ID16957A - Barisan cermin-cermin yang digerakkan lapisan tipis dan metoda pembuatannya - Google Patents

Barisan cermin-cermin yang digerakkan lapisan tipis dan metoda pembuatannya

Info

Publication number
ID16957A
ID16957A IDP971709A ID971709A ID16957A ID 16957 A ID16957 A ID 16957A ID P971709 A IDP971709 A ID P971709A ID 971709 A ID971709 A ID 971709A ID 16957 A ID16957 A ID 16957A
Authority
ID
Indonesia
Prior art keywords
lines
thin layers
product method
mirrors moved
mirrors
Prior art date
Application number
IDP971709A
Other languages
English (en)
Inventor
Yong-Ki Min
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Publication of ID16957A publication Critical patent/ID16957A/id

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mirrors, Picture Frames, Photograph Stands, And Related Fastening Devices (AREA)
IDP971709A 1996-05-29 1997-05-23 Barisan cermin-cermin yang digerakkan lapisan tipis dan metoda pembuatannya ID16957A (id)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960018394A KR100229788B1 (ko) 1996-05-29 1996-05-29 광로 조절 장치의 제조 방법

Publications (1)

Publication Number Publication Date
ID16957A true ID16957A (id) 1997-11-27

Family

ID=19459999

Family Applications (1)

Application Number Title Priority Date Filing Date
IDP971709A ID16957A (id) 1996-05-29 1997-05-23 Barisan cermin-cermin yang digerakkan lapisan tipis dan metoda pembuatannya

Country Status (10)

Country Link
US (1) US5754331A (id)
EP (1) EP0814357B1 (id)
JP (1) JP3886538B2 (id)
KR (1) KR100229788B1 (id)
CN (1) CN1220068A (id)
AR (1) AR007322A1 (id)
AU (1) AU716014B2 (id)
DE (1) DE69725515T2 (id)
ID (1) ID16957A (id)
WO (1) WO1997046026A1 (id)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR980003662A (ko) * 1996-06-28 1998-03-30 배순훈 큰 구동 각도를 가지는 박막형 광로 조절 장치
US5949568A (en) * 1996-12-30 1999-09-07 Daewoo Electronics Co., Ltd. Array of thin film actuated mirrors having a levelling member
US5914803A (en) * 1997-07-01 1999-06-22 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
US6800212B2 (en) * 2002-05-15 2004-10-05 The Regents Of The University Of California Fabrication of optical components using Si, SiGe, SiGeC, and chemical endpoint detection

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06301066A (ja) * 1993-03-23 1994-10-28 Daewoo Electron Co Ltd ミラーアレーおよびその製法
CA2176111A1 (en) * 1993-11-09 1995-05-18 Jeong Beom Ji Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof
PE18996A1 (es) * 1994-03-09 1996-08-11 Daewoo Electronics Co Ltd Disposicion de espejos compuestos por peliculas delgadas accionadas para uso en un conjunto de proyeccion optica y metodo para fabricar la misma
KR0151453B1 (ko) * 1994-04-30 1998-12-15 배순훈 광로조절장치 및 그 제조방법
KR0151457B1 (ko) * 1994-04-30 1998-12-15 배순훈 광로조절장치 및 그 제조방법
CN1062664C (zh) * 1994-06-22 2001-02-28 大宇电子株式会社 改进的制造薄膜可致动反射镜阵列的方法
KR960018646A (ko) * 1994-11-14 1996-06-17 배순훈 광로조절장치의 제조방법
US5636051A (en) * 1996-01-03 1997-06-03 Daewoo Electronics Co., Ltd Thin film actuated mirror array having dielectric layers

Also Published As

Publication number Publication date
EP0814357A2 (en) 1997-12-29
US5754331A (en) 1998-05-19
JP2000511295A (ja) 2000-08-29
AU716014B2 (en) 2000-02-17
DE69725515D1 (de) 2003-11-20
AR007322A1 (es) 1999-10-27
DE69725515T2 (de) 2004-09-23
KR100229788B1 (ko) 1999-11-15
EP0814357A3 (en) 1999-02-24
JP3886538B2 (ja) 2007-02-28
CN1220068A (zh) 1999-06-16
WO1997046026A1 (en) 1997-12-04
AU2793697A (en) 1998-01-05
KR970077763A (ko) 1997-12-12
EP0814357B1 (en) 2003-10-15

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