JP2001100119A5 - - Google Patents
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- Publication number
- JP2001100119A5 JP2001100119A5 JP1999280275A JP28027599A JP2001100119A5 JP 2001100119 A5 JP2001100119 A5 JP 2001100119A5 JP 1999280275 A JP1999280275 A JP 1999280275A JP 28027599 A JP28027599 A JP 28027599A JP 2001100119 A5 JP2001100119 A5 JP 2001100119A5
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- mirror
- mirror element
- modulation device
- light modulation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000000051 modifying Effects 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 2
- 230000000875 corresponding Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28027599A JP3800292B2 (ja) | 1999-09-30 | 1999-09-30 | 光変調デバイス及び表示装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28027599A JP3800292B2 (ja) | 1999-09-30 | 1999-09-30 | 光変調デバイス及び表示装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001100119A JP2001100119A (ja) | 2001-04-13 |
| JP2001100119A5 true JP2001100119A5 (es) | 2004-08-26 |
| JP3800292B2 JP3800292B2 (ja) | 2006-07-26 |
Family
ID=17622729
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28027599A Expired - Fee Related JP3800292B2 (ja) | 1999-09-30 | 1999-09-30 | 光変調デバイス及び表示装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3800292B2 (es) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003045642A (ja) * | 2001-07-27 | 2003-02-14 | Sony Corp | 表示素子とその製造方法 |
| JP2007073553A (ja) * | 2005-09-02 | 2007-03-22 | Kyoto Univ | 圧電アクチュエータ及びその製造方法 |
| JP5952391B2 (ja) | 2012-04-23 | 2016-07-13 | キヤノン電子株式会社 | 光走査装置及び画像読取装置 |
| JP6390508B2 (ja) * | 2015-05-07 | 2018-09-19 | 株式会社デンソー | 光走査装置 |
| KR102346728B1 (ko) | 2015-06-30 | 2022-01-04 | 삼성디스플레이 주식회사 | 표시 장치 |
| US10816733B2 (en) * | 2016-04-01 | 2020-10-27 | Intel Corporation | Piezoelectrically actuated mirrors for optical communications |
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1999
- 1999-09-30 JP JP28027599A patent/JP3800292B2/ja not_active Expired - Fee Related