DE69521283T2 - Bei niedriger Temperatur hergestellte Matrix aus verstellbaren Dünnfilm-Spiegeln - Google Patents

Bei niedriger Temperatur hergestellte Matrix aus verstellbaren Dünnfilm-Spiegeln

Info

Publication number
DE69521283T2
DE69521283T2 DE69521283T DE69521283T DE69521283T2 DE 69521283 T2 DE69521283 T2 DE 69521283T2 DE 69521283 T DE69521283 T DE 69521283T DE 69521283 T DE69521283 T DE 69521283T DE 69521283 T2 DE69521283 T2 DE 69521283T2
Authority
DE
Germany
Prior art keywords
low temperature
matrix made
film mirrors
adjustable thin
mirrors produced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69521283T
Other languages
English (en)
Other versions
DE69521283D1 (de
Inventor
Yong-Ki Min
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WiniaDaewoo Co Ltd
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Publication of DE69521283D1 publication Critical patent/DE69521283D1/de
Application granted granted Critical
Publication of DE69521283T2 publication Critical patent/DE69521283T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Rear-View Mirror Devices That Are Mounted On The Exterior Of The Vehicle (AREA)
  • Laminated Bodies (AREA)
  • Bipolar Transistors (AREA)
  • Electroluminescent Light Sources (AREA)
DE69521283T 1994-12-19 1995-11-22 Bei niedriger Temperatur hergestellte Matrix aus verstellbaren Dünnfilm-Spiegeln Expired - Lifetime DE69521283T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019940034972A KR100203577B1 (ko) 1994-12-19 1994-12-19 광로조절장치와 그 제조방법

Publications (2)

Publication Number Publication Date
DE69521283D1 DE69521283D1 (de) 2001-07-19
DE69521283T2 true DE69521283T2 (de) 2001-09-20

Family

ID=19402117

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69521283T Expired - Lifetime DE69521283T2 (de) 1994-12-19 1995-11-22 Bei niedriger Temperatur hergestellte Matrix aus verstellbaren Dünnfilm-Spiegeln

Country Status (18)

Country Link
US (1) US5706121A (de)
EP (1) EP0718658B1 (de)
JP (1) JP3523881B2 (de)
KR (1) KR100203577B1 (de)
CN (1) CN1070330C (de)
AR (1) AR000913A1 (de)
AU (1) AU703795B2 (de)
BR (1) BR9510206A (de)
CA (1) CA2208089A1 (de)
CZ (1) CZ188297A3 (de)
DE (1) DE69521283T2 (de)
HU (1) HU221359B1 (de)
MY (1) MY113094A (de)
PE (1) PE55296A1 (de)
PL (1) PL178495B1 (de)
RU (1) RU2156487C2 (de)
TW (1) TW305945B (de)
WO (1) WO1996019896A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5991064A (en) * 1996-06-29 1999-11-23 Daewoo Electronics Co., Ltd. Thin film actuated mirror array and a method for the manufacture thereof
GB9625512D0 (en) * 1996-12-09 1997-01-29 Crosfield Electronics Ltd Radiation beam scanning apparatus and method
US20060152830A1 (en) * 2005-01-12 2006-07-13 John Farah Polyimide deformable mirror
CN101511960A (zh) * 2006-08-31 2009-08-19 太尔公司 用于低排放产品的含有天然化合物的新型复合粘合剂

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3544201A (en) * 1968-01-02 1970-12-01 Gen Telephone & Elect Optical beam deflector
US4615595A (en) * 1984-10-10 1986-10-07 Texas Instruments Incorporated Frame addressed spatial light modulator
US4793699A (en) * 1985-04-19 1988-12-27 Canon Kabushiki Kaisha Projection apparatus provided with an electro-mechanical transducer element
US5172262A (en) * 1985-10-30 1992-12-15 Texas Instruments Incorporated Spatial light modulator and method
JPS63117671A (ja) * 1986-10-31 1988-05-21 Minolta Camera Co Ltd バイモルフ駆動素子
JPH088777B2 (ja) * 1986-11-05 1996-01-29 三菱電機株式会社 インバ−タ装置の制御回路
US5185660A (en) * 1989-11-01 1993-02-09 Aura Systems, Inc. Actuated mirror optical intensity modulation
US5126836A (en) * 1989-11-01 1992-06-30 Aura Systems, Inc. Actuated mirror optical intensity modulation
GB2239101B (en) * 1989-11-17 1993-09-22 Marconi Gec Ltd Optical device
US5085497A (en) * 1990-03-16 1992-02-04 Aura Systems, Inc. Method for fabricating mirror array for optical projection system
JP3148946B2 (ja) * 1991-05-30 2001-03-26 キヤノン株式会社 探針駆動機構並びに該機構を用いたトンネル電流検出装置、情報処理装置、圧電式アクチュエータ
US5170283A (en) * 1991-07-24 1992-12-08 Northrop Corporation Silicon spatial light modulator
US5175465A (en) * 1991-10-18 1992-12-29 Aura Systems, Inc. Piezoelectric and electrostrictive actuators
US5159225A (en) * 1991-10-18 1992-10-27 Aura Systems, Inc. Piezoelectric actuator
US5247222A (en) * 1991-11-04 1993-09-21 Engle Craig D Constrained shear mode modulator
WO1995013683A1 (en) * 1993-11-09 1995-05-18 Daewoo Electronics Co., Ltd. Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof
US5481396A (en) * 1994-02-23 1996-01-02 Aura Systems, Inc. Thin film actuated mirror array

Also Published As

Publication number Publication date
BR9510206A (pt) 1997-11-04
AU703795B2 (en) 1999-04-01
AR000913A1 (es) 1997-08-27
HU221359B1 (en) 2002-09-28
WO1996019896A1 (en) 1996-06-27
RU2156487C2 (ru) 2000-09-20
KR960028118A (ko) 1996-07-22
AU3882095A (en) 1996-07-10
DE69521283D1 (de) 2001-07-19
KR100203577B1 (ko) 1999-06-15
PE55296A1 (es) 1996-12-03
CA2208089A1 (en) 1996-06-27
PL320827A1 (en) 1997-11-10
TW305945B (de) 1997-05-21
MX9704519A (es) 1997-10-31
HUT77725A (hu) 1998-07-28
CN1070330C (zh) 2001-08-29
CN1176727A (zh) 1998-03-18
MY113094A (en) 2001-11-30
JPH10510931A (ja) 1998-10-20
PL178495B1 (pl) 2000-05-31
US5706121A (en) 1998-01-06
JP3523881B2 (ja) 2004-04-26
CZ188297A3 (cs) 1998-03-18
EP0718658A1 (de) 1996-06-26
EP0718658B1 (de) 2001-06-13

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: DAEWOO ELECTRONICS CORP., SEOUL/SOUL, KR

8364 No opposition during term of opposition