AR007322A1 - Conjunto de m x n espejos accionados de pelicula delgada y metodo para la fabricacion del mismo - Google Patents

Conjunto de m x n espejos accionados de pelicula delgada y metodo para la fabricacion del mismo

Info

Publication number
AR007322A1
AR007322A1 ARP970102297A ARP970102297A AR007322A1 AR 007322 A1 AR007322 A1 AR 007322A1 AR P970102297 A ARP970102297 A AR P970102297A AR P970102297 A ARP970102297 A AR P970102297A AR 007322 A1 AR007322 A1 AR 007322A1
Authority
AR
Argentina
Prior art keywords
thin
film
film electrode
mirrors
driven mirrors
Prior art date
Application number
ARP970102297A
Other languages
English (en)
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Publication of AR007322A1 publication Critical patent/AR007322A1/es

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror

Abstract

Un conjunto de M x N espejos accionados de película delgada y método para la fabricación del mismo, donde el conjunto incluye una matriz activa y unconjunto de M x N estructuras accionadoras. Cada una de las estructuras accionadoras incluyeun electrodo superior de película delgada, un miembroelectromovible de película delgada, un electrodo inferior de película delgada, un miembro elástico y un conducto. En el conjunto, dado que el electrodosuperior de película delgada está eléctricamente conectado en forma individual a la matriz activa a través del conducto en cada uno de los espejosaccionados, si un espejo resulta inoperable por alguna razón, por ejemplo, un cortocircuito debido a un rasgado en el electrodo superior de película delgada,otros espejos accionados de película delgada en la misma hilera o columna en el conjunto 200 no se ven afectados.
ARP970102297A 1996-05-29 1997-05-29 Conjunto de m x n espejos accionados de pelicula delgada y metodo para la fabricacion del mismo AR007322A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960018394A KR100229788B1 (ko) 1996-05-29 1996-05-29 광로 조절 장치의 제조 방법

Publications (1)

Publication Number Publication Date
AR007322A1 true AR007322A1 (es) 1999-10-27

Family

ID=19459999

Family Applications (1)

Application Number Title Priority Date Filing Date
ARP970102297A AR007322A1 (es) 1996-05-29 1997-05-29 Conjunto de m x n espejos accionados de pelicula delgada y metodo para la fabricacion del mismo

Country Status (10)

Country Link
US (1) US5754331A (es)
EP (1) EP0814357B1 (es)
JP (1) JP3886538B2 (es)
KR (1) KR100229788B1 (es)
CN (1) CN1220068A (es)
AR (1) AR007322A1 (es)
AU (1) AU716014B2 (es)
DE (1) DE69725515T2 (es)
ID (1) ID16957A (es)
WO (1) WO1997046026A1 (es)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR980003662A (ko) * 1996-06-28 1998-03-30 배순훈 큰 구동 각도를 가지는 박막형 광로 조절 장치
US5949568A (en) * 1996-12-30 1999-09-07 Daewoo Electronics Co., Ltd. Array of thin film actuated mirrors having a levelling member
US5914803A (en) * 1997-07-01 1999-06-22 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
US6800212B2 (en) * 2002-05-15 2004-10-05 The Regents Of The University Of California Fabrication of optical components using Si, SiGe, SiGeC, and chemical endpoint detection

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06301066A (ja) * 1993-03-23 1994-10-28 Daewoo Electron Co Ltd ミラーアレーおよびその製法
PL176490B1 (pl) * 1993-11-09 1999-06-30 Daewoo Electronics Co Ltd Układ zwierciadeł cienkowarstwowych ruchomych i sposób wytwarzania układu zwierciadeł cienkowarstwowych ruchomych
PE18996A1 (es) * 1994-03-09 1996-08-11 Daewoo Electronics Co Ltd Disposicion de espejos compuestos por peliculas delgadas accionadas para uso en un conjunto de proyeccion optica y metodo para fabricar la misma
KR0151453B1 (ko) * 1994-04-30 1998-12-15 배순훈 광로조절장치 및 그 제조방법
KR0151457B1 (ko) * 1994-04-30 1998-12-15 배순훈 광로조절장치 및 그 제조방법
CN1062664C (zh) * 1994-06-22 2001-02-28 大宇电子株式会社 改进的制造薄膜可致动反射镜阵列的方法
KR960018646A (ko) * 1994-11-14 1996-06-17 배순훈 광로조절장치의 제조방법
US5636051A (en) * 1996-01-03 1997-06-03 Daewoo Electronics Co., Ltd Thin film actuated mirror array having dielectric layers

Also Published As

Publication number Publication date
EP0814357B1 (en) 2003-10-15
EP0814357A2 (en) 1997-12-29
KR970077763A (ko) 1997-12-12
US5754331A (en) 1998-05-19
WO1997046026A1 (en) 1997-12-04
KR100229788B1 (ko) 1999-11-15
AU2793697A (en) 1998-01-05
AU716014B2 (en) 2000-02-17
DE69725515T2 (de) 2004-09-23
DE69725515D1 (de) 2003-11-20
CN1220068A (zh) 1999-06-16
EP0814357A3 (en) 1999-02-24
ID16957A (id) 1997-11-27
JP3886538B2 (ja) 2007-02-28
JP2000511295A (ja) 2000-08-29

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