JP3886538B2 - Ｍ×ｎ個の薄膜アクチュエーテッドミラーアレイ及びその製造方法 - Google Patents

Ｍ×ｎ個の薄膜アクチュエーテッドミラーアレイ及びその製造方法 Download PDF

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Publication number
JP3886538B2
JP3886538B2 JP54206297A JP54206297A JP3886538B2 JP 3886538 B2 JP3886538 B2 JP 3886538B2 JP 54206297 A JP54206297 A JP 54206297A JP 54206297 A JP54206297 A JP 54206297A JP 3886538 B2 JP3886538 B2 JP 3886538B2
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JP
Japan
Prior art keywords
thin film
layer
array
actuated mirror
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP54206297A
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English (en)
Japanese (ja)
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JP2000511295A (ja
Inventor
ミン、ヨング―キ
Original Assignee
デーウー・エレクトロニクス・コーポレイション
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Publication of JP2000511295A publication Critical patent/JP2000511295A/ja
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Publication of JP3886538B2 publication Critical patent/JP3886538B2/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Micromachines (AREA)
  • Mirrors, Picture Frames, Photograph Stands, And Related Fastening Devices (AREA)
JP54206297A 1996-05-29 1997-05-20 Ｍ×ｎ個の薄膜アクチュエーテッドミラーアレイ及びその製造方法 Expired - Fee Related JP3886538B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR1996/18394 1996-05-29
KR1019960018394A KR100229788B1 (ko) 1996-05-29 1996-05-29 광로 조절 장치의 제조 방법
PCT/KR1997/000090 WO1997046026A1 (en) 1996-05-29 1997-05-20 Thin film actuated mirror array and method for the manufacture thereof

Publications (2)

Publication Number Publication Date
JP2000511295A JP2000511295A (ja) 2000-08-29
JP3886538B2 true JP3886538B2 (ja) 2007-02-28

Family

ID=19459999

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54206297A Expired - Fee Related JP3886538B2 (ja) 1996-05-29 1997-05-20 Ｍ×ｎ個の薄膜アクチュエーテッドミラーアレイ及びその製造方法

Country Status (10)

Country Link
US (1) US5754331A (id)
EP (1) EP0814357B1 (id)
JP (1) JP3886538B2 (id)
KR (1) KR100229788B1 (id)
CN (1) CN1220068A (id)
AR (1) AR007322A1 (id)
AU (1) AU716014B2 (id)
DE (1) DE69725515T2 (id)
ID (1) ID16957A (id)
WO (1) WO1997046026A1 (id)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR980003662A (ko) * 1996-06-28 1998-03-30 배순훈 큰 구동 각도를 가지는 박막형 광로 조절 장치
US5949568A (en) * 1996-12-30 1999-09-07 Daewoo Electronics Co., Ltd. Array of thin film actuated mirrors having a levelling member
US5914803A (en) * 1997-07-01 1999-06-22 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
US6800212B2 (en) * 2002-05-15 2004-10-05 The Regents Of The University Of California Fabrication of optical components using Si, SiGe, SiGeC, and chemical endpoint detection

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06301066A (ja) * 1993-03-23 1994-10-28 Daewoo Electron Co Ltd ミラーアレーおよびその製法
AU693125B2 (en) * 1993-11-09 1998-06-25 Daewoo Electronics Co., Ltd. Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof
PE18996A1 (es) * 1994-03-09 1996-08-11 Daewoo Electronics Co Ltd Disposicion de espejos compuestos por peliculas delgadas accionadas para uso en un conjunto de proyeccion optica y metodo para fabricar la misma
KR0151457B1 (ko) * 1994-04-30 1998-12-15 배순훈 광로조절장치 및 그 제조방법
KR0151453B1 (ko) * 1994-04-30 1998-12-15 배순훈 광로조절장치 및 그 제조방법
CN1062664C (zh) * 1994-06-22 2001-02-28 大宇电子株式会社 改进的制造薄膜可致动反射镜阵列的方法
KR960018646A (ko) * 1994-11-14 1996-06-17 배순훈 광로조절장치의 제조방법
US5636051A (en) * 1996-01-03 1997-06-03 Daewoo Electronics Co., Ltd Thin film actuated mirror array having dielectric layers

Also Published As

Publication number Publication date
DE69725515D1 (de) 2003-11-20
JP2000511295A (ja) 2000-08-29
WO1997046026A1 (en) 1997-12-04
US5754331A (en) 1998-05-19
KR100229788B1 (ko) 1999-11-15
EP0814357B1 (en) 2003-10-15
EP0814357A2 (en) 1997-12-29
AR007322A1 (es) 1999-10-27
CN1220068A (zh) 1999-06-16
EP0814357A3 (en) 1999-02-24
DE69725515T2 (de) 2004-09-23
AU2793697A (en) 1998-01-05
ID16957A (id) 1997-11-27
KR970077763A (ko) 1997-12-12
AU716014B2 (en) 2000-02-17

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