975-10-30 1977-05-10 The United States Of America As Represented By The Secretary Of The Navy Method of fabricating low-loss channel optical waveguides
JPS5428590A (en) * 1977-08-08 1979-03-03 Hitachi Ltd Laser processing method
DE3145278C2 (de) * 1981-11-14 1985-02-14 Schott-Zwiesel-Glaswerke Ag, 8372 Zwiesel Verfahren zum berührungslosen Abtragen von Material von der Oberfläche eines Glasgegenstandes und Vorrichtung zur Durchführung des Verfahrens
GB8414879D0 (en) * 1984-06-11 1984-07-18 Gen Electric Co Plc Optical components
US5053171A (en) 1986-10-14 1991-10-01 Allergan, Inc. Manufacture of ophthalmic lenses by excimer laser
US5656186A (en) * 1994-04-08 1997-08-12 The Regents Of The University Of Michigan Method for controlling configuration of laser induced breakdown and ablation
JP3589486B2 (ja) 1994-06-29 2004-11-17 株式会社町田製作所 マイクロレンズの製造方法
US5634955A (en) * 1995-02-13 1997-06-03 The United States Of America As Represented By The Secretary Of The Air Force Process of making channel waveguides in gel-silica
US5768022A (en) * 1995-03-08 1998-06-16 Brown University Research Foundation Laser diode having in-situ fabricated lens element
JP3270814B2 (ja) * 1996-08-27 2002-04-02 日本板硝子株式会社 回折型光学素子の製造方法
JP3155717B2 (ja) * 1996-10-24 2001-04-16 日本板硝子株式会社 マイクロレンズに対するレーザ加工方法
JPH1137927A (ja) * 1997-07-22 1999-02-12 Nippon Sheet Glass Co Ltd レインセンサを備えた透明基板

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AU1941397A (en) 1997-10-17
EP1016634A3 (de) 2000-09-27
US6220058B1 (en) 2001-04-24
DE69705827D1 (de) 2001-08-30
US20020017116A1 (en) 2002-02-14
DE69722673T2 (de) 2004-02-05
EP0889855B1 (de) 2001-07-25
WO1997035811A1 (en) 1997-10-02
US6470712B2 (en) 2002-10-29
EP0889855A1 (de) 1999-01-13
TW440551B (en) 2001-06-16
EP1016634B1 (de) 2003-06-04
US20010028502A1 (en) 2001-10-11
DE69705827T2 (de) 2001-11-08
EP1016634A2 (de) 2000-07-05

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